公开(公告)号：US20130146503A1

公开(公告)日：2013-06-13

申请号：US13562555

申请日：2012-07-31

申请人： CHIEN-FENG WANG ,  MING-LONG CHIU ,  SHAO-WEI LU ,  TZU-JENG HSU

发明人： CHIEN-FENG WANG ,  MING-LONG CHIU ,  SHAO-WEI LU ,  TZU-JENG HSU

IPC分类号： H01L21/673

CPC分类号： H01L21/67369 ,  H01L21/67373 ,  H01L21/67379 ,  H01L21/67386 ,  H01L21/67393 ,  Y10T292/0834 ,  Y10T292/0964

摘要： A Front Opening Unified Pod (FOUP) has a pair of latch structures, and the latch structures install in a door of the FOUP. The latch structures use a circular rotary turntable to drive a pair of sliding devices, let the latch structures can lock or unlock more stabilized, and use sliding rollers respectively disposed on the sliding devices to prevent the generation of dusts.

摘要翻译： 前开口统一荚（FOUP）具有一对闩锁结构，并且闩锁结构安装在FOUP的门中。 闩锁结构使用圆形旋转转盘来驱动一对滑动装置，使得闩锁结构可以锁定或解锁更稳定，并且使用分别设置在滑动装置上的滑动辊来防止产生灰尘。

公开(公告)号：US08413815B2

公开(公告)日：2013-04-09

申请号：US13034477

申请日：2011-02-24

申请人： Chen-Wei Ku ,  Shao-Wei Lu ,  Ming-Long Chiu

发明人： Chen-Wei Ku ,  Shao-Wei Lu ,  Ming-Long Chiu

IPC分类号： B65D85/30 ,  H01L21/673

CPC分类号： H01L21/67369 ,  H01L21/67383

摘要： A Front Opening Unified Pod (FOUP) having a purgeable supporting module disposed at the junction of each sidewall and the backwall of the container, the characteristic of the FOUP being in that: the purgeable supporting module has a buffer gas chamber and a gas inlet is disposed at one end of the buffer gas chamber and connected to a gas valve on the bottom surface, an outgassing channel is disposed on the purgeable supporting module facing the opening of the FOUP, a long slot is disposed on one side of the outgassing channel and a kind of porous material is disposed in the long slot, an airflow channel being disposed between and thus connecting the outgassing channel and the buffer gas chamber, and a plurality of supporting ribs being vertically disposed on one side of the long slot at intervals.

摘要翻译： 具有设置在容器的每个侧壁和后壁的接合处的可清洗支撑模块的前开口统一荚（FOUP），其特征在于：所述可清洗支撑模块具有缓冲气室，气体入口为 设置在缓冲气体室的一端并连接到底面上的气阀，在可吹扫支撑组件上面对FOUP的开口设置有一个除气通道，一个长槽设置在除气通道的一侧， 一种多孔材料设置在长槽中，气流通道设置在排气通道和缓冲气体室之间，并且因此连接排气通道和缓冲气体室，并且多个支撑肋以间隔垂直地设置在长槽的一侧上。

公开(公告)号：US08418853B2

公开(公告)日：2013-04-16

申请号：US13004096

申请日：2011-01-11

申请人： Chen-Wei Ku ,  Shao Wei Lu ,  Chin-Ming Lin

发明人： Chen-Wei Ku ,  Shao Wei Lu ,  Chin-Ming Lin

IPC分类号： B65D85/00

CPC分类号： H01L21/67359 ,  H01L21/67353

摘要： An EUV pod with pressure sensors disposed between its inner container and outer container, wherein pressure sensors disposed on the inner side of the outer container are used to detect the pressure between the outer container and the inner container, and the pressure data are used to determine whether the inner container is firmly fastened by the outer container.

摘要翻译： 具有设置在其内部容器和外部容器之间的压力传感器的EUV舱，其中设置在外部容器的内侧上的压力传感器用于检测外部容器和内部容器之间的压力，并且使用压力数据来确定 内部容器是否被外部容器牢固地紧固。

公开(公告)号：US20130068656A1

公开(公告)日：2013-03-21

申请号：US13309727

申请日：2011-12-02

申请人： Jain-Ping Sheng ,  Tzu-Jeng Hsu ,  Shao-Wei Lu ,  Ming-Long Chiu

发明人： Jain-Ping Sheng ,  Tzu-Jeng Hsu ,  Shao-Wei Lu ,  Ming-Long Chiu

IPC分类号： B65D85/00

CPC分类号： H01L21/67386 ,  H01L21/67379

摘要： A FOUP (front opening unified pod) is disposed with a plurality of supporting pieces, the positions of which are calibrated to be symmetrical for the supporting pieces to horizontally support wafers in the pod, and with an OHT pad (Overhead Hoist Transport pad), a major function of which is to evenly distribute the weight of the FOUP and the wafers so that the transportation of the FOUP and the wafers by the OHT head can be further stabilized and more weight can be loaded to meet the demands of the process.

摘要翻译： FOUP（前开口统一的荚）设置有多个支撑件，其位置被校准为对于支撑件对称以水平地支撑荚壳中的晶片，并且具有OHT垫（架空起重机输送垫）， 其主要功能是均匀分配FOUP和晶片的重量，使得通过OHT头的FOUP和晶片的输送可以进一步稳定，并且可以加载更多的重量以满足该过程的要求。

公开(公告)号：US20110297579A1

公开(公告)日：2011-12-08

申请号：US12893155

申请日：2010-09-29

申请人： Shao-Wei Lu ,  PAO-YI LU ,  CHIEN-FENG WANG

发明人： Shao-Wei Lu ,  PAO-YI LU ,  CHIEN-FENG WANG

IPC分类号： B65D85/00

CPC分类号： H01L21/67369 ,  H01L21/67383

摘要： A wafer container, comprising: a container body, the container body having a plurality of slot portions on two opposite sidewalls of the interior of the container body for horizontally sustaining a plurality of wafers, each slot portion having a horizontal carrying portion, an opening being formed on one side of the container body for exporting and importing a plurality of wafers; and a door, said door having an inner surface and a outer surface, the inner surface being joined with the opening of the container body for protecting the plurality of wafers therein, the characteristic in that: an elasticity module is disposed on the inner wall of the rear end of the container body opposite to the opening, the elasticity module having a rectangular body and a convex portion bending toward the interior of the container body being respectively formed on two longer opposite sides of the rectangular body.

摘要翻译： 一种晶片容器，包括：容器主体，所述容器本体在所述容器主体内部的两个相对的侧壁上具有多个槽部分，用于水平地保持多个晶片，每个槽部分具有水平承载部分， 形成在容器主体的一侧，用于输出和导入多个晶片; 所述门具有内表面和外表面，所述内表面与所述容器主体的开口接合，用于保护所述多个晶片，其特征在于，弹性模块设置在所述容器主体的内壁上 容器主体的与开口相对的后端，具有矩形体的弹性模块和朝向容器主体内部弯曲的凸部分别形成在矩形体的两个更长的相对侧上。

公开(公告)号：US20110253591A1

公开(公告)日：2011-10-20

申请号：US12983355

申请日：2011-01-03

申请人： Ni-Shin Lee ,  Shao-Wei Lu

发明人： Ni-Shin Lee ,  Shao-Wei Lu

IPC分类号： B65D85/00

CPC分类号： H01L21/67353 ,  H01L21/67359 ,  H01L21/67393

摘要： A reticle pod for storing reticles, into the gas channel of partition of which gas is filled through a gas inlet, wherein strong gas flow is formed around the pellicle film and the pellicle film expands outward in accordance with the Bernoulli's principle; when no gas is filled in through the gas inlet, the pellicle film contracts inward. Therefore, by turning on and shutting off the gas inlet valve, the pellicle film will be set in a breathing motion for the gas inside the pellicle film to be exchanged.

摘要翻译： 一种用于将掩模版保存在通过气体入口填充气体的隔板的气体通道中，其中在防护薄膜周围形成强气流，防护薄膜根据伯努利原理向外膨胀; 当没有气体通过气体入口填充时，防护薄膜组件向内收缩。 因此，通过打开和关闭进气阀，防护薄膜将被设置为呼吸运动，以防止薄膜内的气体被更换。

公开(公告)号：US08794444B2

公开(公告)日：2014-08-05

申请号：US13309727

申请日：2011-12-02

申请人： Jain-Ping Sheng ,  Tzu-Jeng Hsu ,  Shao-Wei Lu ,  Ming-Long Chiu

发明人： Jain-Ping Sheng ,  Tzu-Jeng Hsu ,  Shao-Wei Lu ,  Ming-Long Chiu

IPC分类号： B65D85/30

CPC分类号： H01L21/67386 ,  H01L21/67379

摘要： A FOUP (front opening unified pod) is disposed with a plurality of supporting pieces, the positions of which are calibrated to be symmetrical for the supporting pieces to horizontally support wafers in the pod, and with an OHT pad (overhead hoist transport pad), a major function of which is to evenly distribute the weight of the FOUP and the wafers so that the transportation of the FOUP and the wafers by the OHT head can be further stabilized and more weight can be loaded to meet the demands of the process.

摘要翻译： FOUP（前开口统一吊舱）设置有多个支撑件，其位置被校准为对于支撑件对称以水平地支撑吊舱中的晶片，以及使用OHT垫（顶部起重运输垫）， 其主要功能是均匀分配FOUP和晶片的重量，使得通过OHT头的FOUP和晶片的输送可以进一步稳定，并且可以加载更多的重量以满足该过程的要求。

公开(公告)号：US08573264B2

公开(公告)日：2013-11-05

申请号：US12983355

申请日：2011-01-03

申请人： Ni-Shin Lee ,  Shao-Wei Lu

发明人： Ni-Shin Lee ,  Shao-Wei Lu

IPC分类号： B65D85/48

CPC分类号： H01L21/67353 ,  H01L21/67359 ,  H01L21/67393

摘要： A reticle pod for storing reticles, into the gas channel of partition of which gas is filled through a gas inlet, wherein strong gas flow is formed around the pellicle film and the pellicle film expands outward in accordance with the Bernoulli's principle; when no gas is filled in through the gas inlet, the pellicle film contracts inward. Therefore, by turning on and shutting off the gas inlet valve, the pellicle film will be set in a breathing motion for the gas inside the pellicle film to be exchanged.

摘要翻译： 一种用于将掩模版保存在通过气体入口填充气体的隔板的气体通道中，其中在防护薄膜周围形成强气流，防护薄膜根据伯努利原理向外膨胀; 当没有气体通过气体入口填充时，防护薄膜组件向内收缩。 因此，通过打开和关闭进气阀，防护薄膜将被设置为呼吸运动，以防止薄膜内的气体被更换。

公开(公告)号：US08413814B2

公开(公告)日：2013-04-09

申请号：US12952528

申请日：2010-11-23

申请人： Chen-Wei Ku ,  Shao-Wei Lu ,  Ming-Long Chiu

发明人： Chen-Wei Ku ,  Shao-Wei Lu ,  Ming-Long Chiu

IPC分类号： B65D85/30 ,  H01L21/673

CPC分类号： H01L21/67383 ,  H01L21/67389 ,  H01L21/67393

摘要： A Front Opening Unified Pod (FOUP) having a purgeable supporting module disposed at the junction of each sidewall and the backwall of the container, the characteristic of the FOUP being in that: the purgeable supporting module has a buffer gas chamber and a gas inlet is disposed at one end of the buffer gas chamber and connected to a gas valve on the bottom surface, an outgassing channel is disposed on the purgeable supporting module facing the opening of the FOUP, and a long slot is disposed on one side of the outgassing channel, an airflow channel being disposed between and thus connecting the outgassing channel and the buffer gas chamber, and a plurality of supporting ribs being vertically disposed on one side of the long slot at intervals.

摘要翻译： 具有设置在容器的每个侧壁和后壁的接合处的可清洗支撑模块的前开口统一荚（FOUP），其特征在于：所述可清洗支撑模块具有缓冲气室，气体入口为 设置在缓冲气体室的一端并连接到底面上的气阀，在与FOUP的开口相对的可清洗支撑模块上设置有除气通道，并且在除气通道的一侧设置有长槽 设置在所述排气通道和所述缓冲气体室之间并因此连接所述缓冲气体室的气流通道，以及间隔地在所述长槽的一侧垂直设置的多个支撑肋。

公开(公告)号：US20120018347A1

公开(公告)日：2012-01-26

申请号：US13004096

申请日：2011-01-11

申请人： Chen-Wei KU ,  Shao Wei Lu ,  Chin-Ming Lin

发明人： Chen-Wei KU ,  Shao Wei Lu ,  Chin-Ming Lin

IPC分类号： B65D85/00

CPC分类号： H01L21/67359 ,  H01L21/67353

摘要： An EUV pod with pressure sensors disposed between its inner container and outer container, wherein pressure sensors disposed on the inner side of the outer container are used to detect the pressure between the outer container and the inner container, and the pressure data are used to determine whether the inner container is firmly fastened by the outer container.

摘要翻译： 具有设置在其内部容器和外部容器之间的压力传感器的EUV舱，其中设置在外部容器的内侧上的压力传感器用于检测外部容器和内部容器之间的压力，并且使用压力数据来确定 内部容器是否被外部容器牢固地紧固。