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公开(公告)号：US5793598A
公开(公告)日：1998-08-11
申请号：US695850
申请日：1996-08-09
申请人： Katsuhide Watanabe , Yoichi Kanemitsu , Takahide Haga , Kenichi Yano , Takayuki Mizuno , Ryuta Katamura
发明人： Katsuhide Watanabe , Yoichi Kanemitsu , Takahide Haga , Kenichi Yano , Takayuki Mizuno , Ryuta Katamura
摘要： A magnetically levitated vibration damping apparatus includes a table having a flat board of a magnetic material, an electromagnetic actuator for applying magnetic attractive forces to the flat board to levitate the table, a displacement sensor for detecting relative displacement between the flat board and the electromagnetic actuator, an acceleration sensor for detecting absolute acceleration of the table, and a control system for controlling a current supplied to the electromagnetic actuator based on signals from the displacement sensor and the acceleration sensor according to a first control rule for controlling a gap between the flat board and the electromagnetic actuator based on the signal from the acceleration sensor and a second control rule for controlling vibrations of the table based on the signal from the acceleration sensor, the second control rule including stability control of relative displacement of the table.
摘要翻译： 一种磁悬浮减振装置，包括具有磁性材料的平板的工作台，用于向平板施加磁性吸引力以浮动工作台的电磁致动器，用于检测平板与电磁致动器之间的相对位移的位移传感器 ，用于检测工作台的绝对加速度的加速度传感器，以及用于根据用于控制平板之间的间隙的第一控制规则，根据来自位移传感器和加速度传感器的信号控制提供给电磁致动器的电流的控制系统 以及基于来自加速度传感器的信号的电磁致动器和用于基于来自加速度传感器的信号控制工作台的振动的第二控制规则，第二控制规则包括对工作台的相对位移的稳定性控制。
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公开(公告)号：US5765800A
公开(公告)日：1998-06-16
申请号：US724829
申请日：1996-10-02
IPC分类号： F16F15/023 , F16M13/00
CPC分类号： F16F15/0232
摘要： A vibration damping apparatus has a vibration-isolating table for placing an object thereon which is to be isolated from vibrations, an air spring mounted on an installation floor and supporting the vibration-isolating table for attenuating vibrations from the installation floor, an air pressure controller for controlling an air pressure of the air spring, a displacement sensor for detecting a relative displacement between the vibration-isolating table and the installation floor and supplying a signal indicative of the detected relative displacement to the air pressure controller, and a spring element acting between the vibration-isolating table and the installation floor for positioning the vibration-isolating table horizontally. An electromagnet is disposed between the vibration-isolating table and the installation floor for actively attenuating vibrations of the vibration-isolating table. The vibration damping apparatus is operated to position the vibration-isolating table horizontally by means of the spring elements, and vertically by means of the air spring.
摘要翻译： 减震装置具有用于放置要与振动隔离的物体的隔振台，安装在安装地板上的空气弹簧和支撑用于衰减来自安装地板的振动的防振台，空气压力控制器 用于控制所述空气弹簧的空气压力的位移传感器，用于检测所述防振台和所述安装地板之间的相对位移并将指示所述检测到的相对位移的信号提供给所述空气压力控制器的位移传感器;以及弹簧元件， 隔振台和用于水平定位防振台的安装地板。 电磁铁设置在防振台和安装地板之间，用于主动衰减隔振台的振动。 振动阻尼装置的作用是通过弹簧元件将隔振台水平放置，并通过空气弹簧垂直地定位。
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公开(公告)号：US5471802A
公开(公告)日：1995-12-05
申请号：US111438
申请日：1993-08-25
CPC分类号： F16F15/03
摘要： An electromagnetically suspended floating floor apparatus in which a floating floor on which machines are set up is suspended from an installation floor with electromagnetic actuators so that the floating floor is spatially separated from the installation floor whereby no vibration is transmitted to equipment on the floating floor. The floating floor apparatus comprises the floating floor suspended from the installation floor at a plurality of supporting points by electromagnetic actuators, a light emitting member, fixed to a beam or a pillar, which emits a horizontal light beam, and a photosensor fixed to the installation floor which outputs a position signal representing a position of incidence of the horizontal light beam to the electromagnetic actuators. On the basis of the position signal, the electromagnetic actuators control a vertical position of the floating floor.
摘要翻译： 一种电磁悬浮浮动地板装置，其中设置有机器的浮动地板从电磁致动器从安装地板悬挂，使得浮动地板在空间上与安装地板分离，从而没有振动传递到浮动地板上的设备。 浮动地板装置包括通过电磁致动器在多个支撑点处从安装地板悬吊的浮动地板，固定到发射水平光束的梁或柱的发光构件，以及固定到该装置的光电传感器 输出表示水平光束入射到电磁致动器的位置的位置信号。 基于位置信号，电磁致动器控制浮动地板的垂直位置。
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公开(公告)号：US06437864B1
公开(公告)日：2002-08-20
申请号：US09355034
申请日：2000-05-18
IPC分类号： G01B1100
CPC分类号： G03F7/70758 , G03F7/70716 , G03F7/70816 , Y10S977/839
摘要： A micro-positioning apparatus enables stable and rapid positioning of a stage on which a specimen is placed. The apparatus has a stage for placing a specimen to be radiated with a beam, actuators for levitating the stage and controlling a movement of the stage, a first position sensor for measuring a relative displacement between the stage and the actuators, a second position sensor for measuring a relative displacement between an actual radiation position of the beam on the specimen and a target radiation position, and a controller for positioning the stage so as to decrease the relative displacement detected by the second sensor.
摘要翻译： 微型定位装置能够稳定且快速地定位放置试样的载物台。 该装置具有用于放置用光束辐射的样本的台阶，用于悬浮台架的致动器和控制台架的运动，用于测量台架和致动器之间的相对位移的第一位置传感器，用于 测量样品上的光束的实际辐射位置与目标辐射位置之间的相对位移，以及用于定位该台的控制器，以便减小由第二传感器检测到的相对位移。
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公开(公告)号：US5876012A
公开(公告)日：1999-03-02
申请号：US880640
申请日：1997-06-23
申请人： Takahide Haga , Katsuhide Watanabe
发明人： Takahide Haga , Katsuhide Watanabe
IPC分类号： F16F15/02 , F16F15/027 , F16M1/00
CPC分类号： F16F15/02 , F16F15/0275
摘要： A compact vibration cancellation apparatus based on a combination of air springs and electromagnetic actuators with smaller power capacity enables an anti-vibration table to be maintained in a level position even when the center of gravity of the anti-vibration table moves a large distance because of a movement of objective equipment on the table. The vibration cancellation apparatus is operable for isolating floor vibration or for canceling vibration of the objective equipment on the anti-vibration table. The apparatus includes displacement sensors, acceleration sensors, a levitation position control device, a vibration canceling control device, and air spring actuators for supporting four corners of the anti-vibration table by air pressure. The air pressure in each air spring actuator is controlled in response to a change of load which corresponds to a movement of the center of gravity caused by movement of the objective equipment on the anti-vibration table.
摘要翻译： 基于空气弹簧和具有较小功率容量的电磁致动器的组合的紧凑型振动消除装置使得即使当防振台的重心移动较大距离时，防振台也能保持在水平位置，因为 目标设备在桌子上的移动。 振动消除装置可操作用于隔离地板振动或抵消防振台上的物镜设备的振动。 该装置包括位移传感器，加速度传感器，悬浮位置控制装置，振动消除控制装置和用于通过空气压力支撑防振台的四个角的空气弹簧致动器。 每个空气弹簧致动器中的空气压力响应于由目标设备在防振台上的移动引起的重心运动的负载变化而被控制。
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公开(公告)号：US06515388B1
公开(公告)日：2003-02-04
申请号：US09680954
申请日：2000-10-10
IPC分类号： H02K709
CPC分类号： F16C32/0448 , F16C32/0451 , H02N15/00
摘要： A magnetic levitation control apparatus comprises a pair of electromagnets for holding a levitated body having a magnetic body in the levitated state. A signal source for supplying a voltage signal of a frequency on a level such that enables the electromagnets to function as the position sensor, wherein a control voltage signal for controlling the magnetic attraction of the electromagnets is superimposed on the voltage signal. A circuit differentially supplies the voltage signal to the pair of electromagnets to form a position signal of the levitated body from an add signal of currents respectively from the electromagnets, and a circuit detects a control current of the electromagnets from a subtraction signal of currents respectively from the electromagnets. A controller generates a control voltage signal of the electromagnets from the detected position signal of the levitated body and, in addition, corrects the position signal detected from the detected control current of the electromagnets.
摘要翻译： 一种磁悬浮控制装置包括一对电磁体，用于保持具有处于悬浮状态的磁体的悬浮体。 一种用于提供频率电压信号的信号源，其电平使得电磁体能够用作位置传感器，其中用于控制电磁体的磁吸引力的控制电压信号叠加在电压信号上。 电路差分地将电压信号提供给该对电磁体，以从电磁体分别从电流的相加信号形成悬浮体的位置信号，并且电路从电流的减法信号分别检测电磁体的控制电流 电磁铁。 控制器根据检测到的悬浮体的位置信号产生电磁体的控制电压信号，并且还校正从检测到的电磁体的控制电流检测的位置信号。
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7.发明授权Control system for a linear actuator including magnetic bearings for levitating a robot arm 失效用于线性致动器的控制系统，包括用于悬浮机器人臂的磁性轴承
公开(公告)号：US5720010A
公开(公告)日：1998-02-17
申请号：US699342
申请日：1996-08-19
IPC分类号： B25J13/00 , B25J9/18 , B25J18/02 , B25J19/00 , F16C32/04 , F16C39/06 , G05B19/19 , H02P25/06 , G05B15/00 , G05B19/00
CPC分类号： F16C32/0444 , G05B19/19 , F16C2300/62 , G05B2219/45083 , G05B2219/49271
摘要： A control system for controlling a linear actuator including magnetic bearings for levitating a robot arm and a pulse motor for linearly driving the arm in a non-contact manner is disclosed, which comprises a displacement detection unit including displacement sensors, first and second calculation units, moving amount detection unit and adding circuit. The displacement detection unit detects displacement values of the arm from a reference posture, the first calculation unit calculates guiding (y), levitation (z), roll (p), pitching (q), and yaw (r) control current values in response to the displacement values and provides guiding, levitation, roll, pitching, and yaw control current signals (, , , , ). The moving amount detecting circuit detects a moving amount (X.sub.0) of the arm from a reference position in response to an operation of the pulse motor, and provides a compensation current value (.DELTA.Iq") proportional to the moving amount, and the adding circuit adds the compensation current value (.DELTA.Iq") to the pitching control current signal (). The second calculation unit, in response to the guiding, levitation, roll and yaw control current signals (, , , ) and the added pitching control current signal (+.DELTA.Iq"), calculates drive current control values to compensate drive current flowing through the magnetic bearings.
摘要翻译： 公开了一种用于控制线性致动器的控制系统，包括用于悬浮机器人臂的磁轴承和用于以非接触方式线性驱动臂的脉冲电机，其包括位移检测单元，其包括位移传感器，第一和第二计算单元， 移动量检测单元和加法电路。 位移检测单元从参考姿势检测臂的位移值，第一计算单元计算响应中的引导（y），悬浮（z），滚动（p），俯仰（q）和偏航（r）控制电流值 提供位移值，并提供引导，悬挂，滚动，俯仰和偏航控制电流信号（+ Z，+ Z，+ Z，+ Z，+ Z）。 移动量检测电路响应于脉冲电动机的操作从参考位置检测臂的移动量（X0），并且提供与移动量成比例的补偿电流值（DELTA Iq“），并且添加 电路将补偿电流值（DELTA Iq“）添加到俯仰控制电流信号（+ Z）。 第二计算单元响应于引导，悬挂，转向和偏转控制电流信号（+ Z，+ Z，+ Z，+ Z）和增加的俯仰控制电流信号（+ Z + DELTA Iq“），计算 驱动电流控制值来补偿流经磁轴承的驱动电流。
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公开(公告)号：US5397212A
公开(公告)日：1995-03-14
申请号：US19678
申请日：1993-02-19
CPC分类号： H01L21/67766 , B25J9/041 , B25J9/123 , B25J9/126 , F16C32/0465 , H01L21/67742
摘要： A robot with no mechanically contacting components are suitable for use in special environments such as semiconductor manufacturing processes where dust and lubrication are matters of important concern. The robot has a linear actuator composed of magnetic bearings and a linear motor for moving a robot arm linearly without mechanical contact, and a rotary actuator composed of magnetic bearings and a rotary motor for rotating a body which supports the linear actuator, around the rotary actuator without mechanical contact.
摘要翻译： 没有机械接触部件的机器人适用于特殊环境，如半导体制造过程，其中灰尘和润滑是重要关注的问题。 机器人具有由磁性轴承构成的线性致动器和用于在不机械接触的情况下线性地移动机器人手臂的线性电动机，以及由磁性轴承和用于使支撑线性致动器的主体旋转的旋转电动机，围绕旋转致动器 无机械接触。
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公开(公告)号：US06536735B2
公开(公告)日：2003-03-25
申请号：US09971666
申请日：2001-10-09
IPC分类号： F16M1300
摘要： There are disclosed a vibration isolating apparatus and a vibration eliminating method imposed less restrictions on the positioning of components, such as active actuators, forming part of the vibration isolating apparatus. The vibration isolating apparatus can be implemented with a relatively simple controller (such as an analog circuit) and can limit the interference of control forces to a practically ignorable degree. The vibration isolating apparatus has a table for mounting thereon a device vulnerable to vibrations, a plurality of sensors 15-20 for detecting motions of the table and a plurality of active actuators 11-14 for controlling positions of the table. Processing and controlling means converts values measured by the respective sensors and control forces exerted by the respective active actuators to control and operating amounts for motions in a total of six degrees of freedom: one each for translation in the vertical direction and for rotation about the axis of the translation of the device vulnerable to vibrations, resiliently supported by the vibration isolating apparatus, or the table, and two each for translations on a horizontal plane and rotations about the axes of the translations. The conversion is performed on the assumption that the resilient supporting center matches the center of gravity, and based on the two-dimensional positional relationship between the resilient supporting center and the sensors and the active actuators.
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公开(公告)号：US5814814A
公开(公告)日：1998-09-29
申请号：US607613
申请日：1996-02-27
IPC分类号： H01J37/28 , H01J37/244
CPC分类号： H01J37/28 , H01J2237/0216 , H01J2237/15 , H01J2237/248
摘要： An electron microscope has an electron gun for emitting an electron beam, a specimen holder for holding a specimen thereon, and a deflection coil for applying the electron beam from the electron gun to the specimen on the specimen holder. A controller produces a differential signal representing the difference between a signal from a vibration sensor which detects vibrations of the electron gun and a signal from another vibration sensor which detects vibrations of the specimen holder. The differential signal is added to a deflection signal for the deflection coil for thereby effecting feedforward control of the electron beam to cause the electron beam to reach the specimen on the specimen holder, irrespective of the vibrations of the electron gun and the specimen holder.
摘要翻译： 电子显微镜具有用于发射电子束的电子枪，用于在其上保持试样的试样保持器和用于将来自电子枪的电子束施加到试样保持器上的试样的偏转线圈。 控制器产生表示来自检测电子枪的振动的振动传感器的信号与检测试样保持器的振动的另一振动传感器的信号之间的差的差分信号。 差分信号被加到偏转线圈的偏转信号上，从而进行电子束的前馈控制，使电子束到达试样架上的试样，而与电子枪和试样架的振动无关。
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