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公开(公告)号：US06856499B2
公开(公告)日：2005-02-15
申请号：US10402032
申请日：2003-03-28
申请人： Robert B. Stokes
发明人： Robert B. Stokes
CPC分类号： H01G5/14 , H01F17/0006 , H01F21/04 , H01F2007/068 , H01G5/18 , H03H7/0115 , H03H2007/008
摘要： A variable passive component is provided for fabrication on a microelectromechanical system (MEMS) device. A conductive portion is provided on a low-profile sliding dielectric sheet that cooperates with a conductive portion disposed on a substrate to provide a variable passive component. The passive component can be a variable inductor provided by moving a shorted spiral inductor formed on the dielectric sheet over a spiral inductor on the substrate with varying degrees of overlap causing varying inductance values. The passive component can be a variable capacitor that consists of a large conductive pad on a dielectric plate which slides over two adjacent pads on the substrate with varying overlap causing varying capacitance values.
摘要翻译： 提供可变无源部件用于在微机电系统（MEMS）装置上制造。 导电部分设置在与设置在基板上的导电部分配合以提供可变无源部件的薄型滑动电介质片上。 无源部件可以是可变电感器，其通过将形成在电介质片上的短路螺旋电感器移动到衬底上的螺旋电感器上，并以不同程度的重叠使电感值变化而提供。 无源部件可以是可变电容器，其由电介质板上的大导电焊盘构成，其在基板上的两个相邻焊盘上滑动，具有变化的重叠，导致变化的电容值。
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公开(公告)号：US5552655A
公开(公告)日：1996-09-03
申请号：US450226
申请日：1995-05-25
申请人： Robert B. Stokes , Jay D. Cushman , Drew Cushman
发明人： Robert B. Stokes , Jay D. Cushman , Drew Cushman
CPC分类号： H03H9/585 , H03H9/02228 , H03H9/588
摘要： A low frequency mechanical resonator that resonates at relatively low frequencies and can be fabricated as part of an integrated circuit. The resonator includes a piezoelectric structure having a top piezoelectric layer and a bottom piezoelectric layer positioned over a recessed area in a substrate. A top input electrode is positioned on the top surface of the top piezoelectric layer, a middle shield electrode is positioned between the piezoelectric layers, and a bottom output electrode is positioned on the bottom surface of the bottom piezoelectric layer adjacent the recessed area. By applying an appropriate alternating current to the top electrode, the top piezoelectric layer is alternately contracted and expanded. Because the top piezoelectric layer is secured to the bottom piezoelectric layer, the piezoelectric structure will flex up and down in order to relieve stress within the structure. The flexing of the piezoelectric structure causes flexural waves within the piezoelectric structure which resonate at a particular frequency depending on the membrane material, membrane thickness, and the width of the recessed area. The top and bottom electrodes can be replaced with interdigital transducers in order to select particular higher order flexural resonances for higher resonant frequencies.
摘要翻译： 低频机械谐振器，其在较低频率下谐振并可作为集成电路的一部分制造。 谐振器包括具有位于衬底中的凹陷区域上方的顶部压电层和底部压电层的压电结构。 顶部输入电极位于顶部压电层的顶表面上，中间屏蔽电极位于压电层之间，底部输出电极位于邻近凹陷区域的底部压电层的底表面上。 通过向顶部电极施加适当的交流电，顶部压电层交替地收缩和膨胀。 因为顶部压电层被固定到底部压电层，所以压电结构将上下弯曲以减轻结构内的应力。 压电结构的弯曲会导致压电结构内的弯曲波，其根据膜材料，膜厚度和凹陷区域的宽度以特定频率共振。 顶部和底部电极可以用叉指式换能器代替，以便为更高的谐振频率选择特定的较高阶弯曲谐振。
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3.发明授权
公开(公告)号：US5382930A
公开(公告)日：1995-01-17
申请号：US993575
申请日：1992-12-21
摘要： This invention discloses a monolithic multipole stacked crystal filter comprised of a series of cascaded 2-port semiconductor bulk acoustic resonator stacked crystal filters electrically cascaded and a shunt inductor connected between each of the 2-port filters. Each of the 2-port filters including a first and second piezoelectric layer, typically aluminum nitride. A first input electrode is positioned on a top surface of one of the piezoelectric layers and a second output electrode is positioned on a bottom surface of the other of the piezoelectric layers. A ground electrode is positioned between the piezoelectric layers. In this regard, the piezoelectric layers will resonate at a resonant frequency and provide bandpass filter characteristics. The complete monolithic multipole filter provides control of the passband shape which yields highly desirable filter characteristics.
摘要翻译： 本发明公开了一种单片多极叠层晶体滤波器，由一系列级联的2端口半导体体声波谐振器和级联的层叠晶体滤波器以及连接在每个2端口滤波器之间的并联电感器组成。 每个2端口滤波器包括第一和第二压电层，通常为氮化铝。 第一输入电极位于压电层之一的顶表面上，第二输出电极位于另一个压电层的底表面上。 接地电极位于压电层之间。 在这方面，压电层将以谐振频率谐振并提供带通滤波器特性。 完整的单片多极滤波器提供对通带形状的控制，其产生非常期望的滤波器特性。
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公开(公告)号：US4947073A
公开(公告)日：1990-08-07
申请号：US152127
申请日：1988-02-04
申请人： Robert B. Stokes , Kuo-Hsiung Yen , Kei-Fung Lau
发明人： Robert B. Stokes , Kuo-Hsiung Yen , Kei-Fung Lau
CPC分类号： H03H9/72
摘要： A surface acoustic wave (SAW) device and a related method, for providing improved frequency response characteristics from a SAW spectrum analyzer or channelizer. The device includes a spectrum analyzer with a preprocessing SAW device configured to provide output signals with narrower passbands, lower sidelobe components, or both. The preprocessing SAW device is a tapped delay line in one embodiment, to simulate positional offsets in the placement of input transducers of the analyzer. The tapped delay line can also be used to provide amplitude weighting or can be configured in a chirp spacing, to transform the spectrum analyzer into a chirp analyzer. Another embodiment employs a thinned-electrode prefilter as the preprocessing device, to yield a frequency response with multiple narrow passbands, which are used to narrow the individual channel passbands of the spectrum analyzer or to suppress sidelobes in the frequency response.
摘要翻译： 一种表面声波（SAW）器件和相关方法，用于从SAW频谱分析仪或通道化器提供改进的频率响应特性。 该装置包括具有预处理SAW器件的频谱分析器，其被配置为提供具有较窄通带，较低旁瓣分量或两者的输出信号。 在一个实施例中，预处理SAW器件是抽头延迟线，以模拟分析器的输入换能器的放置位置偏移。 抽头延迟线还可以用于提供幅度加权或者可以以啁啾间隔配置，以将频谱分析仪转换成啁啾分析仪。 另一实施例采用薄电极预滤器作为预处理装置，以产生具有多个窄通带的频率响应，其用于缩小频谱分析仪的各个通道通带或抑制频率响应中的旁瓣。
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公开(公告)号：US4672641A
公开(公告)日：1987-06-09
申请号：US615609
申请日：1984-05-31
摘要： A surface acoustic wave (SAW) device, and corresponding method, for expanding or contracting the time scale of an input signal that varies in time but is limited to a predetermined time interval. One embodiment of the invention achieves time expansion or compression by means of two Fourier transformations providing different chirp rates, and implemented in a form that includes only five SAW dispersive delay lines. In the illustrative version of this embodiment, three of the dispersive delay lines are used in conjunction with multipliers or mixers, and two are used as convolvers. Another embodiment of the invention uses only three SAW dispersive delay lines, two in conjunction with multipliers and one located between the multipliers to effect the desired time-scale change. A third embodiment of the invention employs a SAW tapped delay line and an associated set of gates to select successive data bit signals from successive output taps in the delay line. A SAW fill-in filter is used to fill in inter-bit gaps resulting from the use of the tapped delay line.
摘要翻译： 一种表面声波（SAW）装置及相应的方法，用于扩展或缩小时间上变化但被限制在预定时间间隔的输入信号的时间标度。 本发明的一个实施例通过提供不同啁啾率的两个傅里叶变换实现时间扩展或压缩，并且以仅包括五个SAW色散延迟线的形式实现。 在该实施例的说明性版本中，三个色散延迟线与乘法器或混频器一起使用，两个用作卷积器。 本发明的另一实施例仅使用三个SAW色散延迟线，其中两个与乘法器结合，一个位于乘法器之间，以实现期望的时标变化。 本发明的第三实施例采用SAW抽头延迟线和相关联的一组门，以从延迟线中的连续输出抽头选择连续的数据位信号。 SAW填充滤波器用于填充由使用抽头延迟线导致的位间间隙。
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公开(公告)号：US4499393A
公开(公告)日：1985-02-12
申请号：US580575
申请日：1984-02-15
IPC分类号： G01H3/04 , G01H3/08 , G01R23/02 , G01R23/16 , G01R23/17 , H03H9/145 , H03H9/64 , H03H9/25 , H01L41/08
CPC分类号： G01R23/17 , H03H9/1455
摘要： A surface acoustic wave (SAW) device configured to operate as a spectrum analyzer, and having an array of input transducers disposed on a substrate in such positions as to produce a focused beam of acoustic energy at a focal arc, each position on the arc being representative of an input signal frequency. Output transducers produce electrical signals corresponding to the energy received at successive segments of the focal arc. The disclosed device includes various combinations of input transducer array improvements, some of which are to provide amplitude weighting of the input array, including aperture width weighting, capacitive weighting, resistive weighting, series-parallel weighting, and source withdrawal weighting. Another improvement in input array configuration eliminates close or overlapping electrodes of opposite polarities and thereby reduces parasitic capacitance and acoustic radiation between electrode elements. The use of curved input transducer fingers improves operation of the transducers as point sources. Other important improvements include the use of acoustic transducers before to transmit the focused output energy from the focal line to conventional output transducers, thereby improving frequency resolution, and the use of electromagnetic waveguides to transmit energy from output transducers located on the focal line.
摘要翻译： 一种表面声波（SAW）装置，被配置为作为频谱分析仪进行操作，并且具有设置在基板上的输入换能器阵列，以便在聚焦弧处产生聚焦的能量束的位置，弧上的每个位置 代表输入信号频率。 输出换能器产生对应于在焦弧的连续段处接收的能量的电信号。 所公开的设备包括输入换能器阵列改进的各种组合，其中一些是提供输入阵列的幅度加权，包括孔径宽度加权，电容加权，电阻加权，串联并行加权和源提取加权。 输入阵列配置的另一改进消除了相反极性的紧密或重叠的电极，从而减小电极元件之间的寄生电容和声辐射。 使用弯曲的输入传感器手指改善了作为点源的换能器的操作。 其他重要的改进包括在将聚焦输出能量从焦线传输到常规输出换能器之前使用声换能器，从而提高频率分辨率，以及使用电磁波导从位于焦线上的输出换能器传输能量。
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公开(公告)号：US4716390A
公开(公告)日：1987-12-29
申请号：US907546
申请日：1986-09-15
CPC分类号： H03H2/001
摘要： A magnetostatic wave (MSW) device for performing spectral analysis of an input signal containing signal components of very high frequency, well in excess of 1 GHz (gigahertz). An input transducer array couples the input signal to a magnetostatic propagating medium, such as a film of yttrium-iron-garnet (YIG), in such a manner that the array effectively provides multiple wave sources spaced along a predetermined arc on the propagating medium, and the waves combine constructively at frequency-dependent points in a focal region of the medium, spaced apart from the input array. Output transducers located at these frequency-dependent points generate output signals indicative of various selected frequency components of the input signal.
摘要翻译： 一种用于对含有超过1GHz（千兆赫兹）的非常高频率的信号分量的输入信号进行频谱分析的静磁波（MSW）装置。 输入传感器阵列将输入信号耦合到静磁传播介质，例如钇 - 铁 - 石榴石（YIG）的膜，使得阵列有效地提供沿着传播介质上的预定电弧间隔开的多个波源， 并且波形在介质的聚焦区域中的频率相关点处构造性地结合，与输入阵列间隔开。 位于这些频率相关点处的输出换能器产生指示输入信号的各种选定频率分量的输出信号。
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公开(公告)号：US4707631A
公开(公告)日：1987-11-17
申请号：US886457
申请日：1986-07-17
CPC分类号： H03H9/1455 , H03H3/08 , H03H9/02559
摘要： A surface acoustic wave (SAW) diffraction-effect or interference-effect device with a highly isotropic substrate having a high coupling coefficient and low attenuation losses. The use of X-propagating rotated-Y-cut lithium niobate as the SAW substrate, with the Y rotation angle selected at 121 degrees, provides a practically isotropic material, with a high coupling coefficient and relatively low attenuation losses.
摘要翻译： 具有高耦合系数和低衰减损耗的高均相衬底的表面声波（SAW）衍射效应或干涉效应器件。 使用X传播的旋转Y型切割铌酸锂作为SAW基片，其中Y旋转角度选择为121度，提供实际上各向同性的材料，具有高耦合系数和相对低的衰减损耗。
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公开(公告)号：USRE45704E1
公开(公告)日：2015-09-29
申请号：US11334823
申请日：2006-01-17
申请人： Robert B. Stokes , Alvin M. Kong
发明人： Robert B. Stokes , Alvin M. Kong
CPC分类号： H01P1/10 , H01H59/0009 , H01P1/127
摘要： An RF switch useable up to millimeter wave frequencies and higher frequencies of 30 GHz and above. Four embodiments of the invention are configured as ground switches. Two of the ground switch embodiments are configured with a planar air bridge. Both of these embodiments are configured so that the bridge length is shortened between the transmission line and ground by introducing grounded stops. The other two ground switch embodiments include an elevated metal seesaw. In these embodiments, a shortened path to ground is provided with relatively low inductance by proper sizing and positioning of the seesaw structure. Lastly, broadband power switch embodiment is configured to utilize only a small portion of the air bridge to carry the signal. The relatively short path length results in a relatively low inductance and resistance lowers the RF power loss of the switch, thereby increasing the RF power handling capability of the switch.
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公开(公告)号：US06873223B2
公开(公告)日：2005-03-29
申请号：US10320926
申请日：2002-12-16
申请人： Robert B. Stokes , Alvin M. Kong
发明人： Robert B. Stokes , Alvin M. Kong
CPC分类号： H01P1/10 , H01H59/0009 , H01P1/127
摘要： An RF switch useable up to millimeter wave frequencies and higher frequencies of 30 GHz and above. Four embodiments of the invention are configured as ground switches. Two of the ground switch embodiments are configured with a planar air bridge. Both of these embodiments are configured so that the bridge length is shortened between the transmission line and ground by introducing grounded stops. The other two ground switch embodiments include an elevated metal seesaw. In these embodiments, a shortened path to ground is provided with relatively low inductance by proper sizing and positioning of the seesaw structure. Lastly, broadband power switch embodiment is configured to utilize only a small portion of the air bridge to carry the signal. The relatively short path length results in a relatively low inductance and resistance lowers the RF power loss of the switch, thereby increasing the RF power handling capability of the switch.
摘要翻译： RF开关可用于毫米波频率和30 GHz及以上的更高频率。 本发明的四个实施例被配置为接地开关。 两个接地开关实施例被配置有平面空气桥。 这两个实施例都被配置为通过引入接地止动件来在传输线和地之间桥接长度被缩短。 另外两个接地开关实施例包括升高的金属跷跷板。 在这些实施例中，通过适当的跷跷板结构的尺寸和定位，缩短到地的路径被提供相对较低的电感。 最后，宽带电力开关实施例被配置为仅利用空气桥的一小部分来承载信号。 相对短的路径长度导致相对低的电感和电阻降低了开关的RF功率损耗，从而增加了开关的RF功率处理能力。
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