公开(公告)号：US5132506A

公开(公告)日：1992-07-21

申请号：US618310

申请日：1990-11-28

申请人： Hidenobu Shintaku ,  Isamu Inoue ,  Ryutarou Akutagawa ,  Shigeo Suzuki ,  Hirozo Takegawa ,  Kayoko Kodama

发明人： Hidenobu Shintaku ,  Isamu Inoue ,  Ryutarou Akutagawa ,  Shigeo Suzuki ,  Hirozo Takegawa ,  Kayoko Kodama

IPC分类号： C23C14/24 ,  C23C14/30

CPC分类号： C23C14/246 ,  C23C14/30

摘要： A vacuum evaporation apparatus has a melting pot containing evaporating material therein and a movable partition. A surface of the evaporating material is separated into a supplying surface (whereinto a Cr-Co material rod of replenishing material is supplied) and an evaporating surface (whereonto an electron beam is irradiated) by the partition only during deposition of evaporating material onto a substrate. After finish of the deposition, the partition is lifted and is apart from the surface.

摘要翻译： 真空蒸镀装置具有含有蒸发材料的熔化锅和可动隔板。 将蒸发材料的表面分离成供给表面（其中供给补充材料的Cr-Co材料棒）和仅在蒸发材料沉积到基板上时通过隔板的蒸发表面（电子束被照射） 。 沉积完成后，隔板被提起并与表面分开。

公开(公告)号：US5098742A

公开(公告)日：1992-03-24

申请号：US539740

申请日：1990-06-18

申请人： Isamu Inoue ,  Hirozo Takegawa ,  Ryutarou Akutagawa ,  Kayoko Kodama ,  Hidenobu Shintaku

发明人： Isamu Inoue ,  Hirozo Takegawa ,  Ryutarou Akutagawa ,  Kayoko Kodama ,  Hidenobu Shintaku

IPC分类号： C23C14/24

CPC分类号： C23C14/246

摘要： A method for supplying a vacuum evaporation material provides a first vacuum evaporation material accommodated in a crucible and heated by electron beams so as to be fused. When a thin film is formed by adhering vapor generated form the first material to a substrate, a second long supply vacuum evaporation material is fed in a positive direction, the second material moving from above a liquid surface of the first material toward the first material which has fused in the crucible. An average feed speed of the second material is maintained by alternately switching a feed direction between the positive direction and the negative direction, in which the second material moves backward. An apparatus for supplying the vacuum evaporation material in which the first material is supplied to the crucible by alternately switching the feed direction between the positive and the negative directions, includes an operating circuit for performing the following calculation based on an instruction of an average supply speed (V.sub.AV) for feeding the second material:(V.sub.AV)=(F-B)/(T.sub.FD +T.sub.BD +T.sub.FS +T.sub.BS).F is a feed amount in the positive direction, B is a feed amount in the negative direction (constant), B>0; T.sub.FD : net feed period of time in the positive direction, T.sub.FS is a suspension period of time in the positive direction feed, T.sub.FS .gtoreq.0. T.sub.BD is a net feed period of time in the negative direction (constant), and T.sub.BS is a suspension period of time in the negative direction feed (constant), T.sub.BS .gtoreq.0. A driving circuit drives the second material according to each calculated value calculated by the operating circuit.