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公开(公告)号:US11588456B2
公开(公告)日:2023-02-21
申请号:US16882591
申请日:2020-05-25
Inventor: Max G. Lagally , Matthew McLean Dwyer , Daniel Warren van der Weide , Abhishek Bhat , Francesca Cavallo , Divya Jyoti Prakash
Abstract: Traveling-wave tube amplifiers and methods for making slow-wave structures for the amplifiers are provided. The SWSs include helical conductors that are self-assembled via the release of stressed electrically conductive strips from a sacrificial material. The helical conductors can be electroplated post-self-assembly to fortify the helix, reduce losses, and tailor the dimensions and operating parameters of the helix.
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公开(公告)号:US10930490B1
公开(公告)日:2021-02-23
申请号:US16727201
申请日:2019-12-26
Inventor: Max G. Lagally , Francesca Cavallo , Vijay Saradhi Mangu
IPC: H01L21/02 , H01L21/308 , B82Y20/00 , H01L21/027 , H01L21/3065 , H01L21/8258 , H01L29/16 , H01L27/088 , G02B5/30 , B82Y40/00
Abstract: Methods for fabricating thin, high-aspect-ratio Ge nanostructures from high-quality, single-crystalline Ge substrates are provided. Also provided are grating structures made using the methods. The methods utilize a thin layer of graphene between a surface of a Ge substrate, and an overlying resist layer. The graphene passivates the surface, preventing the formation of water-soluble native Ge oxides that can result in the lift-off of the resist during the development of the resist.
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公开(公告)号:US12091746B2
公开(公告)日:2024-09-17
申请号:US17507034
申请日:2021-10-21
Inventor: Max G. Lagally , Matthew McLean Dwyer , Francesca Cavallo , Daniel Warren van der Weide , Abhishek Bhat
CPC classification number: C23C16/06 , C23C16/04 , H01J9/14 , H01J23/165 , H01J25/44 , H03F3/58 , H01J2209/012
Abstract: Traveling-wave tube amplifiers for high-frequency signals, including terahertz signals, and methods for making a slow-wave structure for the traveling-wave tube amplifiers are provided. The slow-wave structures include helical conductors that are self-assembled via the release and relaxation of strained films from a sacrificial growth substrate.
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公开(公告)号:US20210367573A1
公开(公告)日:2021-11-25
申请号:US16882591
申请日:2020-05-25
Inventor: Max G. Lagally , Matthew McLean Dwyer , Daniel Warren van der Weide , Abhishek Bhat , Francesca Cavallo , Divya Jyoti Prakash
Abstract: Traveling-wave tube amplifiers and methods for making slow-wave structures for the amplifiers are provided. The SWSs include helical conductors that are self-assembled via the release of stressed electrically conductive strips from a sacrificial material. The helical conductors can be electroplated post-self-assembly to fortify the helix, reduce losses, and tailor the dimensions and operating parameters of the helix.
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公开(公告)号:US10130916B1
公开(公告)日:2018-11-20
申请号:US15273445
申请日:2016-09-22
Inventor: Susan Rempe , C. Jeffrey Brinker , David Michael Rogers , Ying-Bing Jiang , Shaorong Yang
Abstract: The present disclosure is directed to biomimetic membranes and methods of manufacturing such membranes that include structural features that mimic the structures of cellular membrane channels and produce membrane designs capable of high selectivity and high permeability or absorptivity. The membrane structure, material and chemistry can be selected to perform liquid separations, gas separation and capture, ion transport and adsorption for a variety of applications.
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公开(公告)号:US20210202240A1
公开(公告)日:2021-07-01
申请号:US17134783
申请日:2020-12-28
Inventor: Max G. Lagally , Francesca Cavallo , Vijay Saradhi Mangu
IPC: H01L21/02 , H01L29/16 , H01L27/088 , H01L21/8258 , G02B5/30 , H01L21/3065 , H01L21/027
Abstract: Methods for fabricating thin, high-aspect-ratio Ge nanostructures from high-quality, single-crystalline Ge substrates are provided. Also provided are grating structures made using the methods. The methods utilize a thin layer of graphene between a surface of a Ge substrate, and an overlying resist layer. The graphene passivates the surface, preventing the formation of water-soluble native Ge oxides that can result in the lift-off of the resist during the development of the resist.
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