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公开(公告)号：US08398877B2
公开(公告)日：2013-03-19
申请号：US12533449
申请日：2009-07-31
CPC分类号： H01L31/18 , B81C1/00087 , H01L31/04
摘要： A method is provided for forming an opening in a layer of a selected material. The method comprises, forming a polymer resist layer over said selected material and plasticising areas of the resist where openings are to be formed. The plasticising is performed by depositing a first solution onto the surface of said polymer resist layer, where the first solution is a plasticiser selected to increase permeability of the polymer resist layer to a second solution, in an area which has absorbed the first solution. The second solution is selected to be an etchant or solvent for the selected material. After the resist layer has been selectively plasticised, it is contacted with the second solution, which permeates the polymer resist layer in the area of increased permeability and forms an opening in the selected material.
摘要翻译： 提供一种用于在所选材料的层中形成开口的方法。 该方法包括：在所述选择的材料上形成聚合物抗蚀剂层和在其上形成开口的抗蚀剂的增塑区域。 通过将第一溶液沉积到所述聚合物抗蚀剂层的表面上，其中第一溶液是被选择用于在吸收第一溶液的区域中增加聚合物抗蚀剂层到第二溶液的渗透性的增塑剂来进行增塑。 第二溶液被选择为所选材料的蚀刻剂或溶剂。 在抗蚀剂层已经选择性塑化之后，它与第二溶液接触，第二溶液在渗透性增加的区域中渗透聚合物抗蚀剂层，并在所选择的材料中形成开口。
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公开(公告)号：US20100047721A1
公开(公告)日：2010-02-25
申请号：US12533449
申请日：2009-07-31
IPC分类号： G03F7/20
CPC分类号： H01L31/18 , B81C1/00087 , H01L31/04
摘要： A method is provided for forming an opening in a layer of a selected material. The method comprises, forming a polymer resist layer over said selected material and plasticising areas of the resist where openings are to be formed. The plasticising is performed by depositing a first solution onto the surface of said polymer resist layer, where the first solution is a plasticiser selected to increase permeability of the polymer resist layer to a second solution, in an area which has absorbed the first solution. The second solution is selected to be an etchant or solvent for the selected material. After the resist layer has been selectively plasticised, it is contacted with the second solution, which permeates the polymer resist layer in the area of increased permeability and forms an opening in the selected material.
摘要翻译： 提供一种用于在所选材料的层中形成开口的方法。 该方法包括：在所述选择的材料上形成聚合物抗蚀剂层和在其上形成开口的抗蚀剂的增塑区域。 通过将第一溶液沉积到所述聚合物抗蚀剂层的表面上，其中第一溶液是被选择用于在吸收第一溶液的区域中增加聚合物抗蚀剂层到第二溶液的渗透性的增塑剂来进行增塑。 第二溶液被选择为所选材料的蚀刻剂或溶剂。 在抗蚀剂层已经选择性塑化之后，它与第二溶液接触，第二溶液在渗透性增加的区域中渗透聚合物抗蚀剂层，并在所选择的材料中形成开口。
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