公开(公告)号：US06974713B2

公开(公告)日：2005-12-13

申请号：US11067562

申请日：2005-02-25

Applicant: Sataydev Patel ,  Andrew Huibers

Inventor： Sataydev Patel ,  Andrew Huibers

IPC: G02B26/00 ,  G02B26/08 ,  H01L20060101 ,  H01L21/00

CPC classification number: G02B26/0841

Abstract: A micromirror device is disclosed, along with a method of making such a micromirror device that comprises a mirror plate, a hinge and an extension plate. The extension plate is formed on the mirror plate and between the mirror plate and the electrode associated with the mirror plate for rotating the mirror plate. The extension plate can be metallic or dielectric. Also disclosed is a method of making such a micromirror device. In particular, the extension plate is formed after the formation of the mirror plate. Moreover, also disclosed is a projection system that comprises a spatial light modulator having an array of such micromirrors, as well as a light source, condensing optics, wherein light from the light source is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors onto a target, and a controller for selectively actuating the micromirrors in the array.

公开(公告)号：US20050190430A1

公开(公告)日：2005-09-01

申请号：US11067562

申请日：2005-02-25

Applicant: Sataydev Patel ,  Andrew Huibers

Inventor： Sataydev Patel ,  Andrew Huibers

IPC: G02B26/00 ,  G02B26/08 ,  H01L20060101 ,  H01L21/00

CPC classification number: G02B26/0841

Abstract: A micromirror device is disclosed, along with a method of making such a micromirror device that comprises a mirror plate, a hinge and an extension plate. The extension plate is formed on the mirror plate and between the mirror plate and the electrode associated with the mirror plate for rotating the mirror plate. The extension plate can be metallic or dielectric. Also disclosed is a method of making such a micromirror device. In particular, the extension plate is formed after the formation of the mirror plate. Moreover, also disclosed is a projection system that comprises a spatial light modulator having an array of such micromirrors, as well as a light source, condensing optics, wherein light from the light source is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors onto a target, and a controller for selectively actuating the micromirrors in the array.

Abstract translation: 公开了一种微反射镜装置，以及制造这种微镜装置的方法，其包括镜板，铰链和延伸板。 延伸板形成在镜板上，并且在镜板和与用于旋转镜板的镜板相关联的电极之间。 延伸板可以是金属或电介质。 还公开了制造这种微镜装置的方法。 特别地，在形成镜板之后形成延伸板。 此外，还公开了一种投影系统，其包括具有这种微镜阵列的空间光调制器以及光源聚光光学器件，其中来自光源的光聚焦到微镜阵列上，用于投射光的投影光学器件 从微镜阵列选择性地反射到目标上，以及用于选择性地致动阵列中的微镜的控制器。