公开(公告)号：US06710889B2

公开(公告)日：2004-03-23

申请号：US10189052

申请日：2002-07-02

申请人： Pey-Yuan Lee ,  Chi-Shen Lo ,  Sian-Ren Horng ,  Han-Liang Tseng ,  Wei-Ming You ,  Yi-Hung Chen

发明人： Pey-Yuan Lee ,  Chi-Shen Lo ,  Sian-Ren Horng ,  Han-Liang Tseng ,  Wei-Ming You ,  Yi-Hung Chen

IPC分类号： G01B1106

CPC分类号： G01B11/0616

摘要： A method for measuring a dielectric layer thickness calibration reference standard including providing a substrate having a dielectric layer for calibrating a dielectric layer thickness measuring tool; cleaning the dielectric layer according to a cleaning process including at least one of spraying and scrubbing; and, measuring the thickness of the dielectric layer with the dielectric layer thickness measuring tool including at least one portion of the dielectric layer displaced from the substrate center.

摘要翻译： 一种用于测量介电层厚度校准参考标准的方法，包括提供具有用于校准介电层厚度测量工具的介电层的衬底; 根据包括喷雾和擦洗中的至少一种的清洁过程清洁介电层; 并且用介电层厚度测量工具测量介电层的厚度，该电介质层厚度测量工具包括从衬底中心位移的电介质层的至少一部分。