Purification method of high-purity n-tetrasilane

    公开(公告)号:US11649168B2

    公开(公告)日:2023-05-16

    申请号:US16870539

    申请日:2020-05-08

    IPC分类号: C01B33/04

    CPC分类号: C01B33/046

    摘要: A high-purity n-tetrasilane purification method includes: introducing a tetrasilane (Si4H10) isomeric mixture into a solidifying purification tank, cooling the tetrasilane (Si4H10) to a predetermined temperature with refrigerant in the solidifying purification tank, maintaining the predetermined temperature between the freezing temperature of the n-tetrasilane (n-Si4H10) and of the i-tetrasilane (i-Si4H10), solidifying the n-tetrasilane (n-Si4H10) in the tetrasilane (Si4H10) isomeric mixture into solid state, and vacuuming the i-tetrasilane (i-Si4H10) from the mixture for separation.

    Purification method of high-purity n-Tetrasilane

    公开(公告)号:US20210347644A1

    公开(公告)日:2021-11-11

    申请号:US16870539

    申请日:2020-05-08

    IPC分类号: C01B33/04

    摘要: A high-purity n-tetrasilane purification method includes: introducing a tetrasilane (Si4H10) isomeric mixture into a solidifying purification tank, cooling the tetrasilane (Si4H10) to a predetermined temperature with refrigerant in the solidifying purification tank, maintaining the predetermined temperature between the freezing temperature of the n-tetrasilane (n-Si4H10) and of the i-tetrasilane (i-Si4H10), solidifying the n-tetrasilane (n-Si4H10) in the tetrasilane (Si4H10) isomeric mixture into solid state, and vacuuming the i-tetrasilane (i-Si4H10) from the mixture for separation.

    High efficiency synthesis and purification recycling system of higher silane

    公开(公告)号:US10647582B1

    公开(公告)日:2020-05-12

    申请号:US16567559

    申请日:2019-09-11

    摘要: The high-efficiency synthesis and purification recycling system of higher silane has a liquid nitrogen cooling system. The liquid nitrogen cooling system has a liquid nitrogen storage tank for being configured to distribute −196° C. liquid nitrogen via a first cooling tube to the hydrogen column and the mono-silane column for a first cooling process; a second cooling tube is configured to distribute −160° C. nitrogen after the first cooling process into the first distillation column, the second distillation column, the third distillation column and the recycling drum for a second cooling process, a third cooling tube is configured to distribute −30° C. nitrogen after the second cooling process into the disilane drum for a third cooling process, and a fourth cooling tube is configured to distribute 25° C. nitrogen after the third cooling process into the silicon particle disposal system for a blowback regeneration process and to generate an anaerobic environment.