公开(公告)号：US06549291B1

公开(公告)日：2003-04-15

申请号：US09655222

申请日：2000-09-05

申请人： Torsten Dieter ,  Rudolf Beckman ,  Alfons Zoller ,  Harro Hagedorn

发明人： Torsten Dieter ,  Rudolf Beckman ,  Alfons Zoller ,  Harro Hagedorn

IPC分类号： G01B1106

CPC分类号： G01B11/0633

摘要： Process for continuous determination of the optical layer thickness of coatings, which are applied on both sides of the spherical surfaces of concave convex lenses having different spherical radii R1 and R2. In this process a ray of light is beamed eccentrically during the coating process at each concave convex lens, and the reflection or transmission at the convex spherical surface and at the concave spherical surface is continuously measured with photodiodes, and the respective optical layer thickness is determined from the functional relationship between the reflection or the transmission and the optical layer thickness.

摘要翻译： 用于连续确定涂层的光学层厚度的方法，其施加在具有不同球形半径R1和R2的凹凸透镜的球面的两侧上。 在该过程中，在每个凹凸透镜的涂覆过程中，光线偏心地射出，并且用光电二极管连续地测量凸球面和凹球面处的反射或透射，并且确定相应的光学层厚度 从反射或透射与光学层厚度之间的功能关系。