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    Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields
    1.
    发明申请
    Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields 有权
    具有增强微镜与静电场耦合的机制的微镜

    公开(公告)号：US20050190430A1

    公开(公告)日：2005-09-01

    申请号：US11067562

    申请日：2005-02-25

    Applicant: Sataydev Patel ,  Andrew Huibers

    Inventor： Sataydev Patel ,  Andrew Huibers

    IPC: G02B26/00 ,  G02B26/08 ,  H01L20060101 ,  H01L21/00

    CPC classification number: G02B26/0841

    Abstract: A micromirror device is disclosed, along with a method of making such a micromirror device that comprises a mirror plate, a hinge and an extension plate. The extension plate is formed on the mirror plate and between the mirror plate and the electrode associated with the mirror plate for rotating the mirror plate. The extension plate can be metallic or dielectric. Also disclosed is a method of making such a micromirror device. In particular, the extension plate is formed after the formation of the mirror plate. Moreover, also disclosed is a projection system that comprises a spatial light modulator having an array of such micromirrors, as well as a light source, condensing optics, wherein light from the light source is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors onto a target, and a controller for selectively actuating the micromirrors in the array.

    Abstract translation: 公开了一种微反射镜装置，以及制造这种微镜装置的方法，其包括镜板，铰链和延伸板。 延伸板形成在镜板上，并且在镜板和与用于旋转镜板的镜板相关联的电极之间。 延伸板可以是金属或电介质。 还公开了制造这种微镜装置的方法。 特别地，在形成镜板之后形成延伸板。 此外，还公开了一种投影系统，其包括具有这种微镜阵列的空间光调制器以及光源聚光光学器件，其中来自光源的光聚焦到微镜阵列上，用于投射光的投影光学器件 从微镜阵列选择性地反射到目标上，以及用于选择性地致动阵列中的微镜的控制器。

    Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields
    2.
    发明授权
    Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields 有权

    公开(公告)号：US06974713B2

    公开(公告)日：2005-12-13

    申请号：US11067562

    申请日：2005-02-25

    Applicant: Sataydev Patel ,  Andrew Huibers

    Inventor： Sataydev Patel ,  Andrew Huibers

    IPC: G02B26/00 ,  G02B26/08 ,  H01L20060101 ,  H01L21/00

    CPC classification number: G02B26/0841

    Abstract: A micromirror device is disclosed, along with a method of making such a micromirror device that comprises a mirror plate, a hinge and an extension plate. The extension plate is formed on the mirror plate and between the mirror plate and the electrode associated with the mirror plate for rotating the mirror plate. The extension plate can be metallic or dielectric. Also disclosed is a method of making such a micromirror device. In particular, the extension plate is formed after the formation of the mirror plate. Moreover, also disclosed is a projection system that comprises a spatial light modulator having an array of such micromirrors, as well as a light source, condensing optics, wherein light from the light source is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors onto a target, and a controller for selectively actuating the micromirrors in the array.

    Micromirrors having mirror plates with tapered edges
    3.
    发明授权
    Micromirrors having mirror plates with tapered edges 有权
    微镜具有锥形边缘的镜面板

    公开(公告)号：US07751113B2

    公开(公告)日：2010-07-06

    申请号：US11625964

    申请日：2007-01-23

    Applicant: Andrew Huibers

    Inventor： Andrew Huibers

    IPC: G02B7/02

    CPC classification number: G02B26/0841

    Abstract: Disclosed herein is a micromirror device having a reflective mirror plate with reduced dimensions. The micromirror device can be a member of an array of micromirror devices for use in optical signal modulations, such as display applications and optical signal switching applications.

    Abstract translation: 本文公开了具有尺寸减小的反射镜板的微反射镜装置。 微镜器件可以是用于光信号调制（诸如显示应用和光信号切换应用）的微镜器件阵列的成员。

    Performance analyses of micromirror devices
    5.
    发明授权
    Performance analyses of micromirror devices 有权
    微镜器件的性能分析

    公开(公告)号：US07483126B2

    公开(公告)日：2009-01-27

    申请号：US10875760

    申请日：2004-06-23

    Applicant: Igor Volfman ,  Andrew Huibers ,  Satyadev Patel ,  Peter Richards ,  Leonid Frenkel ,  Jim Dunphy ,  Regis Grasser ,  Greg Schaadt

    Inventor： Igor Volfman ,  Andrew Huibers ,  Satyadev Patel ,  Peter Richards ,  Leonid Frenkel ,  Jim Dunphy ,  Regis Grasser ,  Greg Schaadt

    IPC: G01N21/88 ,  G02B26/00

    CPC classification number: G01N21/55 ,  G01N21/95

    Abstract: The invention provides a method and apparatus for evaluating the product quality and performances of micromirror array devices through measurements of the electromechanical responses of the individual micromirrors to the driving forces of electric fields. The electromechanical responses of the micromirrors according to the present invention are described in terms of the rotational angles associated with the operational states, such as the ON and OFF state angles of the ON and OFF state when the micromirror array device is operated in the binary-state mode, and the response speed (i.e. the time interval required for a micromirror device to transit form one state to another) of the individual micromirrors to the driving fields.

    Abstract translation: 本发明提供一种用于通过测量各个微镜对电场驱动力的机电响应来评估微镜阵列器件的产品质量和性能的方法和装置。 根据本发明的微反射镜的机电响应以与操作状态相关联的旋转角度进行描述，例如当微镜阵列器件在二进制编码器中操作时，ON和OFF状态的ON和OFF状态角， 状态模式以及各个微镜对驱动场的响应速度（即，微镜器件从一个状态转移到另一个状态所需的时间间隔）。

    DIGITAL IMAGE PROJECTION METHODS AND APPARATUS THEREOF
    9.
    发明申请
    DIGITAL IMAGE PROJECTION METHODS AND APPARATUS THEREOF 审中-公开
    数字图像投影方法及其设备

    公开(公告)号：US20070177113A1

    公开(公告)日：2007-08-02

    申请号：US11620537

    申请日：2007-01-05

    Applicant: Andrew Huibers

    Inventor： Andrew Huibers

    IPC: G03B3/00

    CPC classification number: H04N9/3141 ,  G03B21/005 ,  G03B21/208 ,  G03B2205/0061

    Abstract: Disclosed herein is a method of projecting images using light valves. Pixel patterns generated of the light valve pixels based on image data are projected at different locations at a time.

    Abstract translation: 本文公开了一种使用光阀投影图像的方法。 基于图像数据生成的光阀像素的像素图案一次投影在不同的位置。

    Spatial light modulators with non-uniform pixels
    10.
    发明授权
    Spatial light modulators with non-uniform pixels 有权
    具有不均匀像素的空间光调制器

    公开(公告)号：US07158279B2

    公开(公告)日：2007-01-02

    申请号：US10969503

    申请日：2004-10-19

    Applicant: Satyadev Patel ,  Regis Grasser ,  Andrew Huibers ,  Peter Heureux

    Inventor： Satyadev Patel ,  Regis Grasser ,  Andrew Huibers ,  Peter Heureux

    IPC: G02B26/00 ,  G02B26/08

    CPC classification number: G02B26/0833 ,  G02B26/0841 ,  H04N9/3114 ,  Y10S359/904

    Abstract: A micromirror array comprises micromirrors of different properties for use particularly in display systems. Micromirrors of different properties can be arranged within the micromirror array according to a predetermined pattern, or randomly. However, it is advantageous to arrange the micromirrors with different properties within the micromirror array neither in complete order nor complete in random.

    Abstract translation: 微镜阵列包括用于特别在显示系统中的不同性质的微镜。 可以根据预定图案或随机地将不同性质的微镜布置在微镜阵列内。 然而，有利的是在微镜阵列内布置具有不同特性的微反射镜，既不是完全顺序的也不是随机完成的。

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