公开(公告)号：US20120171418A1

公开(公告)日：2012-07-05

申请号：US13337328

申请日：2011-12-27

申请人： Chiung-Fang Lin ,  Jen-Fang Yu ,  Shun-Lin Huang

发明人： Chiung-Fang Lin ,  Jen-Fang Yu ,  Shun-Lin Huang

IPC分类号： B32B3/00 ,  C23C16/40

CPC分类号： C23C26/00 ,  B82Y40/00 ,  C23C4/123 ,  C23C4/134 ,  Y10T428/24355

摘要： A fabrication of a low dielectric constant nano-zeolite thin film includes preparing a zeolite nanoparticle suspension that includes zeolite nanoparticles suspended in a solvent and each zeolite nanoparticle includes pores with templating agents disposed inside the pores; performing a heat treatment on a substrate; vaporizing the zeolite nanoparticle suspension to form vaporized droplets containing the zeolite nanoparticles; using a gas to carry the vaporized droplets containing the zeolite nanoparticles into a plasma to perform a plasma reaction; and allowing the plasma-treated zeolite nanoparticles to deposit on the heated substrate to form a nano-zeolite thin film with a dielectric constant less than 2 and the templating agents removed.

摘要翻译： 低介电常数纳米沸石薄膜的制造包括制备包含悬浮在溶剂中的沸石纳米颗粒的沸石纳米颗粒悬浮液，并且每个沸石纳米颗粒包括设置在孔内的模板剂的孔; 对基板进行热处理; 汽化沸石纳米颗粒悬浮液以形成含有沸石纳米颗粒的汽化液滴; 使用气体将含有沸石纳米颗粒的气化液滴携带到等离子体中以进行等离子体反应; 并且允许等离子体处理的沸石纳米颗粒沉积在加热的基底上以形成介电常数小于2的纳米沸石薄膜，并除去模板剂。