Method and apparatus for recovering helium after testing for leaks in a
sample holder
    1.
    发明授权
    Method and apparatus for recovering helium after testing for leaks in a sample holder 失效
    测试样品架中泄漏后的氦气回收方法和装置

    公开(公告)号:US6119507A

    公开(公告)日:2000-09-19

    申请号:US231389

    申请日:1999-01-13

    CPC分类号: G01M3/205

    摘要: A helium supply unit (1) supplies helium from a high pressure storage (21) to fill a test chamber (6) which encloses a sample holder (5) to be examined for leaks by measuring device (2) including a mass spectrometer (3) and a control unit (4). The test gas is recovered after the testing by a pressure difference between a low pressure storage (18) and the test chamber (6). The test chamber is evacuated prior to receipt of the test gas by a vacuum pump (27) and after testing by a vacuum pump (34) for more complete helium recovery. The recovered test gas is then transmitted back to the high pressure storage (21) through a compressor (19), which raises the pressure of the recovered gas to a predetermined pressure, from the low pressure storage (18). The control unit (4) also controls a pure test gas supply (37) and a release valve (44). The concentration of the recovered test gas is measured and, if the concentration is too low, the control unit (4) releases the recovered test gas through valve (44) and admits fresh test gas from the supply (37) into the helium supply unit (1) at a point between the low pressure storage (18) and the compressor (19). In this manner, expensive test gases, such as helium, are recovered and reused.

    摘要翻译: 氦供应单元(1)从高压储存器(21)提供氦气以填充测试室(6),该测试室包围待检查的样品保持器(5),以通过包括质谱仪(3)的测量装置(2) )和控制单元(4)。 在测试之后,通过低压储存器(18)和测试室(6)之间的压力差来回收测试气体。 在通过真空泵(27)接收测试气体之前,并且在通过真空泵(34)测试以更完整的氦气回收之后,将测试室抽真空。 回收的测试气体然后通过压缩机(19)传回到高压储存器(21),压缩机将回收气体的压力从低压储存器(18)提高到预定的压力。 控制单元(4)还控制纯试气供应(37)和释放阀(44)。 测量回收的测试气体的浓度,如果浓度太低,则控制单元(4)通过阀(44)释放回收的测试气体,并将新鲜的测试气体从供应源(37)导入氦气供应单元 (1)在低压储存器(18)和压缩机(19)之间的点处。 以这种方式,昂贵的测试气体,例如氦气被回收和重复使用。

    Test leak unit
    2.
    发明授权
    Test leak unit 有权
    测试泄漏单元

    公开(公告)号:US06595040B1

    公开(公告)日:2003-07-22

    申请号:US09869746

    申请日:2001-06-29

    IPC分类号: G01M320

    CPC分类号: G01M3/207 G01M3/00 G01M3/205

    摘要: A test leak unit (1) includes a supply of test gas, preferably helium, and an element (14) for determining leakage rates. The aim of the invention is to create a simple, robust and easily refilled test leak unit, especially for detecting packaging leaks. To this end, the test gas supply is stored under substantially atmospheric pressure in a resealable reservoir (2) including a closing part (3), such that when the reservoir (2) is closed, a test gas-impermeable seal is developed between the closing part (3) and the reservoir (2), and the leakage rate-determining element (14) forms part of the closing part (3).

    摘要翻译: 测试泄漏单元(1)包括供应测试气体,优选氦气,以及用于确定泄漏率的元件(14)。 本发明的目的是创建一种简单,坚固且易于重新填充的测试泄漏单元,特别是用于检测包装泄漏。 为此,将测试气体供应在基本上大气压下储存在包括封闭部分(3)的可重新密封的储存器(2)中,使得当储存器(2)关闭时,在所述储存器(2)之间形成测试气体不可渗透密封件 关闭部分(3)和储存器(2),并且泄漏率确定元件(14)形成关闭部分(3)的一部分。

    Measuring head for vacuum gauge
    3.
    发明授权
    Measuring head for vacuum gauge 失效
    真空计测头

    公开(公告)号:US4729241A

    公开(公告)日:1988-03-08

    申请号:US932493

    申请日:1986-11-20

    IPC分类号: G01L21/12

    CPC分类号: G01L21/12

    摘要: A measuring head for a vacuum gauge. An essentially cylindrical housing encloses a measuring cell which is sealed in a vacuum tight manner against the surrounding atmosphere and is connectable with an evacuatable cavity. A measuring filament for producing an electrical signal corresponding to the pressure in the measuring cell is disposed in the measuring cell. The measuring filament is disposed approximately perpendicularly to the axial direction of the housing.

    摘要翻译: 用于真空计的测量头。 基本上圆柱形的壳体包围测量池,该测量池以真空密封的方式密封抵靠周围的大气并且可与可抽空的腔连接。 用于产生对应于测量单元中的压力的​​电信号的测量丝被设置在测量单元中。 测量灯丝大致垂直于壳体的轴向设置。

    Test gas leakage detection apparatus
    4.
    发明授权
    Test gas leakage detection apparatus 有权
    试验气体泄漏检测装置

    公开(公告)号:US06550313B1

    公开(公告)日:2003-04-22

    申请号:US09869239

    申请日:2001-06-26

    申请人: Rudolf Flosbach

    发明人: Rudolf Flosbach

    IPC分类号: G01M332

    CPC分类号: G01M3/205

    摘要: The invention relates to a test gas leakage detection apparatus (1) comprising a test chamber (2) and supply and measuring devices such as fore-pumps and high-vacuum pumps, test gas detectors, electronic components, etc. In order to construct an apparatus of this type in a manner which is simple and which does not restrict mobility, the invention provides that the test chamber (2) and the supply and measuring devices are combined to form a modular unit, and that the test chamber (2) is supported on a housing (3) in which the supply and measuring devices are accommodated. In addition, air cooling devices are assigned to thermally critical components of the supply and measuring devices.

    摘要翻译: 本发明涉及一种试验气体泄漏检测装置(1),包括测试室(2)和诸如前置泵和高真空泵,试验气体检测器,电子部件等的供应和测量装置。为了构建 本发明提供了一种简单且不限制移动性的方式,本发明提供了将测试室(2)和供应和测量装置组合以形成模块化单元,并且测试室(2)是 支撑在其中容纳供应和测量装置的壳体(3)上。 此外,空气冷却装置被分配给供应和测量装置的热关键部件。

    Conduction-responsive meter head
    5.
    发明授权
    Conduction-responsive meter head 失效
    导电响应表头

    公开(公告)号:US4729242A

    公开(公告)日:1988-03-08

    申请号:US866056

    申请日:1986-05-21

    IPC分类号: G01L21/12 G08C19/04

    CPC分类号: G01L21/12

    摘要: A conduction-responsive meter head has a device having electrical conduction responsive to a condition such as pressure to be metered. The device communicates with the condition to provide its electrical-conduction response to a bridge electrically including the device. A power supply has two terminals on the meter head for providing electrical power to the bridge. The measurement signal from the bridge is provided, however, to a third terminal by a lead from the bridge.

    摘要翻译: 导电响应计头具有响应于要计量的压力的条件而具有导电性的装置。 该装置与条件通信以向其电气地包括该装置的电桥提供其电传导响应。 电源在仪表头上有两个端子,用于向桥提供电力。 然而,来自桥的测量信号通过来自桥的引线提供给第三端。

    Film leak detector
    6.
    发明授权
    Film leak detector 有权
    薄膜检漏仪

    公开(公告)号:US06732571B1

    公开(公告)日:2004-05-11

    申请号:US09807154

    申请日:2001-04-09

    申请人: Rudolf Flosbach

    发明人: Rudolf Flosbach

    IPC分类号: G01M304

    摘要: The invention relates to a film leak detector with two films (5, 6) each stretched in a frame (3, 4); in order to attain a simple and stable structuring, it is proposed that each of the frames (3, 4) is comprised of two synthetic material subframes between which the particular film (5, 6) is fastened.

    摘要翻译: 本发明涉及一种薄膜泄漏检测器,其具有在框架(3,4)中拉伸的两个薄膜(5,6); 为了获得简单和稳定的结构,提出每个框架(3,4)由两个合成材料子框架组成,其中特定薄膜(5,6)被紧固在其之间。

    Method for operating a film leak detector and film leak detector suitable for carrying out this method
    7.
    发明授权
    Method for operating a film leak detector and film leak detector suitable for carrying out this method 有权
    用于操作适合于执行该方法的薄膜泄漏检测器和薄膜泄漏检测器的方法

    公开(公告)号:US06584829B1

    公开(公告)日:2003-07-01

    申请号:US09807162

    申请日:2001-04-09

    IPC分类号: G01M322

    CPC分类号: G01M3/229 G01M3/202 G01M3/227

    摘要: A method for operating a film leak detector (1) which includes two films (5, 6) each stretched in a frame (3, 4), which, with a test sample (79) emplaced, delimit a test chamber (80). The detector is equipped with two vacuum pumps (13, 30), in which first the test chamber (80) is evacuated and, after the evacuation operation, a leak detection operation takes place. In order to avoid test gas pollution and impurities during the first phase of the evacuation of the test chamber (80), only one (13) of the two vacuum pumps is operated and during the leak detection operation only the second vacuum pump (30) is operated.

    摘要翻译: 一种用于操作薄膜泄漏检测器(1)的方法,该薄膜泄漏检测器(1)包括在框架(3,4)中拉伸的两个薄膜(5,6),其中放置测试样品(79)限定了测试室(80)。 检测器配备有两个真空泵(13,30),其中首先将测试室(80)抽真空,并且在抽空操作之后进行泄漏检测操作。 为了避免在试验室(80)排空的第一阶段期间测试气体污染和杂质,只有两个真空泵中只有一个(13)被操作,并且在泄漏检测操作期间仅仅第二真空泵(30) 被操作