公开(公告)号：US06651865B2

公开(公告)日：2003-11-25

申请号：US10187955

申请日：2002-07-03

申请人： Story Huang ,  Szu-Hui Lee ,  Yvonne Chang ,  Hung-I Lin ,  Jia-Bin Hsu ,  Chun-Hsien Liu

发明人： Story Huang ,  Szu-Hui Lee ,  Yvonne Chang ,  Hung-I Lin ,  Jia-Bin Hsu ,  Chun-Hsien Liu

IPC分类号： B23Q1522

CPC分类号： H01L21/6838 ,  H01L21/68

摘要： A position-, speed- and force-controllable chip accessing apparatus comprises a fixing seat, a rotational direction moving device, a linear direction moving device, and a position sensing device, characterized in that a flexible positioning means is provided at a proper central site of said fixing seat and is screw fixed with said rotational direction moving device; one side of said rotational direction moving device is coupled with said linear direction moving device, while the other side of said rotational direction moving device is coupled with said position sensing device screw; and that by measuring with a speed sensor and a position sensing device on said linear direction moving device, the control of the force, speed and moving distance can be achieved.

摘要翻译： 位置，速度和力量可控的芯片存取装置包括固定座，旋转方向移动装置，线性方向移动装置和位置感测装置，其特征在于，柔性定位装置设置在适当的中心部位 并且与所述旋转方向移动装置螺钉固定; 所述旋转方向移动装置的一侧与所述线性方向移动装置连接，而所述旋转方向移动装置的另一侧与所述位置感测装置螺钉联接; 并且通过利用所述线性方向移动装置上的速度传感器和位置检测装置进行测量，可以实现力，速度和移动距离的控制。