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1.
公开(公告)号:US07845072B2
公开(公告)日:2010-12-07
申请号:US12343260
申请日:2008-12-23
申请人: Eric D. Hobbs , Benjamin N. Eldridge , Lunyu Ma , Gaetan L. Mathieu , Steven T. Murphy , Makarand S. Shinde , Alexander H. Slocum
发明人: Eric D. Hobbs , Benjamin N. Eldridge , Lunyu Ma , Gaetan L. Mathieu , Steven T. Murphy , Makarand S. Shinde , Alexander H. Slocum
IPC分类号: H05K3/30
CPC分类号: G01R31/2886 , G01R1/073 , G01R31/31905 , Y10T29/49128 , Y10T29/4913 , Y10T29/49133 , Y10T29/49147 , Y10T29/49208 , Y10T29/49222
摘要: A probe card assembly comprises multiple probe substrates attached to a mounting assembly. Each probe substrate includes a set of probes, and together, the sets of probes on each probe substrate compose an array of probes for contacting a device to be tested. Adjustment mechanisms are configured to impart forces to each probe substrate to move individually each substrate with respect to the mounting assembly. The adjustment mechanisms may translate each probe substrate in an “x,” “y,” and/or “z” direction and may further rotate each probe substrate about any one or more of the forgoing directions. The adjustment mechanisms may further change a shape of one or more of the probe substrates. The probes can thus be aligned and/or planarized with respect to contacts on the device to be tested.
摘要翻译: 探针卡组件包括附接到安装组件的多个探针基板。 每个探针衬底包括一组探针,并且每个探针衬底上的探针组合在一起组成一组探针,用于接触待测试的器件。 调整机构构造成赋予每个探针基板以相对于安装组件分别移动每个基板的力。 调节机构可以将每个探针基板转换成“x”,“y”和/或“z”方向,并且可以进一步围绕前述方向上的任何一个或多个旋转每个探针基板。 调节机构可以进一步改变一个或多个探针基板的形状。 因此,探针可以相对于要测试的装置上的触点对准和/或平坦化。
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2.
公开(公告)号:US20090158586A1
公开(公告)日:2009-06-25
申请号:US12343260
申请日:2008-12-23
申请人: Eric D. Hobbs , Benjamin N. Eldridge , Lunyu Ma , Gaetan L. Mathieu , Steven T. Murphy , Makarand S. Shinde , Alexander H. Slocum
发明人: Eric D. Hobbs , Benjamin N. Eldridge , Lunyu Ma , Gaetan L. Mathieu , Steven T. Murphy , Makarand S. Shinde , Alexander H. Slocum
IPC分类号: G01R3/00
CPC分类号: G01R31/2886 , G01R1/073 , G01R31/31905 , Y10T29/49128 , Y10T29/4913 , Y10T29/49133 , Y10T29/49147 , Y10T29/49208 , Y10T29/49222
摘要: A probe card assembly comprises multiple probe substrates attached to a mounting assembly. Each probe substrate includes a set of probes, and together, the sets of probes on each probe substrate compose an array of probes for contacting a device to be tested. Adjustment mechanisms are configured to impart forces to each probe substrate to move individually each substrate with respect to the mounting assembly. The adjustment mechanisms may translate each probe substrate in an “x,” “y,” and/or “z” direction and may further rotate each probe substrate about any one or more of the forgoing directions. The adjustment mechanisms may further change a shape of one or more of the probe substrates. The probes can thus be aligned and/or planarized with respect to contacts on the device to be tested.
摘要翻译: 探针卡组件包括附接到安装组件的多个探针基板。 每个探针衬底包括一组探针,并且每个探针衬底上的探针组合在一起组成一组探针,用于接触待测试的器件。 调整机构构造成赋予每个探针基板以相对于安装组件分别移动每个基板的力。 调节机构可以将每个探针基板转换成“x”,“y”和/或“z”方向,并且可以进一步围绕前述方向上的任何一个或多个旋转每个探针基板。 调节机构可以进一步改变一个或多个探针基板的形状。 因此,探针可以相对于要测试的装置上的触点对准和/或平坦化。
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3.
公开(公告)号:US07471094B2
公开(公告)日:2008-12-30
申请号:US11165833
申请日:2005-06-24
申请人: Eric D. Hobbs , Benjamin N. Eldridge , Lunyu Ma , Gaetan L. Mathieu , Steven T. Murphy , Makarand S. Shinde , Alexander H. Slocum
发明人: Eric D. Hobbs , Benjamin N. Eldridge , Lunyu Ma , Gaetan L. Mathieu , Steven T. Murphy , Makarand S. Shinde , Alexander H. Slocum
IPC分类号: G01R31/02
CPC分类号: G01R31/2886 , G01R1/073 , G01R31/31905 , Y10T29/49128 , Y10T29/4913 , Y10T29/49133 , Y10T29/49147 , Y10T29/49208 , Y10T29/49222
摘要: A probe card assembly comprises multiple probe substrates attached to a mounting assembly. Each probe substrate includes a set of probes, and together, the sets of probes on each probe substrate compose an array of probes for contacting a device to be tested. Adjustment mechanisms are configured to impart forces to each probe substrate to move individually each substrate with respect to the mounting assembly. The adjustment mechanisms may translate each probe substrate in an “x,” “y,” and/or “z” direction and may further rotate each probe substrate about any one or more of the forgoing directions. The adjustment mechanisms may further change a shape of one or more of the probe substrates. The probes can thus be aligned and/or planarized with respect to contacts on the device to be tested.
摘要翻译: 探针卡组件包括附接到安装组件的多个探针基板。 每个探针衬底包括一组探针,并且每个探针衬底上的探针组合在一起组成一组探针,用于接触待测试的器件。 调整机构构造成赋予每个探针基板以相对于安装组件分别移动每个基板的力。 调节机构可以将每个探针基板转换成“x”,“y”和/或“z”方向,并且可以进一步围绕前述方向上的任何一个或多个旋转每个探针基板。 调节机构可以进一步改变一个或多个探针基板的形状。 因此,探针可以相对于要测试的装置上的触点对准和/或平坦化。
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