公开(公告)号：US20170263414A1

公开(公告)日：2017-09-14

申请号：US15174323

申请日：2016-06-06

申请人： Taiwan Electron Microscope Instrument Corporation

发明人： FU-RONG CHEN ,  Tsu-Wei HUANG ,  Shih-Yi LIU ,  I-Jiun CHEN ,  CHIH WEI CHEN ,  Ying-Shuo TSENG ,  Yu-Shan HUANG ,  Hsin-Yu LIN ,  Jian-Min FANG ,  Chin-Liang HSU ,  LI-CHIAO YANG

IPC分类号： H01J37/26 ,  H01J37/16 ,  H01J37/20

CPC分类号： H01J37/26 ,  H01J37/16 ,  H01J37/18 ,  H01J37/20 ,  H01J2237/162 ,  H01J2237/166 ,  H01J2237/188 ,  H01J2237/2001 ,  H01J2237/2003 ,  H01J2237/2004 ,  H01J2237/202

摘要： An electron microscope includes a charged particle beam generator, a detector, a film and a bearing unit. The charged particle beam generator generates a first charged particle beam to bomb an object. The detector detects a second charged particle from the object to form an image. The film disposes on downstream of charged particle beam generator and has a first surface and a second surface. A space between charged particle beam generator and the first surface of film is a vacuum environment. The bearing unit disposes at a side of second surface of film and has a bearing surface and a back surface. The object disposes on the bearing surface of the bearing unit and a distance between an analyzed surface of the object and the film is less than a predetermined spacing. A liquid space exists between the analyzed surface and the film to be filled a liquid.

公开(公告)号：US09704688B2

公开(公告)日：2017-07-11

申请号：US15024773

申请日：2014-09-25

申请人： Oxford Instruments Nanotechnology Tools Limited

发明人： Peter Statham

IPC分类号： H01J37/00 ,  H01J37/244 ,  H01J37/28

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/188 ,  H01J2237/24415 ,  H01J2237/2445 ,  H01J2237/2608

摘要： An x-ray analysis apparatus comprises an electron beam assembly for generating a focused electron beam within a first gas pressure environment. A sample assembly is used for retaining a sample within a second gas pressure environment such that the sample receives the electron beam from the electron beam assembly and such that the gas pressure in the second gas pressure environment is greater than the gas pressure within the first gas pressure environment. An x-ray detector is positioned so as to have at least one x-ray sensor element within the first gas pressure environment. The sensor element is mounted to a part of the electron beam assembly which is proximal to the sample assembly and further arranged in use to receive x-rays generated by the interaction between the electron beam and the sample.

公开(公告)号：US09653261B2

公开(公告)日：2017-05-16

申请号：US14400569

申请日：2013-05-14

申请人： MAPPER LITHOGRAPHY IP B.V.

发明人： Alexander Hendrik Vincent Van Veen ,  Willem Henk Urbanus

IPC分类号： G03B27/52 ,  H01J37/317 ,  H01J37/09 ,  H01J37/30 ,  B82Y10/00 ,  B82Y40/00

CPC分类号： H01J37/09 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/147 ,  H01J37/3007 ,  H01J37/302 ,  H01J37/3174 ,  H01J37/3177 ,  H01J2237/002 ,  H01J2237/026 ,  H01J2237/0262 ,  H01J2237/0264 ,  H01J2237/16 ,  H01J2237/182 ,  H01J2237/188

摘要： The invention relates to a charged particle lithography system for exposing a target. The system includes a charged particle beam generator for generating a charged particle beam; an aperture array (6) for forming a plurality of beamlets from the charged particle beam; and a beamlet projector (12) for projecting the beamlets onto a surface of the target. The charged particle beam generator includes a charged particle source (3) for generating a diverging charged particle beam; a collimator system (5a,5b,5c,5d; 72;300) for refracting the diverging charged particle beam; and a cooling arrangement (203) for removing heat from the collimator system, the cooling arrangement comprising a body surrounding at least a portion of the collimator system.

公开(公告)号：US09640364B2

公开(公告)日：2017-05-02

申请号：US14969352

申请日：2015-12-15

申请人： Carl Zeiss Microscopy, LLC

发明人： John A. Notte, IV ,  FHM-Faridur Rahman ,  Weijie Huang ,  Shawn McVey

IPC分类号： H01J37/08 ,  H01J37/18 ,  H01J27/26

CPC分类号： H01J37/18 ,  G21K5/04 ,  H01J27/26 ,  H01J37/08 ,  H01J2237/002 ,  H01J2237/0216 ,  H01J2237/032 ,  H01J2237/0653 ,  H01J2237/0807 ,  H01J2237/1501 ,  H01J2237/1502 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20221 ,  H01J2237/20235

摘要： The present disclosure relates to a gas field ion source comprising a housing, an electrically conductive tip arranged within the housing, a gas supply for supplying one or more gases to the housing, wherein the one or more gases comprise neon or a noble gas with atoms having a mass larger than neon, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole. A surface of the extractor electrode facing the tip can be made of a material having a negative secondary ion sputter rate of less than 10−5 per incident neon ion.

公开(公告)号：US09564288B2

公开(公告)日：2017-02-07

申请号：US14438691

申请日：2013-10-29

申请人： Hitachi High-Technologies Corporation

发明人： Yusuke Ominami ,  Shinsuke Kawanishi ,  Hiroyuki Suzuki

IPC分类号： H01J37/16 ,  H01J37/20 ,  H01J37/28

CPC分类号： H01J37/16 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2006 ,  H01J2237/20221 ,  H01J2237/20235 ,  H01J2237/28

摘要： A sample storage container of the present invention includes: a storage container (100) that stores a sample (6) under an atmosphere different from an atmosphere of an outside; a diaphragm (10) through which a charged particle beam passes through or transmits; a sample stage (103) that is arranged inside the storage container (100) and that is capable of moving a relative position of the sample (6) to the diaphragm (10) in a horizontal direction and in a vertical direction under an atmospheric state where the atmospheric states inside the storage container and outside the storage container are different each other; and an operating section (104) that moves the sample stage (103) from an outside of the storage container (100), wherein the sample storage container is set in a state where the sample (6) is stored in a vacuum chamber of a charged particle beam apparatus.

摘要翻译： 本发明的样品储存容器包括：储存容器（100），其在不同于外部气氛的气氛下存储样品（6）; 带电粒子束穿过或透过的隔膜（10）; 布置在储存容器（100）的内部并且能够在大气压下沿水平方向和垂直方向将样品（6）的相对位置移动到隔膜（10）的样品台（103） 存储容器内部和储存容器外的大气状态彼此不同; 以及从所述存储容器（100）的外部移动所述样品台（103）的操作部（104），其中，所述样本收纳容器被设定为将样品（6）储存在所述储存容器 带电粒子束装置。

公开(公告)号：US09536699B2

公开(公告)日：2017-01-03

申请号：US14314317

申请日：2014-06-25

申请人： Carl Zeiss Microscopy, LLC

发明人： John A. Notte, IV ,  Weijie Huang ,  Raymond Hill ,  FHM-Faridur Rahman ,  Alexander Groholski ,  Shawn McVey

IPC分类号： H01J37/00 ,  H01J37/08 ,  G21K5/04 ,  H01J27/26 ,  H01J37/18

CPC分类号： H01J37/18 ,  G21K5/04 ,  H01J27/26 ,  H01J37/08 ,  H01J2237/002 ,  H01J2237/0216 ,  H01J2237/032 ,  H01J2237/0653 ,  H01J2237/0807 ,  H01J2237/1501 ,  H01J2237/1502 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20221 ,  H01J2237/20235

摘要： The present disclosure relates to a gas field ion source having a gun housing, an electrically conductive gun can base attached to the gun housing, an inner tube mounted to the gun can base, the inner tube being made of an electrically isolating ceramic, an electrically conductive tip attached to the inner tube, an outer tube mounted to the gun can base, the outer tube being made of an electrically isolating ceramic, and an extractor electrode attached to the outer tube. The extractor electrode can have an opening for the passage of ions generated in proximity to the electrically conductive tip.

摘要翻译： 本发明涉及一种具有枪壳体的气体离子源，连接到枪壳体的导电枪壳底座，安装在枪壳底座上的内管，内管由电隔离陶瓷制成， 连接到内管的导电尖端，安装到枪罐底座的外管，外管由电绝缘陶瓷制成，以及附接到外管的提取器电极。 提取器电极可以具有用于通过在导电末端附近产生的离子的开口。

公开(公告)号：US20160299103A1

公开(公告)日：2016-10-13

申请号：US15026953

申请日：2014-10-02

申请人： PHOTON DYNAMICS INC.

发明人： Nedal Saleh ,  Daniel Toet ,  Enrique Sterling ,  Ronen Loewinger ,  Sriram Krishnaswami ,  Arie Glazer

IPC分类号： G01N27/70 ,  H01J37/32

CPC分类号： G01N27/70 ,  G01R31/305 ,  H01J33/00 ,  H01J37/3233 ,  H01J37/32449 ,  H01J37/32825 ,  H01J2237/063 ,  H01J2237/164 ,  H01J2237/188 ,  H01J2237/317 ,  H05H2240/10 ,  H05H2245/123

摘要： An electron-beam induced plasmas is utilized to establish a non-mechanical, electrical contact to a device of interest. This plasma source may be referred to as atmospheric plasma source and may be configured to provide a plasma column of very fine diameter and controllable characteristics. The plasma column traverses the atmospheric space between the plasma source into the atmosphere and the device of interest and acts as an electrical path to the device of interest in such a way that a characteristic electrical signal can be collected from the device. Additionally, by controlling the gases flowing into the plasma column the probe may be used for surface modification, etching and deposition.

摘要翻译： 利用电子束诱导的等离子体来建立与感兴趣的器件的非机械的电接触。 该等离子体源可以被称为大气等离子体源，并且可以被配置为提供非常细的直径和可控特性的等离子体柱。 等离子体柱穿过等离子体源之间的大气空间到大气中和感兴趣的器件，并且作为到目的器件的电通路，使得可以从器件收集特征电信号。 此外，通过控制流入等离子体柱的气体，探针可用于表面改性，蚀刻和沉积。

公开(公告)号：US09431213B2

公开(公告)日：2016-08-30

申请号：US14615013

申请日：2015-02-05

申请人： B-NANO LTD.

发明人： Dov Shachal ,  Rafi De Picciotto

IPC分类号： H01J37/28 ,  H01J37/20 ,  H01J37/244 ,  H01J37/18

CPC分类号： H01J37/28 ,  H01J37/18 ,  H01J37/20 ,  H01J37/244 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/184 ,  H01J2237/188 ,  H01J2237/2002 ,  H01J2237/24495 ,  H01J2237/2605

摘要： An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: generating an electron beam in the vacuum environment; scanning a region of the object with the electron beam while the object is located below an object holder; wherein the scanning comprises allowing the electron beam to pass through an aperture of an aperture array, pass through an ultra thin membrane that seals the aperture, and pass through the object holder; wherein the ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the electron beam and the object.

公开(公告)号：US09218991B2

公开(公告)日：2015-12-22

申请号：US14170293

申请日：2014-01-31

申请人： International Rectifier Corporation

发明人： Michael A. Briere

IPC分类号： A61N5/00 ,  H01L21/67 ,  C30B29/40 ,  C30B33/04 ,  H01L21/02 ,  H01J37/317 ,  H01L21/265 ,  H01L21/324 ,  C30B31/20 ,  H01L29/20

CPC分类号： H01L21/67011 ,  C30B29/403 ,  C30B31/20 ,  C30B33/04 ,  H01J37/3171 ,  H01J2237/043 ,  H01J2237/188 ,  H01J2237/304 ,  H01J2237/31711 ,  H01J2237/31713 ,  H01L21/02381 ,  H01L21/0254 ,  H01L21/02573 ,  H01L21/26546 ,  H01L21/3245 ,  H01L29/2003

摘要： There are disclosed herein various implementations of a method and system for ion implantation at high temperature surface equilibrium conditions. The method may include situating a III-Nitride semiconductor body in a surface equilibrium chamber, establishing a gas pressure greater than or approximately equal to a surface equilibrium pressure of the III-Nitride semiconductor body, and heating the III-Nitride semiconductor body to an elevated implantation temperature in the surface equilibrium chamber while substantially maintaining the gas pressure. The method also includes implanting the III-Nitride semiconductor body in the surface equilibrium at the elevated implantation temperature chamber while substantially maintaining the gas pressure, the implanting being performed using an ion implanter interfacing with the surface equilibrium chamber.

摘要翻译： 在此公开了在高温表面平衡条件下用于离子注入的方法和系统的各种实施方式。 该方法可以包括将III-氮化物半导体体置于表面平衡室中，建立大于或等于III-氮化物半导体体的表面平衡压力的气体压力，并将III-氮化物半导体体加热到升高的 注入温度在表面平衡室中，同时基本保持气体压力。 该方法还包括将III-氮化物半导体体植入升高的植入温度室的表面平衡状态，同时基本上保持气体压力，使用与表面平衡室接合的离子注入机执行注入。

公开(公告)号：US09218934B2

公开(公告)日：2015-12-22

申请号：US14314262

申请日：2014-06-25

申请人： Carl Zeiss Microscopy, LLC

发明人： John A. Notte, IV ,  Weijie Huang ,  FHM-Faridur Rahman ,  Shawn McVey

IPC分类号： H01J27/26 ,  H01J37/08 ,  H01J37/18 ,  G21K5/04

CPC分类号： H01J37/18 ,  G21K5/04 ,  H01J27/26 ,  H01J37/08 ,  H01J2237/002 ,  H01J2237/0216 ,  H01J2237/032 ,  H01J2237/0653 ,  H01J2237/0807 ,  H01J2237/1501 ,  H01J2237/1502 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20221 ,  H01J2237/20235

摘要： The disclosure relates to a method of operating a gas field ion beam system in which the gas field ion beam system comprises an external housing, an internal housing, arranged within the external housing, an electrically conductive tip arranged within the internal housing, a gas supply for supplying one or more gases to the internal housing, the gas supply having a tube terminating within the internal housing, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole into the external housing. The method comprises the step of regularly heating the external housing, the internal housing, the electrically conductive tip, the tube and the extractor electrode to a temperature of above 100° C.

摘要翻译： 本公开涉及一种操作气体场离子束系统的方法，其中气体场离子束系统包括外部壳体，布置在外部壳体内的内部壳体，布置在内部壳体内的导电尖端，气体源 用于将一个或多个气体供应到内部壳体，气体供应具有终止在内部壳体内的管，以及具有孔的提取器电极，其具有允许在尖端附近产生的离子通过孔进入外部壳体。 该方法包括将外部壳体，内部壳体，导电尖端，管子和提取器电极定期加热至高于100℃的温度。