公开(公告)号：US06992197B2

公开(公告)日：2006-01-31

申请号：US10866600

申请日：2004-06-10

申请人： Junji Nakamura ,  Shigetaka Numasawa ,  Hiroyuki Kenmochi ,  Yoji Hori

发明人： Junji Nakamura ,  Shigetaka Numasawa ,  Hiroyuki Kenmochi ,  Yoji Hori

IPC分类号： C07D307/77

CPC分类号： C07D307/77 ,  C07D307/88 ,  C07D307/93

摘要： A novel monomer compound having a lactone moiety of the present invention can be converted into polymers usable as resist materials with excellent properties, etc., and an alcohol compound having a lactone moiety of the invention is useful as a material for the monomer compound. The compounds are represented by the following general formula [1]: wherein one of R1 and R2 represents a hydrogen atom, an acryloyl group, or a methacryloyl group, and the other represents an alkyl group; R3 and R4 independently represent a hydrogen atom or an alkyl group; R5 and R6 both represent a hydrogen atom or are combined to form a methylene chain that may have an alkyl group; and R7 and R8 independently represent a hydrogen atom or a methyl group.

摘要翻译： 具有本发明的内酯部分的新型单体化合物可以转化为可用作具有优异性能等的抗蚀材料的聚合物，并且具有本发明的内酯部分的醇化合物可用作单体化合物的材料。 化合物由以下通式[1]表示：其中R 1和R 2中的一个代表氢原子，丙烯酰基或甲基丙烯酰基，和 另一个表示烷基; R 3和R 4独立地表示氢原子或烷基; R 5和R 6都表示氢原子或被结合形成可具有烷基的亚甲基链; R 7和R 8独立地表示氢原子或甲基。

公开(公告)号：US20050032887A1

公开(公告)日：2005-02-10

申请号：US10866600

申请日：2004-06-10

申请人： Junji Nakamura ,  Shigetaka Numasawa ,  Hiroyuki Kenmochi ,  Yoji Hori

发明人： Junji Nakamura ,  Shigetaka Numasawa ,  Hiroyuki Kenmochi ,  Yoji Hori

IPC分类号： C07D307/32 ,  A61K31/365 ,  C07D307/77 ,  C07D307/78 ,  C07D307/88 ,  C07D307/93

CPC分类号： C07D307/77 ,  C07D307/88 ,  C07D307/93

摘要： A novel monomer compound having a lactone moiety of the present invention can be converted into polymers usable as resist materials with excellent properties, etc., and an alcohol compound having a lactone moiety of the invention is useful as a material for the monomer compound. The compounds are represented by the following general formula [1]: wherein one of R1 and R2 represents a hydrogen atom, an acryloyl group, or a methacryloyl group, and the other represents an alkyl group; R3 and R4 independently represent a hydrogen atom or an alkyl group; R5 and R6 both represent a hydrogen atom or are combined to form a methylene chain that may have an alkyl group; and R7 and R8 independently represent a hydrogen atom or a methyl group.

摘要翻译： 具有本发明的内酯部分的新型单体化合物可以转化为可用作具有优异性能等的抗蚀剂材料的聚合物，并且具有本发明的内酯部分的醇化合物可用作单体化合物的材料。 化合物由以下通式[1]表示：其中R 1和R 2之一表示氢原子，丙烯酰基或甲基丙烯酰基，另一个表示烷基; R 3和R 4独立地表示氢原子或烷基; R 5和R 6均表示氢原子或者被结合形成可具有烷基的亚甲基链; R 7和R 8独立地表示氢原子或甲基。