公开(公告)号：US6026588A

公开(公告)日：2000-02-22

申请号：US911493

申请日：1997-08-14

申请人： Robert H. Clark ,  Anthony K. Green ,  Steven E. Sykes

发明人： Robert H. Clark ,  Anthony K. Green ,  Steven E. Sykes

IPC分类号： F26B21/14 ,  H01L21/00 ,  F26B21/06

CPC分类号： H01L21/67034 ,  F26B21/145

摘要： In a vapor drying system, solvents such as isopropyl alcohol (IPA) are boiled and condensed to provide a means of removing water and other contamination from process parts loaded into the equipment. The parts enter the apparatus via an automated lift assembly. Upon entering the vapor zone, solvent condenses on the parts and fixtures due to a temperature differential, displacing the contaminants. This condensate/contaminant waste stream gravity drains to a buffer tank below via a sloped, temperature-controlled drip tray. After vapor condensation on the parts ceases, drying is accomplished using superheated vapors formed in a stabilized zone generated by one or more offset boil sumps and separate vapor heat exchangers. Any liquid solvent remaining on the parts is flash-dried in the vapor zone, so that parts emerge clean and dry. The invention incorporates a computer-implemented PLC to control process parameters, cover mechanism, transport mechanism, safety features during operating, idle and standby conditions.

摘要翻译： 在蒸气干燥系统中，将诸如异丙醇（IPA）的溶剂煮沸并冷凝，以提供一种从加载到设备中的加工部件除去水和其它污染物的方法。 部件通过自动升降机组件进入设备。 进入蒸汽区后，由于温度差异，溶剂会在零件和固定装置上冷凝，排除污染物。 这种冷凝物/污染物废物流重力通过倾斜的温度控制的滴水盘排入下面的缓冲罐。 在部件上蒸汽冷凝停止后，使用由一个或多个偏置沸点池和分开的蒸气热交换器产生的稳定区域中形成的过热蒸汽来完成干燥。 残留在部件上的任何液体溶剂在蒸汽区域中闪蒸干燥，使得部件清洁干燥。 本发明结合了计算机实现的PLC来控制过程参数，覆盖机制，传输机制，操作期间的安全特征，空闲和待机状态。