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14 条记录 (耗时 0.01 秒)

    Method and system for intelligent automated reticle management
    2.
    发明授权
    Method and system for intelligent automated reticle management 有权
    智能自动标线管理方法与系统

    公开(公告)号：US07206652B2

    公开(公告)日：2007-04-17

    申请号：US10711079

    申请日：2004-08-20

    申请人： Richard G. Burda ,  Alfred Degbotse ,  Brian T Denton ,  Kenneth J. Fordyce ,  Robert J. Milne ,  Sameer T. Shikalgar ,  Guogang Zuo

    发明人： Richard G. Burda ,  Alfred Degbotse ,  Brian T Denton ,  Kenneth J. Fordyce ,  Robert J. Milne ,  Sameer T. Shikalgar ,  Guogang Zuo

    IPC分类号： G06F19/00

    CPC分类号： G03F7/70741

    摘要： A method, system, and program storage device for implementing the method of controlling a manufacturing system, wherein the method comprises providing a plurality of workpieces to be processed on a processing tool, the plurality of workpieces located at processing stations prior to the processing tool, determining auxiliary equipment allocation needs for the processing tool based on characteristics associated with the plurality of workpieces prior to the workpieces arriving at the processing tool, and sending auxiliary equipment to the processing tool based on the allocation needs prior to the workpieces arriving at the processing tool. According to an embodiment of the invention, the processing tool comprises a photolithographic system, the auxiliary equipment comprises a reticle, and the plurality of workpieces comprise semiconductor substrates.

    摘要翻译： 一种用于实现控制制造系统的方法的方法，系统和程序存储装置，其中所述方法包括在处理工具上提供待加工的多个工件，所述多个工件位于处理工具之前的处理站， 在工件到达处理工具之前，基于与多个工件相关联的特性来确定处理工具的辅助设备分配需求，以及基于在工件到达处理工具之前的分配需求将辅助设备发送到处理工具 。 根据本发明的实施例，处理工具包括光刻系统，辅助设备包括掩模版，并且多个工件包括半导体衬底。

    System and method for creation of optimal range boundaries in a range management system
    4.
    发明授权
    System and method for creation of optimal range boundaries in a range management system 失效
    在范围管理系统中创建最佳范围边界的系统和方法

    公开(公告)号：US07653450B2

    公开(公告)日：2010-01-26

    申请号：US11393028

    申请日：2006-03-30

    申请人： Richard G. Burda ,  Aseem K. Joshi ,  Sameer T. Shikalgar ,  Susan Kangas van Oss ,  Patrick R. Varekamp

    发明人： Richard G. Burda ,  Aseem K. Joshi ,  Sameer T. Shikalgar ,  Susan Kangas van Oss ,  Patrick R. Varekamp

    IPC分类号： G06F19/00

    CPC分类号： G06Q10/06

    摘要： A method and system for defining optimal range boundaries in a range management system. The method comprises assigning process routings to the flows, applying range break rules to the flows based on the input data regarding operations and toolsets, and outputting the results of the applying step to provide range break boundaries. The system comprises at least one device configured to receive input data, assign process routings to flows, determine range breaks by applying range break rules to the input data and the process routings, and output the results of the determining step.

    摘要翻译： 一种用于在范围管理系统中定义最佳范围边界的方法和系统。 该方法包括：根据关于操作和工具集的输入数据向流量分配处理流程，向流量应用范围破坏规则，并输出应用步骤的结果以提供范围突破边界。 该系统包括至少一个被配置为接收输入数据的设备，向流程分配处理路线，通过对输入数据和处理路线应用范围中断规则来确定范围间隔，并输出确定步骤的结果。

    Methods, systems, and computer program products for managing movement of work-in-process materials in an automated manufacturing environment
    7.
    发明授权
    Methods, systems, and computer program products for managing movement of work-in-process materials in an automated manufacturing environment 失效
    用于管理自动化制造环境中工件在线材料的移动的方法，系统和计算机程序产品

    公开(公告)号：US07480538B2

    公开(公告)日：2009-01-20

    申请号：US11939792

    申请日：2007-11-14

    申请人： Richard P. Volant ,  Bradley P. Jones ,  Sameer T. Shikalgar ,  Michael J. Toner ,  Yutong Wu

    发明人： Richard P. Volant ,  Bradley P. Jones ,  Sameer T. Shikalgar ,  Michael J. Toner ,  Yutong Wu

    IPC分类号： G06F19/00

    CPC分类号： G06Q50/04 ,  G06Q10/06 ,  Y02P80/40 ,  Y02P90/30 ,  Y02P90/86

    摘要： Methods, systems, and computer program products for managing movement of work-in-process materials between processing units in an automated manufacturing environment are provided. A system includes a host system in communication with a work-in-process (WIP) material lot. The system also includes an application executing on the host. The application implements a method that includes tracking a position of the WIP material lot, receiving a list of the processing units designated to be inoperative during a down time, and receiving a start time and a duration of the down time. The method also includes determining a maximum dwell time for each of the designated processing units and scheduling movement of the WIP material lot during an interim between a current time and the start time of the down time based on current position of the work-in-process material lot, the current time, the start time and duration of the down time, and the maximum dwell time.

    摘要翻译： 提供了用于管理在自动化制造环境中的处理单元之间的在制品材料的移动的方法，系统和计算机程序产品。 系统包括与工件在制品（WIP）材料批次通信的主机系统。 该系统还包括在主机上执行的应用程序。 应用程序实现一种方法，其包括跟踪WIP物料批次的位置，接收在停机期间被指定为不起作用的处理单元的列表，以及接收停机时间的开始时间和持续时间。 该方法还包括确定每个指定处理单元的最大驻留时间，并根据当前工作中的位置在当前时间与停机时间的开始时间间隔期间调度WIP材料批次的移动 材料批次，当前时间，停机时间的开始时间和持续时间以及最长停留时间。

    Method and system of controlled movement of dynamic-route WIP
    9.
    发明授权
    Method and system of controlled movement of dynamic-route WIP 失效
    动态路由WIP的受控移动方法和系统

    公开(公告)号：US07477957B2

    公开(公告)日：2009-01-13

    申请号：US11393030

    申请日：2006-03-30

    申请人： Richard G. Burda ,  Aseem K. Joshi ,  Sameer T. Shikalgar ,  Susan Kangas van Oss ,  Patrick R. Varekamp

    发明人： Richard G. Burda ,  Aseem K. Joshi ,  Sameer T. Shikalgar ,  Susan Kangas van Oss ,  Patrick R. Varekamp

    IPC分类号： G06F19/00

    CPC分类号： G06Q10/06

    摘要： A system and method for driving new technology WIP at a controlled speed side-by-side with production WIP using a common range management infrastructure. The system and method allow new technology WIP and production WIP to be driven together in the same fabricator with the same degree of speed and predictability. The system and method may include at least one device configured to create a target based on a sum of active WIP targets for at least one route, find all lots of active WIP on the at least one route, tag each of the lots until a first occurrence of a sum of WIP of the tagged lots exceeds or equals the target, and assign a priority to each of the tagged lots based on a predetermined criteria.

    摘要翻译： 使用共同的范围管理基础设施，通过生产WIP并行地以受控的速度驱动新技术WIP的系统和方法。 系统和方法允许新技术WIP和生产WIP以相同的速度和可预测性在相同的制造商中一起驱动。 所述系统和方法可以包括至少一个设备，其被配置为基于至少一个路由的活动WIP目标的总和来创建目标，在所述至少一个路由上找到所有大量的活动WIP，将每个批次标记，直到第一个 标签批次的WIP总和的发生超过或等于目标，并且基于预定标准为每个标记批次分配优先级。

    METHODS, SYSTEMS, AND COMPUTER PROGRAM PRODUCTS FOR MANAGING MOVEMENT OF WORK-IN-PROCESS MATERIALS IN AN AUTOMATED MANUFACTURING ENVIRONMENT
    10.
    发明申请
    METHODS, SYSTEMS, AND COMPUTER PROGRAM PRODUCTS FOR MANAGING MOVEMENT OF WORK-IN-PROCESS MATERIALS IN AN AUTOMATED MANUFACTURING ENVIRONMENT 审中-公开
    用于管理自动化制造环境中工艺过程材料运动的方法，系统和计算机程序产品

    公开(公告)号：US20080167743A1

    公开(公告)日：2008-07-10

    申请号：US11868739

    申请日：2007-10-08

    申请人： Richard P. Volant ,  Bradley P. Jones ,  Sameer T. Shikalgar ,  Michael J. Toner ,  Yutong Wu

    发明人： Richard P. Volant ,  Bradley P. Jones ,  Sameer T. Shikalgar ,  Michael J. Toner ,  Yutong Wu

    IPC分类号： G06F19/00

    CPC分类号： G06Q50/04 ,  G06Q10/06 ,  Y02P80/40 ,  Y02P90/30 ,  Y02P90/86

    摘要： Methods, systems, and computer program products for managing movement of work-in-process materials (WIPs) between processing units are provided. A system includes a host system and an application executing thereon. The application implements a method that includes receiving a list of WIP lots, and indexing a list of routes with raw process time by process steps and with safe holding points. The method also includes indexing a scheduled start time of shutdown for the process units and calculating transport time for moving each of the lots to the next nearest safe holding point in the route. For each lot, the method includes determining whether the lot is at a safe holding point, and assigning a dispatch priority to the lot if it is not at the safe holding point. The method further includes sending a list of assigned dispatch priorities to a dispatcher for transporting the lots to corresponding safe holding points prior to initiating the shutdown.

    摘要翻译： 提供了用于管理处理单元之间的在制品（WIP）的移动的方法，系统和计算机程序产品。 系统包括主机系统和在其上执行的应用。 应用程序实现了一种方法，包括接收WIP批次的列表，并通过流程步骤和安全的保留点对原始进程时间的路由索引进行索引。 该方法还包括为处理单元索引预定的关闭开始时间，并计算将每个批次移动到路线中的下一个最近的安全保持点的运输时间。 对于每个批次，该方法包括确定批次是否处于安全的保持点，以及如果批次不在安全保存点，则向批次分配调度优先级。 该方法还包括将发送分配优先级的列表发送到调度器，用于在开始关闭之前将批量传送到相应的安全保持点。