Magnetic field shield including a superconductive film
    1.
    发明授权
    Magnetic field shield including a superconductive film 失效
    磁场屏蔽包括超导膜

    公开(公告)号:US4920011A

    公开(公告)日:1990-04-24

    申请号:US260604

    申请日:1988-10-20

    IPC分类号: H01L39/00 H01L39/24 H05K9/00

    摘要: A magnetic field shield including a superconductive film characterized in that the magnetic field shield comprises a superconductive film layer constituted primarily of a mixed crystalline body of niobium nitride and titanium nitride laminated on a metal substrate, that the magnetic field further comprises a nobium-titanium alloy layer or a metal film layer in the above lamination, that the magnetic field comprises a plurality of the above-mentioned layers, and that the magnetic field has a plurality of small holes passing through the layers in the direction of the thickness. The magnetic field shield of the present invention produces an excellent magnetic field shielding effect due to a superconductive characteristic peculiar to the superconductive film layer constituted primarily by a mixed crystalline body of niobium nitride and titanium nitride. The cooling effect of the metal substrate maintains the magnetic field shielding effect at a high level. In addition, due to the use of the niobium-titanium alloy layer, the magnetic field shield has high resistance against peeling, greatly increasing the practical usefulness of the magnetic field shield. In the case of the magnetic field shield with a plurality of the laminated layers, the cooling effect of the metal film layers included in the multiple layers stably maintains the magnetic field shielding effect of the superconductive film layers. In the case of the magnetic field shield with small holes, the electromagnetic shielding and cooling effects of the holes are added to further strengthen the magnetic field shielding effect.

    摘要翻译: 一种包括超导膜的磁场屏蔽,其特征在于,磁场屏蔽包括主要由氮化铌和氮化钛的混合晶体构成的超导膜层,层叠在金属基板上,磁场还包括铌 - 钛合金 层或金属膜层,磁场包括多个上述层,并且磁场具有在厚度方向上穿过层的多个小孔。 由于主要由氮化铌和氮化钛的混晶构成的超导膜层特有的超导特性,本发明的磁场屏蔽产生优异的磁场屏蔽作用。 金属基板的冷却效果使磁场屏蔽效果保持在高水平。 另外,由于使用了铌钛合金层,所以磁场屏蔽具有高抗剥离性,大大提高了磁场屏蔽的实用性。 在具有多个层叠层的磁场屏蔽的情况下,包含在多层中的金属膜层的冷却效果稳定地保持超导膜层的磁场屏蔽效果。 在具有小孔的磁场屏蔽的情况下,添加孔的电磁屏蔽和冷却效果以进一步增强磁场屏蔽效果。