公开(公告)号：US4867223A

公开(公告)日：1989-09-19

申请号：US267588

申请日：1988-11-07

申请人： Syuusuke Matsumura ,  Hajime Kojima ,  Takahiro Miyano

发明人： Syuusuke Matsumura ,  Hajime Kojima ,  Takahiro Miyano

IPC分类号： B26B19/38 ,  C23C16/01 ,  C23C16/04

CPC分类号： C23C16/01 ,  B26B19/384 ,  C23C16/047

摘要： A method and apparatus for forming a metallic sheet having a concave-convex profile by chemical vapor deposition utilizes a die having a profiled surface defined by a number of spaced protrusions. The method comprises covering at least a portion of the profiled surface with a mask of transparent material in such a way that the mask comes into a closely adjacent relation to the top faces of the protrusions, feeding at a reaction gas of a metallic compound to a restricted space defined between the mask and the profiled surface, radiating a light beam through the transparent mask onto the profiled surface in order to decompose the reaction gas and deposit on the profiled surface a metallic layer, and removing the resulting deposited metallic layer from the profiled surface to obtain a metallic sheet having a concave-convex profile corresponding to the profiled surface of the die. The apparatus comprises a reaction chamber within which the die and the mask are mounted for making the metallic sheet by chemical vapor deposition and includes a take-up roll driven to rotate to peel the metallic sheet off the die and wind the same thereon.

摘要翻译： 用于通过化学气相沉积形成具有凹凸轮廓的金属片的方法和装置利用具有由多个间隔开的突起限定的成型表面的模具。 该方法包括用透明材料的掩模覆盖成型表面的至少一部分，使得掩模与突起的顶面紧密相邻，将金属化合物的反应气体进料到 限定在掩模和异形表面之间的限制空间，将光束通过透明掩模辐射到成型表面上，以分解反应气体并在异型表面上沉积金属层，并将所形成的沉积金属层从型材 以获得具有对应于模具的成型表面的凹凸轮廓的金属片。 该装置包括反应室，模具和掩模安装在该反应室中，用于通过化学气相沉积制造金属片，并且包括驱动旋转以将金属片从模具剥离并卷绕在其上的卷取辊。