公开(公告)号：US08316688B2

公开(公告)日：2012-11-27

申请号：US12873879

申请日：2010-09-01

申请人： Stefan Kimmerle ,  Michael Baus

发明人： Stefan Kimmerle ,  Michael Baus

IPC分类号： G01P21/00

CPC分类号： G01D18/00 ,  B81C99/0045

摘要： A method for carrying out a self-test for a micromechanical sensor device, and a corresponding micromechanical sensor device. The method has the following steps: exciting the sensor device using a first excitation signal variation in a first self-test; storing a corresponding first response signal variation of the sensor device; exciting the sensor device using a second excitation signal variation in a second self-test; storing a corresponding second response signal variation of the sensor device; analyzing the first and second response signal variations with regard to at least one predefined criterion; and preparing a self-test result based on the analytical result of the first and second response signal variations.

摘要翻译： 用于执行微机械传感器装置的自检的方法以及相应的微机械传感器装置。 该方法具有以下步骤：在第一自检中使用第一激励信号变化激励传感器装置; 存储所述传感器装置的对应的第一响应信号变化; 在第二自检中使用第二激励信号变化激励传感器装置; 存储所述传感器装置的对应的第二响应信号变化; 分析关于至少一个预定标准的第一和第二响应信号变化; 并基于第一和第二响应信号变化的分析结果准备自检结果。

公开(公告)号：US20110067506A1

公开(公告)日：2011-03-24

申请号：US12873879

申请日：2010-09-01

申请人： Stefan KIMMERLE ,  Michael Baus

发明人： Stefan KIMMERLE ,  Michael Baus

IPC分类号： G01D21/00

CPC分类号： G01D18/00 ,  B81C99/0045

摘要： A method for carrying out a self-test for a micromechanical sensor device, and a corresponding micromechanical sensor device. The method has the following steps: exciting the sensor device using a first excitation signal variation in a first self-test; storing a corresponding first response signal variation of the sensor device; exciting the sensor device using a second excitation signal variation in a second self-test; storing a corresponding second response signal variation of the sensor device; analyzing the first and second response signal variations with regard to at least one predefined criterion; and preparing a self-test result based on the analytical result of the first and second response signal variations.

摘要翻译： 用于执行微机械传感器装置的自检的方法以及相应的微机械传感器装置。 该方法具有以下步骤：在第一自检中使用第一激励信号变化激励传感器装置; 存储所述传感器装置的对应的第一响应信号变化; 在第二自检中使用第二激励信号变化激励传感器装置; 存储所述传感器装置的对应的第二响应信号变化; 分析关于至少一个预定标准的第一和第二响应信号变化; 并基于第一和第二响应信号变化的分析结果准备自检结果。