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1.发明授权公开(公告)号：US08887550B2
公开(公告)日：2014-11-18
申请号：US13345132
申请日：2012-01-06
CPC分类号： B81C1/00134 , B81B2201/03 , B81C2203/03 , G01D5/34 , G01P21/00 , Y10T29/49002
摘要： Systems and methods for two degree of freedom dithering for micro-electro-mechanical system (MEMS) sensor calibration are provided. In one embodiment, a method for a device comprises forming a MEMS sensor layer, the MEMS sensor layer comprising a MEMS sensor and an in-plane rotator to rotate the MEMS sensor in the plane of the MEMS sensor layer. Further, the method comprises forming a first and second rotor layer and bonding the first rotor layer to a top surface and the second rotor layer to the bottom surface of the MEMS sensor layer, such that a first and second rotor portion of the first and second rotor layers connect to the MEMS sensor. Also, the method comprises separating the first and second rotor portions from the first and second rotor layers, wherein the first and second rotor portions and the MEMS sensor rotate about an in-plane axis of the MEMS sensor layer.
摘要翻译： 提供了用于微机电系统（MEMS）传感器校准的两自由度抖动的系统和方法。 在一个实施例中，用于器件的方法包括形成MEMS传感器层，所述MEMS传感器层包括MEMS传感器和面内旋转器以在MEMS传感器层的平面内旋转MEMS传感器。 此外，该方法包括形成第一转子层和第二转子层，并将第一转子层结合到顶表面，将第二转子层结合到MEMS传感器层的底表面，使得第一和第二转子部分的第一和第二转子部分 转子层连接到MEMS传感器。 此外，该方法包括从第一和第二转子层分离第一和第二转子部分，其中第一和第二转子部分和MEMS传感器围绕MEMS传感器层的面内轴线旋转。
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公开(公告)号：US08847143B2
公开(公告)日：2014-09-30
申请号：US13307432
申请日：2011-11-30
IPC分类号： G01D5/34
CPC分类号： B81C1/00134 , B81B2201/03 , B81C2203/03 , G01D5/34 , G01P21/00 , Y10T29/49002
摘要： Systems and methods for an encoder and control scheme are provided. In one embodiment, a micro-electromechanical system (MEMS) device comprises: a stator having a first marker and a second marker arranged on a surface of the stator to form a sensing pattern; a sweeping element that dithers in a plane parallel to the surface of the stator along a sweep path that crosses the first marker and a second marker; an overlap sense circuit operable to measure an area overlap between the sweeping element and the sensing pattern, wherein the overlap sense circuit generates a pulse train signal output that varies as a function of the area overlap.
摘要翻译： 提供了编码器和控制方案的系统和方法。 在一个实施例中，微机电系统（MEMS）装置包括：定子，其具有布置在定子的表面上的第一标记和第二标记，以形成感测图案; 扫掠元件，其沿着与穿过所述第一标记和第二标记的扫掠路径平行于所述定子的表面的平面中抖动; 重叠检测电路，其可操作以测量扫描元件和感测图案之间的区域重叠，其中重叠检测电路产生根据区域重叠而变化的脉冲串信号输出。
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公开(公告)号：US20120272730A1
公开(公告)日：2012-11-01
申请号：US13307432
申请日：2011-11-30
CPC分类号： B81C1/00134 , B81B2201/03 , B81C2203/03 , G01D5/34 , G01P21/00 , Y10T29/49002
摘要： Systems and methods for an encoder and control scheme are provided. In one embodiment, a micro-electromechanical system (MEMS) device comprises: a stator having a first marker and a second marker arranged on a surface of the stator to form a sensing pattern; a sweeping element that dithers in a plane parallel to the surface of the stator along a sweep path that crosses the first marker and a second marker; an overlap sense circuit operable to measure an area overlap between the sweeping element and the sensing pattern, wherein the overlap sense circuit generates a pulse train signal output that varies as a function of the area overlap.
摘要翻译： 提供了编码器和控制方案的系统和方法。 在一个实施例中，微机电系统（MEMS）装置包括：定子，其具有布置在定子的表面上的第一标记和第二标记，以形成感测图案; 扫掠元件，其沿着与穿过所述第一标记和第二标记的扫掠路径平行于所述定子的表面的平面中抖动; 重叠检测电路，其可操作以测量扫描元件和感测图案之间的区域重叠，其中重叠检测电路产生根据区域重叠而变化的脉冲串信号输出。
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公开(公告)号：US20120130672A1
公开(公告)日：2012-05-24
申请号：US13301172
申请日：2011-11-21
申请人： Robert D. Horning , Ryan Supino
发明人： Robert D. Horning , Ryan Supino
CPC分类号： B81B3/0086 , B81B2201/025 , B81B2203/0136 , Y10T29/49117
摘要： A MEMS sensor comprises a substrate and at least one proof mass having a first plurality of combs. The proof mass is coupled to the substrate via one or more suspension beams such that the proof mass and the first plurality of combs are movable. The MEMS sensor also comprises at least one anchor having a second plurality of combs. The anchor is coupled to the substrate such that the anchor and second plurality of combs are fixed in position relative to the substrate. The first plurality of combs are interleaved with the second plurality of combs. Each of the combs comprises a plurality of conductive layers electrically isolated from each other by one or more non-conductive layers. Each conductive layer is individually coupled to a respective electric potential such that capacitance between the combs varies approximately linearly with displacement of the movable combs in an out-of-plane direction.
摘要翻译： MEMS传感器包括基板和至少一个具有第一多个梳子的检测质量块。 检测质量通过一个或多个悬架梁耦合到基板，使得检验质量块和第一组多个梳子可移动。 MEMS传感器还包括具有第二多个梳子的至少一个锚固件。 锚固件联接到基板，使得锚固件和第二多个梳子相对于基板固定在适当位置。 第一组多个梳子与第二组梳子交错。 每个梳子包括通过一个或多个非导电层彼此电隔离的多个导电层。 每个导电层单独地耦合到相应的电位，使得梳子之间的电容随着可移动梳状体在平面外方向上的位移而近似线性地变化。
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公开(公告)号：US07724610B2
公开(公告)日：2010-05-25
申请号：US12019380
申请日：2008-01-24
申请人： Ryan Supino , Robert D. Horning
发明人： Ryan Supino , Robert D. Horning
IPC分类号： G01S3/80
摘要： A lateration system comprising at least one transmitter attached to a first object and configured to emit pulses, three or more receivers attached to at least one second object and configured to receive the pulses emitted by the transmitter, and a processor configured to process information received from the three or more receivers, and to generate a vector based on lateration. Lateration is one of multilateration and trilateration. The vector is used by the processor to constrain error growth in a navigation solution.
摘要翻译： 一种后置系统，包括附接到第一对象并被配置为发射脉冲的至少一个发射器，连接到至少一个第二对象并被配置为接收由发射器发射的脉冲的三个或更多个接收器，以及被配置为处理从 三个或更多个接收器，并且基于后一个生成向量。 背景是多边和三边形之一。 处理器使用该向量来限制导航解决方案中的错误增长。
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公开(公告)号：US08726717B2
公开(公告)日：2014-05-20
申请号：US13316083
申请日：2011-12-09
申请人： Ryan Supino , Howard B. French
发明人： Ryan Supino , Howard B. French
IPC分类号： G01P21/00
CPC分类号： G01C19/5776 , G01C25/005
摘要： A method for calibrating a micro-electro-mechanical system (MEMS) vibrating structure gyroscope is provided. The method includes obtaining an indication of a position of at least one proof mass with respect to at least one drive electrode and applying an electrostatic force to the at least one proof mass as a function of the indication, the electrostatic force configured to position the at least one proof mass in a first position with respect to at least one drive electrode.
摘要翻译： 提供了一种用于校准微机电系统（MEMS）振动结构陀螺仪的方法。 所述方法包括获得关于至少一个驱动电极的至少一个检验质量块的位置的指示，并且根据该指示将静电力施加到至少一个检验质量块，所述静电力被配置成将位置 相对于至少一个驱动电极处于第一位置的至少一个检测质量块。
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7.发明申请公开(公告)号：US20120272731A1
公开(公告)日：2012-11-01
申请号：US13345132
申请日：2012-01-06
CPC分类号： B81C1/00134 , B81B2201/03 , B81C2203/03 , G01D5/34 , G01P21/00 , Y10T29/49002
摘要： Systems and methods for two degree of freedom dithering for micro-electromechanical system (MEMS) sensor calibration are provided. In one embodiment, a method for a device comprises forming a MEMS sensor layer, the MEMS sensor layer comprising a MEMS sensor and an in-plane rotator to rotate the MEMS sensor in the plane of the MEMS sensor layer. Further, the method comprises forming a first and second rotor layer and bonding the first rotor layer to a top surface and the second rotor layer to the bottom surface of the MEMS sensor layer, such that a first and second rotor portion of the first and second rotor layers connect to the MEMS sensor. Also, the method comprises separating the first and second rotor portions from the first and second rotor layers, wherein the first and second rotor portions and the MEMS sensor rotate about an in-plane axis of the MEMS sensor layer.
摘要翻译： 提供了用于微机电系统（MEMS）传感器校准的两自由度抖动的系统和方法。 在一个实施例中，用于器件的方法包括形成MEMS传感器层，所述MEMS传感器层包括MEMS传感器和面内旋转器以在MEMS传感器层的平面内旋转MEMS传感器。 此外，该方法包括形成第一转子层和第二转子层，并将第一转子层结合到顶表面，将第二转子层结合到MEMS传感器层的底表面，使得第一和第二转子部分的第一和第二转子部分 转子层连接到MEMS传感器。 此外，该方法包括从第一和第二转子层分离第一和第二转子部分，其中第一和第二转子部分和MEMS传感器围绕MEMS传感器层的面内轴线旋转。
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公开(公告)号：US20120130671A1
公开(公告)日：2012-05-24
申请号：US13299485
申请日：2011-11-18
申请人： Robert D. Horning , Ryan Supino
发明人： Robert D. Horning , Ryan Supino
CPC分类号： B81B7/0016 , B81B2201/025 , B81B2207/07
摘要： In an example, an interposer chip is provided. The interposer chip includes a base portion and a chip mounting portion. The interposer chip also includes one or more flexures connecting the base portion to the chip mounting portion. Additionally, a first plurality of projections extends from the base portion towards the chip mounting portion, and a second plurality of projections extends from the chip mounting portion towards the base portion and extending into interstices formed by first plurality of projections.
摘要翻译： 在一个示例中，提供了插入器芯片。 插入片包括基部和芯片安装部。 插入器芯片还包括将基部连接到芯片安装部分的一个或多个挠曲件。 此外，第一多个突起从基部朝向芯片安装部分延伸，并且第二多个突起从芯片安装部分朝向基部延伸并延伸到由第一多个突起形成的间隙中。
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公开(公告)号：US07943874B2
公开(公告)日：2011-05-17
申请号：US12019363
申请日：2008-01-24
CPC分类号： G01C22/006 , G01C21/16 , Y10S2/905
摘要： A ground contact switch system comprises a first object configured to contact a ground surface during a stride, and one or more switches coupled to the first object. An inertial measurement unit can be coupled to the first object. The one or more switches are configured to detect when the first object is at a stationary portion of the stride. The one or more switches can also be configured to send a signal to activate an error correction scheme for the inertial measurement unit.
摘要翻译： 地面接触开关系统包括构造成在步幅期间接触地面的第一物体和耦合到第一物体的一个或多个开关。 惯性测量单元可耦合到第一物体。 一个或多个开关被配置为检测第一对象何时处于步幅的静止部分。 一个或多个开关也可以被配置为发送信号以激活惯性测量单元的纠错方案。
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公开(公告)号：US20090071805A1
公开(公告)日：2009-03-19
申请号：US12019363
申请日：2008-01-24
IPC分类号： H01H35/14
CPC分类号： G01C22/006 , G01C21/16 , Y10S2/905
摘要： A ground contact switch system comprises a first object configured to contact a ground surface during a stride, and one or more switches coupled to the first object. An inertial measurement unit can be coupled to the first object. The one or more switches are configured to detect when the first object is at a stationary portion of the stride. The one or more switches can also be configured to send a signal to activate an error correction scheme for the inertial measurement unit.
摘要翻译： 地面接触开关系统包括构造成在步幅期间接触地面的第一物体和耦合到第一物体的一个或多个开关。 惯性测量单元可耦合到第一物体。 一个或多个开关被配置为检测第一对象何时处于步幅的静止部分。 一个或多个开关也可以被配置为发送信号以激活惯性测量单元的纠错方案。
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