公开(公告)号：US20120081140A1

公开(公告)日：2012-04-05

申请号：US13322416

申请日：2010-04-22

申请人： Yun Hee Shim ,  Sung Hee Yoon ,  Seung Ho Yoo ,  Byung Chang Song ,  In Buhm Chung ,  Dong Il Kim

发明人： Yun Hee Shim ,  Sung Hee Yoon ,  Seung Ho Yoo ,  Byung Chang Song ,  In Buhm Chung ,  Dong Il Kim

IPC分类号： G01R1/067

CPC分类号： G01R31/2889 ,  G01R1/06727 ,  G01R1/07342

摘要： Provided is a probe card which has a space transformer which may be effectively changed to correspond to a change in wafer chip structure and is capable of maximizing acceptable channels of the space transformer. The probe card for testing a semiconductor chip on a wafer includes: a space transformer body in which a plurality of unit probe modules are arranged at intervals; a main circuit board to which an electrical signal is applied from an external test device; a reinforcement plate for supporting the main circuit board such that the unit probe modules become stable against an external effect; a standing conductive medium which is inserted into a penetration portion provided in the space transformer body; a lower surface circuit board in which the standing conductive medium is electrically connected to the unit probe module as a flexible conductive medium and the standing conductive media are mounted; and a mutual connection member for electrically connecting the lower surface circuit board to the main circuit board.

摘要翻译： 提供了一种具有可以有效地改变以对应于晶片芯片结构的变化并且能够使空间变压器的可接受的通道最大化的空间变压器的探针卡。 用于测试晶片上的半导体芯片的探针卡包括：空间变换器主体，多个单元探针模块间隔排列; 主电路板，从外部测试装置向其施加电信号; 用于支撑主电路板的加强板，使得单元探针模块抵抗外部效应变得稳定; 插入到设置在所述空间变换器主体中的贯通部的立体导电介质; 其中，所述立体导电介质与所述单元探针模块电连接为柔性导电介质并且所述直立导电介质安装在其中; 以及用于将下表面电路板电连接到主电路板的相互连接构件。