公开(公告)号：US5234501A

公开(公告)日：1993-08-10

申请号：US825422

申请日：1992-01-24

申请人： Ken Nakao ,  Sadao Maruchi ,  Yoshio Sakamoto

发明人： Ken Nakao ,  Sadao Maruchi ,  Yoshio Sakamoto

IPC分类号： C30B33/00 ,  H01L21/00

CPC分类号： H01L21/67115 ,  C30B33/005

摘要： The invention provides an oxidation method which utilizes a processing tube, a combustion chamber connected to the processing tube, inner and outer coaxial guide tubes connected to the combustion chamber, and an auxiliary combustion chamber connected to the combustion chamber, which includes the steps of placing a plurality of objects at predetermined intervals in the processing tube; generating steam in the combustion chamber by combustion of a mixture of oxygen and hydrogen gases and supplying the steam to the processing tube wherein the steam is generated by individually introducing oxygen gas and hydrogen gas into the combustion chamber through the outer and inner coaxial guide tubes and by heating the hydrogen gas in the inner guide tube or both the inner guide tube and the auxiliary combustion chamber such that ignition of the oxygen and hydrogen gases occurs when the gases come into contact with each other; and preventing a flame generated by the ignition of the gases from reaching an interior surface portion of at least one of the auxiliary combustion chamber and the combined chamber.

摘要翻译： 本发明提供了一种利用处理管，连接到处理管的燃烧室，连接到燃烧室的内部和外部同轴导管以及连接到燃烧室的辅助燃烧室的氧化方法，其包括以下步骤： 处理管中的预定间隔的多个物体; 通过燃烧氧气和氢气的混合物而在燃烧室中产生蒸气，并将蒸汽供给到处理管中，其中蒸汽是通过外部和内部同轴引导管将氧气和氢气单独引入燃烧室而产生的， 通过加热内导管或内引导管和辅助燃烧室两者中的氢气，使得当气体彼此接触时，发生氧气和氢气的点燃; 并且防止由气体点燃产生的火焰到达辅助燃烧室和组合室中的至少一个的内表面部分。