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公开(公告)号:US5793598A
公开(公告)日:1998-08-11
申请号:US695850
申请日:1996-08-09
申请人: Katsuhide Watanabe , Yoichi Kanemitsu , Takahide Haga , Kenichi Yano , Takayuki Mizuno , Ryuta Katamura
发明人: Katsuhide Watanabe , Yoichi Kanemitsu , Takahide Haga , Kenichi Yano , Takayuki Mizuno , Ryuta Katamura
摘要: A magnetically levitated vibration damping apparatus includes a table having a flat board of a magnetic material, an electromagnetic actuator for applying magnetic attractive forces to the flat board to levitate the table, a displacement sensor for detecting relative displacement between the flat board and the electromagnetic actuator, an acceleration sensor for detecting absolute acceleration of the table, and a control system for controlling a current supplied to the electromagnetic actuator based on signals from the displacement sensor and the acceleration sensor according to a first control rule for controlling a gap between the flat board and the electromagnetic actuator based on the signal from the acceleration sensor and a second control rule for controlling vibrations of the table based on the signal from the acceleration sensor, the second control rule including stability control of relative displacement of the table.
摘要翻译: 一种磁悬浮减振装置,包括具有磁性材料的平板的工作台,用于向平板施加磁性吸引力以浮动工作台的电磁致动器,用于检测平板与电磁致动器之间的相对位移的位移传感器 ,用于检测工作台的绝对加速度的加速度传感器,以及用于根据用于控制平板之间的间隙的第一控制规则,根据来自位移传感器和加速度传感器的信号控制提供给电磁致动器的电流的控制系统 以及基于来自加速度传感器的信号的电磁致动器和用于基于来自加速度传感器的信号控制工作台的振动的第二控制规则,第二控制规则包括对工作台的相对位移的稳定性控制。