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公开(公告)号：US5987986A
公开(公告)日：1999-11-23
申请号：US903499
申请日：1997-07-30
CPC分类号： G01C19/5719 , G01P2015/084 , G01P2015/0842
摘要： An angular rate sensor provides a digital delta theta output signal. A drive member is formed of a single, silicon wafer having a pair of oppositely-facing planar surfaces. The drive member includes a frame and a drive member central portion connected to the frame and arranged to have rotational compliance between the frame and the central portion about an axis perpendicular to the planar surfaces of the silicon wafer. Drive signals are applied to a plurality of electrodes on the central portion to cause rotational oscillation of the drive member central portion about a drive axis perpendicular to the planar surfaces of the silicon wafer. A silicon sensing member is connected to the drive member. The sensing member has a central support member connected to the drive member central portion such that rotational oscillations of the drive member central portion are transmitted to the sensing member central portion. A sensing portion is connected to the sensing member central support member to allow the sensing portion to oscillate about the drive axis and to allow an input rotation rate about an axis perpendicular to the drive axis to produce out-of-plane oscillations of the sensing portions. Signal processing apparatus is connected to the sensing portion for producing a signal indicative of the input rotational rate as a function of the amplitude of the out-of-plane oscillations of the sensing portion.
摘要翻译： 角速率传感器提供数字deltaθ输出信号。 驱动构件由具有一对相对的平面的单个硅晶片形成。 驱动构件包括框架和连接到框架的驱动构件中心部分，并且布置成围绕垂直于硅晶片的平面的轴线具有框架和中心部分之间的旋转顺应性。 驱动信号被施加到中心部分上的多个电极，以使得驱动构件中心部分围绕垂直于硅晶片平面的驱动轴的旋转振荡。 硅感测构件连接到驱动构件。 感测构件具有连接到驱动构件中心部分的中心支撑构件，使得驱动构件中心部分的旋转振动被传递到感测构件中心部分。 感测部分连接到感测构件中心支撑构件，以允许感测部分围绕驱动轴线振荡并且允许围绕垂直于驱动轴线的轴的输入旋转速率产生感测部分的平面外振荡 。 信号处理装置连接到感测部分，用于产生表示作为感测部分的平面外振荡幅度的函数的输入转速的信号。
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