公开(公告)号：US07253409B2

公开(公告)日：2007-08-07

申请号：US11185914

申请日：2005-07-20

申请人： Minhwan Lee ,  Ryan O′Hayre ,  Turgut M. Gur ,  Friedrich B. Prinz

发明人： Minhwan Lee ,  Ryan O′Hayre ,  Turgut M. Gur ,  Friedrich B. Prinz

IPC分类号： G21K7/00 ,  G01N23/00 ,  H01L21/44 ,  B05D5/00

CPC分类号： B23H3/00 ,  B23H9/06

摘要： The present invention provides nano-patterning based on flow of an ion current within an ionic conductor to bring ions in proximity to a microscope probe tip touching a surface of the conductor. These ions are then electrochemically reduced to form one or more features on the surface. Ion current flow and the electrochemical reaction are driven by an electrical potential difference between the tip and the ionic conductor. Such features can be erased by reversing the polarity of the potential difference. Indentations can be formed by mechanically removing features formed as described above. The ions in the ion current can be provided by the ionic conductor and/or by oxidation at a counter electrode.

摘要翻译： 本发明提供基于离子导体内的离子电流的流动的纳米图案，以使离子接近与导体表面接触的显微镜探针尖端。 然后电化学还原这些离子以在表面上形成一个或多个特征。 离子电流和电化学反应由尖端和离子导体之间的电位差驱动。 可以通过反转电位差的极性来擦除这些特征。 可以通过机械去除如上所述形成的特征来形成缺口。 离子电流中的离子可以由离子导体和/或通过在对电极处的氧化来提供。