公开(公告)号：US06810189B2

公开(公告)日：2004-10-26

申请号：US10120185

申请日：2002-04-11

申请人： Tatemi Ido ,  Takamitsu Nagara ,  Tadahiro Kimura ,  Tooru Takahashi

发明人： Tatemi Ido ,  Takamitsu Nagara ,  Tadahiro Kimura ,  Tooru Takahashi

IPC分类号： G02B610

CPC分类号： G02B6/1221 ,  G02B6/12004 ,  G02B6/42

摘要： A polymeric optical waveguide substrate includes a first region provided thereon with a polymer optical waveguide and an optical waveguide-free second region, the first and second regions being on the same substrate, wherein an adhesive layer is between the lowermost polymer layer constituting the optical waveguide in the first region and the substrate, and wherein a groove intrudes into the substrate at the boundary between the first and second regions. A method for preparing the waveguide substrate includes the steps of applying an adhesive layer onto the first region while the second region is free of any adhesive layer; applying a polymer onto the whole surface of the substrate to give a polymer layer for forming an optical waveguide following the formation of the adhesive layer; cutting the polymer layer at the boundary between the first and second regions; and peeling off or removing the polymer on the second region.

摘要翻译： 聚合物光波导基板包括设置有聚合物光波导的第一区域和无光波导的第二区域，第一和第二区域在同一基板上，其中粘合剂层位于构成光波导的最下面的聚合物层之间 在第一区域和衬底中，并且其中沟槽在第一和第二区域之间的边界处侵入衬底。 一种制备波导基片的方法包括以下步骤：在第二区域不含任何粘合剂层的同时将粘合剂层施加到第一区域上; 在聚合物的整个表面上施加聚合物，得到在形成粘合剂层之后形成光波导的聚合物层; 在第一和第二区域之间的边界切割聚合物层; 并剥离或除去第二区域上的聚合物。

公开(公告)号：US06671438B2

公开(公告)日：2003-12-30

申请号：US09814686

申请日：2001-03-15

申请人： Tatemi Ido ,  Takamitsu Nagara

发明人： Tatemi Ido ,  Takamitsu Nagara

IPC分类号： G02B630

CPC分类号： G02B6/125 ,  G02B6/138 ,  G02B6/30 ,  G02B6/4246

摘要： It is a problem of disclosed technology to provide a polymer optical waveguide substrate having a V-groove for fiber alignment providing optical coupling with an optical fiber with low loss. According to a resolution means therefor, there is provided an optical waveguide member characterized in that an optical waveguide is formed at a portion over a silicon substrate, a core or a clad of the optical waveguide comprises a polymer resin, a groove in a shape of V for positioning and fixing an optical fiber to the optical waveguide is provided to the silicon substrate and a groove in a rectangular shape extended in a direction orthogonal to the groove in the shape of V at a boundary of the V-groove and the optical waveguide, is provided to the silicon substrate, a film thickness of the core or the clad constituting the optical waveguide becomes thinner at a vicinity of the boundary than a film thickness of other portion and the shape of the groove having the shape of V is set such that when the optical fiber is mounted to the V-groove in the shape of V, a height of a center of a core of the optical fiber becomes lower than a height of the core of the optical waveguide at a position sufficiently remote from the boundary and highly efficient optical coupling is achieved between the optical fiber and the optical waveguide.

摘要翻译： 提供具有用于光纤对准的V沟槽的聚合物光波导基板的问题是提供具有低损耗的光纤的光耦合。根据分辨率装置，提供了一种光波导元件，其特征在于， 在硅衬底上的一部分上形成光波导，光波导的芯或包层包括聚合物树脂，将用于将光纤定位和固定到光波导的V形状的槽设置到硅 基板和在V槽和光波导的边界处沿V形正交的方向延伸的矩形的槽被设置在硅基板上，芯或包层的膜厚 构成光波导在边界附近比其他部分的膜厚变薄，并且将具有V形状的槽的形状设定为使得当 光纤以V形的方式安装到V形槽，光纤芯的中心的高度比在距离边界足够远的位置处的光波导的芯的高度变得低 在光纤和光波导之间实现高效的光耦合。

公开(公告)号：US06356692B1

公开(公告)日：2002-03-12

申请号：US09391249

申请日：1999-09-07

申请人： Tatemi Ido ,  Takamitsu Nagara ,  Hirokazu Ichikawa ,  Akira Kuwahara ,  Taira Kinoshita

发明人： Tatemi Ido ,  Takamitsu Nagara ,  Hirokazu Ichikawa ,  Akira Kuwahara ,  Taira Kinoshita

IPC分类号： H04J1402

CPC分类号： G02B6/12019 ,  G02B6/12007 ,  G02B6/1221 ,  G02B6/42 ,  H04J14/02 ,  H04J14/0212

摘要： A method is supported for aligning the height of a polymer waveguide to the height of a core layer of a semiconductor element in an optical module composed so as to mount the semiconductor element on its polymer waveguide substrate. In order to achieve the method, at first a waveguide is formed on the silicon substrate coated with an oxide film using a polymer whose refractive index is larger than that of the oxide film. The waveguide consists of a lower cladding layer, a core layer, and an upper cladding layer. The lower cladding layer is formed to be thinner than the conventional one and the height of the core layer is set to 5 to 10 &mgr;m. In this way, it is possible to fabricate an optical module in less process steps and at a lower cost than the conventional one.

摘要翻译： 支持将聚合物波导的高度与光学模块中的半导体元件的芯层的高度对准以便将半导体元件安装在其聚合物波导基板上的方法。 为了实现该方法，首先，使用折射率大于氧化物膜的聚合物在涂覆有氧化膜的硅基板上形成波导。 波导由下包层，芯层和上包层组成。 形成下包层比现有的较薄的包层，芯层的高度设定为5〜10μm。 以这种方式，可以以比传统方法更少的工艺步骤和较低的成本制造光学模块。