公开(公告)号：US20060071181A1

公开(公告)日：2006-04-06

申请号：US10956817

申请日：2004-10-01

申请人： Lyudmila Stone ,  Scott Barusso ,  Dale Stone ,  Alexander Perel

发明人： Lyudmila Stone ,  Scott Barusso ,  Dale Stone ,  Alexander Perel

IPC分类号： H01J37/317

CPC分类号： H01J37/3171

摘要： An ion beam implanter includes ion beam forming and directing apparatus and an implantation station where workpieces are implanted with ions from an ion beam. The beam travels along an evacuated path from an ion source to the implantation station. A flexible bellows couples the implantation station to the beam forming and directing apparatus permitting the implantation station to be pivoted with respect to the beam forming and directing apparatus and thereby change an implantation orientation of the workpieces with respect to the ion beam. A replaceable, flexible bellows liner is disposed within an interior region of the bellows to reduce the volume of implantation byproducts deposited on an interior surface of the bellows.

摘要翻译： 离子束注入机包括离子束形成和引导装置以及其中用离子束注入离子的工件的注入站。 光束沿着从离子源到注入站的抽真空路径行进。 柔性波纹管将植入站耦合到波束形成和引导装置，允许植入站相对于波束形成和引导装置枢转，从而改变相对于离子束的工件的注入取向。 可替换的柔性波纹管衬套设置在波纹管的内部区域内，以减小沉积在波纹管内表面上的植入副产物的体积。

公开(公告)号：US06204508B1

公开(公告)日：2001-03-20

申请号：US09130662

申请日：1998-08-07

申请人： Jiong Chen ,  Ronald A. Capodilupo ,  Scott Barusso ,  Philip J. Ring ,  Kui Jin

发明人： Jiong Chen ,  Ronald A. Capodilupo ,  Scott Barusso ,  Philip J. Ring ,  Kui Jin

IPC分类号： H01J37317

CPC分类号： H01J1/16 ,  H01J27/022 ,  H01J2237/31701

摘要： A filament (18) for an ion implanter ion source or plasma shower is provided comprising first and second legs (20a, 20b) and a thermally emissive central portion (40) having ends connected, respectively, to the first and second legs. Preferably, the legs (20a, 20b) are constructed from tantalum (Ta), and the thermally emissive portion (40) is constructed of tungsten (W). The thermally emissive portion is coiled substantially along the entire length thereof and formed in the shape of a generally closed loop, such as a toroid. The toroid is comprised of two toroid halves (40a, 40b) coiled in opposite directions. The toroid halves are constructed of a plurality of filament strands (42, 44, 46) twisted together along substantially the entire length thereof. The coils of the toroid are capable of establishing closed loop magnetic field lines (B) therein when electrical current flows through the thermally emissive portion. The closed loop magnetic field lines (B) confine electrons (E) emitted from the surface of the thermally emissive portion within the confines of the coils.

摘要翻译： 提供了用于离子注入离子源或等离子体淋浴器的灯丝（18），其包括分别连接到第一和第二支腿的端部的第一和第二支腿（20a，20b）和热发射中心部分（40）。 优选地，腿（20a，20b）由钽（Ta）构成，并且热发射部分（40）由钨（W）构成。 热发射部分基本上沿着其整个长度盘绕并且形成为大致闭合的环路的形状，例如环形线圈。 环形线圈由在相反方向盘绕的两个环形半部（40a，40b）组成。 环形半部由沿其大致整个长度扭绞在一起的多个细丝股线（42,44,46）构成。 当电流流过热发射部分时，环形线圈的线圈能够在其中建立闭环磁场线（B）。 闭环磁场线（B）限制从线圈内的热发射部分的表面发射的电子（E）。