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公开(公告)号:US20210293475A1
公开(公告)日:2021-09-23
申请号:US17208210
申请日:2021-03-22
申请人: Shunichi MATSUMOTO , Kunio KAZAMI , Jun KONDO , Hiroshi KUBOTA , Takahiro UMENO , Shoji TAKAMI , Kenji IWAMOTO , Yujiro HOTEI
发明人: Shunichi MATSUMOTO , Kunio KAZAMI , Jun KONDO , Hiroshi KUBOTA , Takahiro UMENO , Shoji TAKAMI , Kenji IWAMOTO , Yujiro HOTEI
摘要: A helium circulation system includes a refrigerator configured to cool a gas refrigerant into a liquid refrigerant; a first path configured to feed the liquid refrigerant from the refrigerator to a Dewar; a second path configured to feed the gas refrigerant from the Dewar to a vaporized gas collector via the refrigerator; a third path configured to feed the gas refrigerant from the vaporized gas collector to the refrigerator; a fourth path configured to feed the gas refrigerant from the Dewar to the vaporized gas collector without via the refrigerator; and a control unit configured to feed the liquid refrigerant through the first path while feeding the gas refrigerant through the third path when the refrigerator is driven, and feed the gas refrigerant through the second path while feeding the gas refrigerant the fourth path, when the refrigerator is stopped.