Burner for a vapour deposition process
    2.
    发明申请
    Burner for a vapour deposition process 有权
    燃烧器用于气相沉积工艺

    公开(公告)号:US20050061036A1

    公开(公告)日:2005-03-24

    申请号:US10496649

    申请日:2001-11-26

    摘要: A burner for a vapour deposition process has a cylindrical central gas passage and a plurality of external gas passages surrounding the central gas passage. The burner has a back block defining an initial section of the gas passages, a face block defining a final section of the gas passages and a manifold plate positioned between the back block and the face block and defining an intermediate section of the external gas passages; the face block, the manifold plate and the back block have inner integral walls that define respective sections of the central gas passage.

    摘要翻译: 用于气相沉积工艺的燃烧器具有圆柱形中心气体通道和围绕中心气体通道的多个外部气体通道。 燃烧器具有限定气体通道的初始部分的后部块,限定气体通道的最后部分的面块和位于后部块和面部块之间并限定外部气体通道的中间部分的歧管板; 面块,歧管板和后块具有限定中央气体通道的相应部分的内部整体壁。

    Disassemblable burner for a vapor deposition process
    4.
    发明授权
    Disassemblable burner for a vapor deposition process 有权
    用于气相沉积工艺的可拆卸燃烧器

    公开(公告)号:US08001808B2

    公开(公告)日:2011-08-23

    申请号:US10496649

    申请日:2001-11-26

    IPC分类号: C03B37/018

    摘要: A burner for a vapor deposition process has a cylindrical central gas passage and a plurality of external gas passages surrounding the central gas passage. The burner has a back block defining an initial section of the gas passages, a face block defining a final section of the gas passages and a manifold plate positioned between the back block and the face block and defining an intermediate section of the external gas passages; the face block, the manifold plate and the back block have inner integral walls that define respective sections of the central gas passage.

    摘要翻译: 用于气相沉积工艺的燃烧器具有圆柱形中心气体通道和围绕中心气体通道的多个外部气体通道。 燃烧器具有限定气体通道的初始部分的后部块,限定气体通道的最后部分的面块和位于后部块和面部块之间并限定外部气体通道的中间部分的歧管板; 面块,歧管板和后块具有限定中央气体通道的相应部分的内部整体壁。