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    System and method for creation of optimal range boundaries in a range management system
    2.
    发明授权
    System and method for creation of optimal range boundaries in a range management system 失效
    在范围管理系统中创建最佳范围边界的系统和方法

    公开(公告)号：US07653450B2

    公开(公告)日：2010-01-26

    申请号：US11393028

    申请日：2006-03-30

    申请人： Richard G. Burda ,  Aseem K. Joshi ,  Sameer T. Shikalgar ,  Susan Kangas van Oss ,  Patrick R. Varekamp

    发明人： Richard G. Burda ,  Aseem K. Joshi ,  Sameer T. Shikalgar ,  Susan Kangas van Oss ,  Patrick R. Varekamp

    IPC分类号： G06F19/00

    CPC分类号： G06Q10/06

    摘要： A method and system for defining optimal range boundaries in a range management system. The method comprises assigning process routings to the flows, applying range break rules to the flows based on the input data regarding operations and toolsets, and outputting the results of the applying step to provide range break boundaries. The system comprises at least one device configured to receive input data, assign process routings to flows, determine range breaks by applying range break rules to the input data and the process routings, and output the results of the determining step.

    摘要翻译： 一种用于在范围管理系统中定义最佳范围边界的方法和系统。 该方法包括：根据关于操作和工具集的输入数据向流量分配处理流程，向流量应用范围破坏规则，并输出应用步骤的结果以提供范围突破边界。 该系统包括至少一个被配置为接收输入数据的设备，向流程分配处理路线，通过对输入数据和处理路线应用范围中断规则来确定范围间隔，并输出确定步骤的结果。

    METHODS AND SYSTEMS INVOLVING TEXT ANALYSIS
    3.
    发明申请
    METHODS AND SYSTEMS INVOLVING TEXT ANALYSIS 失效
    涉及文本分析的方法和系统

    公开(公告)号：US20090112834A1

    公开(公告)日：2009-04-30

    申请号：US11931108

    申请日：2007-10-31

    申请人： Steven A. Cordes ,  Debra A. Loussedes ,  Christopher E. Obszarny ,  Patrick R. Varekamp

    发明人： Steven A. Cordes ,  Debra A. Loussedes ,  Christopher E. Obszarny ,  Patrick R. Varekamp

    IPC分类号： G06F17/30

    CPC分类号： G06F17/211 ,  G06F17/214 ,  G06F17/2765 ,  G06F17/277 ,  G06F17/2785

    摘要： An exemplary method for determining emotive tone in text, the method comprising, matching text in a text file with text entries in a control file database, wherein the formatting attributes include textual and non-textual indicators, receiving a first set of emotive values associated with the matching text entries from the control file database, calculating an emotive score with the first set of emotive values, assigning the emotive score to the text file, and displaying the emotive score of the text file.

    摘要翻译： 用于确定文本中的情绪音调的示例性方法，所述方法包括：将文本文件中的文本与控制文件数据库中的文本条目相匹配，其中所述格式化属性包括文本和非文本指示符，接收与第 来自控制文件数据库的匹配文本条目，使用第一组感情值计算感情分数，将感情分数分配给文本文件，以及显示文本文件的情感评分。

    Methods and systems involving text analysis
    5.
    发明授权
    Methods and systems involving text analysis 失效
    涉及文本分析的方法和系统

    公开(公告)号：US07810033B2

    公开(公告)日：2010-10-05

    申请号：US11931108

    申请日：2007-10-31

    申请人： Steven A Cordes ,  Debra A Loussedes ,  Christopher E Obszarny ,  Patrick R Varekamp

    发明人： Steven A Cordes ,  Debra A Loussedes ,  Christopher E Obszarny ,  Patrick R Varekamp

    IPC分类号： G06F17/30

    CPC分类号： G06F17/211 ,  G06F17/214 ,  G06F17/2765 ,  G06F17/277 ,  G06F17/2785

    摘要： An exemplary method for determining emotive tone in text, the method comprising, matching text in a text file with text entries in a control file database, wherein the formatting attributes include textual and non-textual indicators, receiving a first set of emotive values associated with the matching text entries from the control file database, calculating an emotive score with the first set of emotive values, assigning the emotive score to the text file, and displaying the emotive score of the text file.

    摘要翻译： 用于确定文本中的情绪音调的示例性方法，所述方法包括：将文本文件中的文本与控制文件数据库中的文本条目相匹配，其中所述格式化属性包括文本和非文本指示符，接收与第 来自控制文件数据库的匹配文本条目，使用第一组感情值计算感情分数，将感情分数分配给文本文件，以及显示文本文件的情感评分。

    Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer
    6.
    发明授权
    Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer 失效
    在半导体晶片上形成氧氮化物绝缘层的装置和方法

    公开(公告)号：US06887797B2

    公开(公告)日：2005-05-03

    申请号：US10199542

    申请日：2002-07-19

    申请人： Douglas A. Buchanan ,  Evgeni P. Gousev ,  Carol J. Heenan ,  Wade J. Hodge ,  Steven M. Shank ,  Patrick R. Varekamp

    发明人： Douglas A. Buchanan ,  Evgeni P. Gousev ,  Carol J. Heenan ,  Wade J. Hodge ,  Steven M. Shank ,  Patrick R. Varekamp

    IPC分类号： C23C16/30 ,  C23C16/40 ,  C23C16/452 ,  C23C16/453 ,  H01L21/28 ,  H01L21/3115 ,  H01L21/314 ,  H01L29/51 ,  H01L21/31 ,  H01L21/469

    CPC分类号： H01L21/28185 ,  C23C16/308 ,  C23C16/401 ,  C23C16/452 ,  C23C16/453 ,  H01L21/28202 ,  H01L21/28211 ,  H01L21/2822 ,  H01L21/3115 ,  H01L21/3144 ,  H01L29/518

    摘要： An apparatus and method of forming an oxynitride insulating layer on a substrate performed by putting the substrate at a first temperature within the main chamber of a furnace, exposing the substrate to a nitrogen containing gas at a second temperature which is higher than the first temperature, and growing the oxynitride layer on the substrate within the main chamber in the presence of post-combusted gases. The higher temperature nitrogen containing gases are combusted in a chamber outside the main chamber. The higher temperature is in the range of 800 to 1200° C., and preferably 950° C. In a second embodiment, distributed N2O gas injectors within the main chamber deliver the nitrogen containing gas. The nitrogen containing gas is pre-heated outside the chamber. The nitrogen containing gas is then delivered to a gas manifold that splits the gas flow and directs the gas to a number of gas injectors, preferably two to four injectors within the main process tube. Gas injection orifices on the order of several millimeters then distribute the pre-decomposed gas to the wafers, producing a more uniformly N-doped wafer load in a batch furnace.

    摘要翻译： 一种在基板上形成氧氮化物绝缘层的装置和方法，其通过将基板放置在炉的主室内的第一温度下，在高于第一温度的第二温度下将基板暴露于含氮气体， 并在存在后燃烧气体的情况下在主室内的衬底上生长氧氮化物层。 较高温度的含氮气体在主室外的室内燃烧。 较高的温度在800至1200℃的范围内，优选950℃。在第二实施例中，主室内的分布式N 2 O气体喷射器输送含氮气体。 含氮气体在室外预加热。 然后将含氮气体输送到气体歧管，气体歧管分裂气体流并将气体引导到主处理管内的多个气体喷射器，优选两至四个喷射器。 大约数毫米的气体注入孔然后将预分解的气体分配到晶片，在间歇炉中产生更均匀的N掺杂晶片负载。

    Method for separately optimizing thin gate dielectric of PMOS and NMOS transistors within the same semiconductor chip and device manufactured thereby
    7.
    发明授权
    Method for separately optimizing thin gate dielectric of PMOS and NMOS transistors within the same semiconductor chip and device manufactured thereby 有权
    用于分别优化同一半导体芯片内的PMOS和NMOS晶体管的薄栅极电介质及其制造的器件的方法

    公开(公告)号：US06821833B1

    公开(公告)日：2004-11-23

    申请号：US10605110

    申请日：2003-09-09

    申请人： Anthony I-Chih Chou ,  Toshiharu Furukawa ,  Patrick R. Varekamp ,  Jeffrey W. Sleight ,  Akihisa Sekiguchi

    发明人： Anthony I-Chih Chou ,  Toshiharu Furukawa ,  Patrick R. Varekamp ,  Jeffrey W. Sleight ,  Akihisa Sekiguchi

    IPC分类号： H01L218238

    CPC分类号： H01L21/28202 ,  H01L21/823842 ,  H01L21/823857

    摘要： A method of forming CMOS semiconductor materials with PFET and NFET areas formed on a semiconductor substrate, covered respectively with a PFET and NFET gate dielectric layers composed of silicon oxide and different degrees of nitridation thereof. Provide a silicon substrate with a PFET area and an NFET area and form PFET and NFET gate oxide layers thereover. Provide nitridation of the PFET gate oxide layer above the PFET area to form the PFET gate dielectric layer above the PFET area with a first concentration level of nitrogen atoms in the PFET gate dielectric layer above the PFET area. Provide nitridation of the NFET gate oxide layer to form the NFET gate dielectric layer above the NFET area with a different concentration level of nitrogen atoms from the first concentration level. The NFET gate dielectric layer and the PFET gate dielectric layer can have the same thickness.

    摘要翻译： 一种形成在半导体衬底上的PFET和NFET区域的CMOS半导体材料的方法，分别覆盖由氧化硅和不同程度的氮化构成的PFET和NFET栅极电介质层。 为硅衬底提供PFET区域和NFET区域，并在其上形成PFET和NFET栅极氧化物层。 在PFET区域上方提供PFET栅极氧化物层的氮化，以在PFET区域上方形成PFET栅极电介质层上的PFET栅极电介质层，在PFET区域上方的PFET栅极电介质层中具有氮原子的第一浓度水平。 提供NFET栅极氧化物层的氮化，以在NFET区域上方形成具有与第一浓度水平不同的氮原子浓度水平的NFET栅极电介质层。 NFET栅极电介质层和PFET栅极电介质层可以具有相同的厚度。

    Method and system of controlled movement of dynamic-route WIP
    10.
    发明授权
    Method and system of controlled movement of dynamic-route WIP 失效
    动态路由WIP的受控移动方法和系统

    公开(公告)号：US07477957B2

    公开(公告)日：2009-01-13

    申请号：US11393030

    申请日：2006-03-30

    申请人： Richard G. Burda ,  Aseem K. Joshi ,  Sameer T. Shikalgar ,  Susan Kangas van Oss ,  Patrick R. Varekamp

    发明人： Richard G. Burda ,  Aseem K. Joshi ,  Sameer T. Shikalgar ,  Susan Kangas van Oss ,  Patrick R. Varekamp

    IPC分类号： G06F19/00

    CPC分类号： G06Q10/06

    摘要： A system and method for driving new technology WIP at a controlled speed side-by-side with production WIP using a common range management infrastructure. The system and method allow new technology WIP and production WIP to be driven together in the same fabricator with the same degree of speed and predictability. The system and method may include at least one device configured to create a target based on a sum of active WIP targets for at least one route, find all lots of active WIP on the at least one route, tag each of the lots until a first occurrence of a sum of WIP of the tagged lots exceeds or equals the target, and assign a priority to each of the tagged lots based on a predetermined criteria.

    摘要翻译： 使用共同的范围管理基础设施，通过生产WIP并行地以受控的速度驱动新技术WIP的系统和方法。 系统和方法允许新技术WIP和生产WIP以相同的速度和可预测性在相同的制造商中一起驱动。 所述系统和方法可以包括至少一个设备，其被配置为基于至少一个路由的活动WIP目标的总和来创建目标，在所述至少一个路由上找到所有大量的活动WIP，将每个批次标记，直到第一个 标签批次的WIP总和的发生超过或等于目标，并且基于预定标准为每个标记批次分配优先级。