公开(公告)号：US5443346A

公开(公告)日：1995-08-22

申请号：US85109

申请日：1993-07-02

申请人： Masanao Murata ,  Teppei Yamashita ,  Tsuyoshi Tanaka ,  Takahide Hoshiko ,  Mitsuji Karita ,  Hitoshi Kawano ,  Tutomu Shinya

发明人： Masanao Murata ,  Teppei Yamashita ,  Tsuyoshi Tanaka ,  Takahide Hoshiko ,  Mitsuji Karita ,  Hitoshi Kawano ,  Tutomu Shinya

IPC分类号： B65G1/00 ,  B65G49/07 ,  H01L21/677

CPC分类号： H01L21/67727 ,  H01L21/67736 ,  Y10S414/137 ,  Y10S414/14

摘要： Disclosed is a wafer conveying system for a clean room which is high in wafer conveying efficiency, and makes it possible to achieve a variety of processing operations with high efficiency. The wafer conveying system in a clean room comprises: an interface equipment cooperating with a conveying system to transfer wafers therebetween which is adapted to convey articles between manufacturing lines; a conveying path extended from the interface equipment; on intra-bay wafer conveying equipment which is moved along the conveying path; and a single or plural wafer processing equipments arranged along the conveying path, thus forming one processing line, the conveying system operating to convey cassettes containing wafers, the interface equipment operating to take a specified number of wafers out of a single or plural cassettes which are delivered to the interface equipment, and place the wafers in an auxiliary cassette provided for the one processing line only, and the intra-bay wafer conveying equipment operating to receive the auxiliary cassette, and move to a specified one of the wafer processing equipments, and to give the wafers to the specified wafer processing equipment and receive wafers therefrom.

摘要翻译： 公开了一种晶片输送效率高的洁净室用晶片输送系统，能够以高效率实现各种加工作业。 洁净室中的晶片输送系统包括：与输送系统配合以在其间转移晶片的界面设备，其适于在制造线之间输送物品; 从接口设备延伸的输送路径; 在沿着输送路径移动的台架间输送设备上; 以及沿输送路径布置的单个或多个晶片处理设备，从而形成一条处理线，该输送系统用于输送含有晶片的盒，该操作用于从单个或多个盒中取出指定数量的晶片的接口设备 传送到接口设备，并且将晶片放置在仅用于一个处理线的辅助盒中，以及操作以接收辅助盒的间隔间晶片输送设备，并移动到指定的一个晶片处理设备，以及 将晶片提供给指定的晶片处理设备并从其接收晶片。