-
公开(公告)号:US06291924B1
公开(公告)日:2001-09-18
申请号:US09346081
申请日:1999-07-01
申请人: Kei-Fung Lau , Robert B. Stokes , Kuo-Hsiung Yen , Alvin M. Kong , Steven E. Housholder , Ronald D. Kasparek
发明人: Kei-Fung Lau , Robert B. Stokes , Kuo-Hsiung Yen , Alvin M. Kong , Steven E. Housholder , Ronald D. Kasparek
IPC分类号: H01L4108
CPC分类号: H03H9/145
摘要: An adjustable surface acoustic wave (SAW) transducer is fabricated on a piezoelectric substrate. The adjustable SAW transducer includes a plurality of SAW interdigital transducer (IDT) fingers disposed on the substrate. Miniature switches are used to provide a plurality of interconnection patterns between the SAW IDT fingers such that a plurality of SAW characteristics can be generated from a single set of SAW IDT fingers.
摘要翻译: 在压电基片上制作可调声表面波(SAW)传感器。 可调谐SAW换能器包括设置在基板上的多个SAW叉指换能器(IDT)指状物。 微型开关用于在SAW IDT指状物之间提供多个互连图案,使得可以从单组SAW IDT手指产生多个SAW特性。