公开(公告)号：US20120091337A1

公开(公告)日：2012-04-19

申请号：US13273458

申请日：2011-10-14

申请人： Stewart John Bean

发明人： Stewart John Bean

IPC分类号： H01J37/28

CPC分类号： H01J37/28 ,  H01J37/18 ,  H01J2237/022 ,  H01J2237/1415 ,  H01J2237/188 ,  H01J2237/2608

摘要： In a charged particle beam device, such as an electron microscope, a beam generating apparatus generates a focussed charged particle beam e—that is incident on a specimen in a specimen chamber which holds the specimen in a gaseous environment. A pressure limiting aperture provides partial gaseous isolation of the specimen chamber from the beam generating means, and is located in a lens of the latter. The device includes a conduit, such as an intermediate chamber in the lens, through which, in use, gas is supplied to set up a flow of gas from the region of the lens towards the specimen, thereby to prevent material released from the specimen from impinging on the pressure limiting aperture, to prevent contamination of the latter. The device can be used in a method of scanning a specimen with a charged particle beam, for example in a method of electron microscopy.

摘要翻译： 在诸如电子显微镜的带电粒子束装置中，光束产生装置产生聚焦的带电粒子束e，其入射在将样品保持在气体环境中的样本室中的样本上。 压力限制孔提供样品室与光束产生装置的部分气体隔离，并且位于后者的透镜中。 该装置包括导管，例如透镜中的中间室，在使用中通过该导管供应气体，以将透镜的区域中的气体流从样品中提取，从而防止材料从样品中释放出来 撞击压力限制孔，以防止后者的污染。 该装置可以用于以带电粒子束扫描样品的方法，例如以电子显微镜的方法。

公开(公告)号：US08859992B2

公开(公告)日：2014-10-14

申请号：US13273458

申请日：2011-10-14

申请人： Stewart John Bean

发明人： Stewart John Bean

IPC分类号： H01J37/18 ,  H01J37/28

CPC分类号： H01J37/28 ,  H01J37/18 ,  H01J2237/022 ,  H01J2237/1415 ,  H01J2237/188 ,  H01J2237/2608

摘要： In a charged particle beam device, such as an electron microscope, a beam generating apparatus generates a focussed charged particle beam e− that is incident on a specimen in a specimen chamber which holds the specimen in a gaseous environment. A pressure limiting aperture provides partial gaseous isolation of the specimen chamber from the beam generating means, and is located in a lens of the latter. The device includes a conduit, such as an intermediate chamber in the lens, through which, in use, gas is supplied to set up a flow of gas from the region of the lens towards the specimen, thereby to prevent material released from the specimen from impinging on the pressure limiting aperture, to prevent contamination of the latter. The device can be used in a method of scanning a specimen with a charged particle beam, for example in a method of electron microscopy.

摘要翻译： 在诸如电子显微镜的带电粒子束装置中，光束产生装置产生聚焦的带电粒子束e，其入射在将样品保持在气体环境中的样本室中的样本上。 压力限制孔提供样品室与光束产生装置的部分气体隔离，并且位于后者的透镜中。 该装置包括导管，例如透镜中的中间室，在使用中通过该导管供应气体，以将透镜的区域中的气体流从样品中提取，从而防止材料从样品中释放出来 撞击压力限制孔，以防止后者的污染。 该装置可以用于以带电粒子束扫描样品的方法，例如以电子显微镜的方法。