公开(公告)号：US12033879B2

公开(公告)日：2024-07-09

申请号：US17683769

申请日：2022-03-01

申请人： Samsung Electronics Co., Ltd.

发明人： Sangmin Kim ,  Youngwook Kim ,  Ginam Park ,  Chuljun Park ,  Jeongjae Bang ,  Jaesung Byun ,  Yongjun Ahn ,  Sangkyung Lee ,  Hyunwoo Lee ,  Junhyuk Chang

IPC分类号： H01L21/677 ,  B65G1/06 ,  B65G1/127 ,  H01L21/673

CPC分类号： H01L21/67766 ,  B65G1/06 ,  B65G1/127 ,  H01L21/67379 ,  H01L21/6773 ,  B65G2201/0297

摘要： A transfer apparatus includes a lower plate including a lower link arm and a lower support, the lower support being fixed to an upper surface of the lower plate, an upper plate on the lower plate and configured to support a wafer stacking box on an upper surface of the upper plate, the upper plate including an upper link arm, and an upper support that is fixed to the upper surface of the upper plate, and a fixing member that is connected to the upper link arm, the fixing member configured to selectively contact the wafer stacking box. The upper plate is aligned with the lower plate in a first horizontal direction, and is configured to perform linear movement on the lower plate in the first horizontal direction.

公开(公告)号：US12017841B2

公开(公告)日：2024-06-25

申请号：US17363328

申请日：2021-06-30

申请人： Gudeng Precision Industrial Co., LTD

发明人： Ming-Chien Chiu ,  Chia-Ho Chuang ,  Kuo-Hua Lee ,  Shu-Hung Lin ,  Hao-Kang Hsia

IPC分类号： B65D81/18 ,  B65D85/30 ,  H01L21/673

CPC分类号： B65D85/30 ,  B65D81/18 ,  H01L21/67379 ,  H01L21/67389

摘要： A substrate container including a container body, a filter member, a back cover is provided. The container body having a top face, a bottom face opposing the top face, a back plate of a first height connecting the top face and the bottom face, a front opening located between the top face and the bottom face, and a back opening opposing the front opening. The front opening enables passage of a substrate and the back opening is located on the back plate and has a smaller second height. The filter member covers the back opening. The back cover establishes sealing engagement with the container body. A gas guiding channel extending in a direction of the first height is formed between the back cover and the container body. The back cover and the filter member define a buffering compartment, and the gas guiding channel has an outlet connecting the buffering compartment.

公开(公告)号：US12017342B2

公开(公告)日：2024-06-25

申请号：US18316853

申请日：2023-05-12

申请人： TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.

发明人： Chien-Fa Lee ,  Feng-Kuang Wu ,  Fu-Cheng Hung ,  Chi-Wei Chen ,  Chih-Hua Chen

IPC分类号： B25J11/00 ,  B25J15/00 ,  B65B69/00 ,  H01L21/673

CPC分类号： B25J11/0095 ,  B25J15/0014 ,  B25J15/0028 ,  B25J15/0052 ,  B65B69/00 ,  H01L21/67379

摘要： A robot gripper for moving wafer carriers and packing materials and a method of operating the same are provided. The gripper mechanism has two clamp assemblies, each with a support pin at the bottom. The clamps are configured to move towards or away from each other, and the support pins are configured to move relative to the clamp assemblies. The first clamp assembly has a main clamp and a secondary clamp with a protrusion, while the second clamp assembly has a similar configuration.

公开(公告)号：US20230207354A1

公开(公告)日：2023-06-29

申请号：US18116759

申请日：2023-03-02

申请人： Applied Materials, Inc.

发明人： Devendra Channappa Holeyannavar ,  Sandesh Doddamane Ramappa ,  Dean C. Hruzek ,  Michael R. Rice ,  Jeffrey A. Brodine

IPC分类号： H01L21/67 ,  H01L21/673 ,  H01L21/677

CPC分类号： H01L21/67178 ,  H01L21/6719 ,  H01L21/67184 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67379 ,  H01L21/67389 ,  H01L21/67769 ,  H01L21/67775 ,  H01L21/67207

摘要： A platform is of a side storage pod. The platform includes an upper surface and kinematic pins extending from the upper surface within a chamber of the side storage pod to engage a lower surface of a side storage container in the chamber to level the side storage container in the chamber.

公开(公告)号：US11646214B2

公开(公告)日：2023-05-09

申请号：US16494451

申请日：2018-02-15

申请人： Shin-Etsu Polymer Co., Ltd.

发明人： Osamu Ogawa ,  Kiminori Tominaga

IPC分类号： H01L21/673 ,  F16K27/02 ,  H01L21/677

CPC分类号： H01L21/6732 ,  F16K27/0209 ,  H01L21/67376 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67389 ,  H01L21/67393 ,  H01L21/67769

摘要： A substrate storage container comprises a container body capable of containing a plurality of substrates, and an air supply member capable of supplying gas from outside of the container body to an internal space, wherein for the substrate storage container the container body is formed in a front open box and the air supply member is attached to the bottom surface, and wherein a functional unit that changes the environment of the internal space to different states are connected with the air supply member so as to be able to be exchanged.

公开(公告)号：US20180308731A1

公开(公告)日：2018-10-25

申请号：US15738027

申请日：2016-06-08

申请人： SINFONIA TECHNOLOGY CO., LTD.

发明人： Haruki TAKEUCHI

IPC分类号： H01L21/673 ,  H01L21/677 ,  A61L2/20

CPC分类号： H01L21/67373 ,  A61L2/20 ,  H01L21/67376 ,  H01L21/67379 ,  H01L21/677 ,  H01L21/67772

摘要： Reliability in the restriction of the movement of a container is improved.A content moving device 1 includes: a table portion 20 on which a container 50 is placed; and a restricting mechanism 30. A flange 55 of the container 50 is shaped to provide a recessed portion 56a. A restricting mechanism 30 includes: a collar portion 31; a first restricting portion 32 configured to be located in the recessed portion 56a; a second restricting portion 33a provided above the first restricting portion 32 and inward of the collar portion 31; and a second moving mechanism. The second moving mechanism is configured to move the second restricting portion 33a along an extending direction B between a first position, in which the second restricting portion 33a is opposed to the flange 55 of the container 50 in an up-down direction A, and a second position, in which the second restricting portion 33a is opposed to the recessed portion 56a in the up-down direction A without being opposed to the flange 55 in the up-down direction A.

公开(公告)号：US10062590B2

公开(公告)日：2018-08-28

申请号：US15676687

申请日：2017-08-14

申请人： Lam Research Corporation

发明人： Scott Wong ,  Damon Tyrone Genetti ,  Derek John Witkowicki ,  Alex Paterson ,  Richard H. Gould ,  Austin Ngo ,  Marc Estoque

IPC分类号： H01L21/67 ,  H01L21/673 ,  H01L21/677 ,  H01L21/687

CPC分类号： H01L21/67167 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67303 ,  H01L21/6732 ,  H01L21/67369 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67386 ,  H01L21/67389 ,  H01L21/67742 ,  H01L21/68707

摘要： A pod for exchanging consumable parts with a process module includes a base plate having a front side, a back side, and first and second lateral sides. A first support column is disposed on the first lateral side proximal to the front side. A second support column is disposed on the second lateral side proximal to the front side. A third support column is disposed on the first lateral side proximal to back side and a fourth support column is disposed on the second lateral side proximal to the back side. Each of the support columns includes a plurality of support fingers distributed lengthwise and directed inward. A first hard stop column is disposed parallel to the third support column and a second hard stop column is disposed parallel to the fourth support column. A shell structure connected to the base plate is configured to enclose the first, second third and fourth support columns, top plate and first and second hard stop columns and includes a front opening disposed on the front side of the base plate. A door is mated to the front opening and includes retention assembly for securing consumable parts in the pod, when received in the pod.

公开(公告)号：US09978623B2

公开(公告)日：2018-05-22

申请号：US14822392

申请日：2015-08-10

申请人： Brooks Automation, Inc.

发明人： Daniel Babbs ,  William Fosnight ,  Robert C. May ,  William Weaver

IPC分类号： H01L21/677 ,  H01L21/67 ,  H01L21/673

CPC分类号： H01L21/67766 ,  H01L21/67201 ,  H01L21/67207 ,  H01L21/67213 ,  H01L21/67225 ,  H01L21/67376 ,  H01L21/67379 ,  H01L21/67393 ,  H01L21/67742 ,  H01L21/67772 ,  H01L21/67775 ,  H01L21/67778 ,  Y10S414/14

摘要： A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.

公开(公告)号：US20180040492A1

公开(公告)日：2018-02-08

申请号：US15676687

申请日：2017-08-14

申请人： Lam Research Corporation

发明人： Scott Wong ,  Damon Tyrone Genetti ,  Derek John Witkowicki ,  Alex Paterson ,  Richard H. Gould ,  Austin Ngo ,  Marc Estoque

IPC分类号： H01L21/67 ,  H01L21/677 ,  H01L21/673 ,  H01L21/687

CPC分类号： H01L21/67167 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67303 ,  H01L21/6732 ,  H01L21/67369 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67386 ,  H01L21/67389 ,  H01L21/67742 ,  H01L21/68707

摘要： A pod for exchanging consumable parts with a process module includes a base plate having a front side, a back side, and first and second lateral sides. A first support column is disposed on the first lateral side proximal to the front side. A second support column is disposed on the second lateral side proximal to the front side. A third support column is disposed on the first lateral side proximal to back side and a fourth support column is disposed on the second lateral side proximal to the back side. Each of the support columns includes a plurality of support fingers distributed lengthwise and directed inward. A first hard stop column is disposed parallel to the third support column and a second hard stop column is disposed parallel to the fourth support column. A shell structure connected to the base plate is configured to enclose the first, second third and fourth support columns, top plate and first and second hard stop columns and includes a front opening disposed on the front side of the base plate. A door is mated to the front opening and includes retention assembly for securing consumable parts in the pod, when received in the pod.

公开(公告)号：US20180019142A1

公开(公告)日：2018-01-18

申请号：US15673030

申请日：2017-08-09

申请人： Lam Research Corporation

发明人： Scott Wong ,  Damon Tyrone Genetti ,  Derek John Witkowicki ,  Alex Paterson ,  Richard H. Gould ,  Austin Ngo ,  Marc Estoque

IPC分类号： H01L21/67 ,  H01L21/677 ,  H01L21/673 ,  H01L21/687

CPC分类号： H01L21/67167 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67303 ,  H01L21/6732 ,  H01L21/67369 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67386 ,  H01L21/67389 ,  H01L21/67742 ,  H01L21/68707

摘要： A pod for exchanging consumable parts with a process module includes a base plate having a front side, a back side, and first and second lateral sides. A first support column is disposed on the first lateral side proximal to the front side. A second support column is disposed on the second lateral side proximal to the front side. A third support column is disposed on the first lateral side proximal to back side and a fourth support column is disposed on the second lateral side proximal to the back side. Each of the support columns includes a plurality of support fingers distributed lengthwise and directed inward. A first hard stop column is disposed parallel to the third support column and a second hard stop column is disposed parallel to the fourth support column. A shell structure connected to the base plate is configured to enclose the first, second third and fourth support columns, top plate and first and second hard stop columns and includes a front opening disposed on the front side of the base plate. A door is mated to the front opening and includes retention assembly for securing consumable parts in the pod, when received in the pod.