公开(公告)号：US07361962B2

公开(公告)日：2008-04-22

申请号：US11313238

申请日：2005-12-20

申请人： Ted Plowman ,  Dana DeReus ,  Randy Richards ,  Arthur S. Morris

发明人： Ted Plowman ,  Dana DeReus ,  Randy Richards ,  Arthur S. Morris

IPC分类号： H01G5/01

CPC分类号： H01G5/16 ,  H01G5/04 ,  H01G5/08 ,  H01G5/10 ,  H01G5/18 ,  H01G5/38 ,  H01P1/127

摘要： Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, system and related methods are provided. According to one embodiment, a MEMS variable capacitor is provided. The variable capacitor can include first and second actuation electrodes being spaced apart, and at least one of the actuation electrodes being movable when a voltage is applied across the first and second actuation electrodes. Further, the variable capacitor can include a first capacitive electrode attached to the first actuation electrode. The variable capacitor can also include a second capacitive electrode attached to the second actuation electrode and spaced from the first capacitive electrode for movement of at least one of the capacitive electrodes with respect to the other capacitive electrode upon application of voltage across the first and second actuation electrodes to change the capacitance between the first and second capacitive electrodes. Further, the variable capacitor can include first and second torsional beams for providing resistance to movement of the first and second capacitive electrodes with respect to one another. The torsional beams can include a first and second end. Further, the torsional beams can be fixed to one another at the first end. The torsional beams can also extend in substantially opposing directions to the second end and are attached to the second capacitive electrode.

摘要翻译： 提供微机电系统（MEMS）可变电容器装置，系统及相关方法。 根据一个实施例，提供了一种MEMS可变电容器。 可变电容器可以包括间隔开的第一和第二致动电极，并且当跨越第一和第二致动电极施加电压时，至少一个致动电极是可移动的。 此外，可变电容器可以包括附接到第一致动电极的第一电容电极。 可变电容器还可以包括附接到第二致动电极并与第一电容电极隔开的第二电容电极，用于在施加电压跨越第一和第二致动时相对于另一个电容电极移动至少一个电容电极 电极，用于改变第一和第二电容电极之间的电容。 此外，可变电容器可以包括用于提供对第一和第二电容电极相对于彼此的移动的阻力的第一和第二扭转梁。 扭转梁可以包括第一和第二端。 此外，扭转梁可以在第一端彼此固定。 扭转梁还可以在与第二端基本相反的方向上延伸并且附接到第二电容电极。

公开(公告)号：US20060291134A1

公开(公告)日：2006-12-28

申请号：US11313238

申请日：2005-12-20

申请人： Ted Plowman ,  Dana DeReus ,  Randy Richards ,  Arthur Morris

发明人： Ted Plowman ,  Dana DeReus ,  Randy Richards ,  Arthur Morris

IPC分类号： H01G7/00

CPC分类号： H01G5/16 ,  H01G5/04 ,  H01G5/08 ,  H01G5/10 ,  H01G5/18 ,  H01G5/38 ,  H01P1/127

摘要： Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, system and related methods are provided. According to one embodiment, a MEMS variable capacitor is provided. The variable capacitor can include first and second actuation electrodes being spaced apart, and at least one of the actuation electrodes being movable when a voltage is applied across the first and second actuation electrodes. Further, the variable capacitor can include a first capacitive electrode attached to the first actuation electrode. The variable capacitor can also include a second capacitive electrode attached to the second actuation electrode and spaced from the first capacitive electrode for movement of at least one of the capacitive electrodes with respect to the other capacitive electrode upon application of voltage across the first and second actuation electrodes to change the capacitance between the first and second capacitive electrodes. Further, the variable capacitor can include first and second torsional beams for providing resistance to movement of the first and second capacitive electrodes with respect to one another. The torsional beams can include a first and second end. Further, the torsional beams can be fixed to one another at the first end. The torsional beams can also extend in substantially opposing directions to the second end and are attached to the second capacitive electrode.

摘要翻译： 提供微机电系统（MEMS）可变电容器装置，系统及相关方法。 根据一个实施例，提供了一种MEMS可变电容器。 可变电容器可以包括间隔开的第一和第二致动电极，并且当跨越第一和第二致动电极施加电压时，至少一个致动电极是可移动的。 此外，可变电容器可以包括附接到第一致动电极的第一电容电极。 可变电容器还可以包括附接到第二致动电极并与第一电容电极隔开的第二电容电极，用于在施加电压跨越第一和第二致动时相对于另一个电容电极移动至少一个电容电极 电极，用于改变第一和第二电容电极之间的电容。 此外，可变电容器可以包括用于提供对第一和第二电容电极相对于彼此的移动的阻力的第一和第二扭转梁。 扭转梁可以包括第一和第二端。 此外，扭转梁可以在第一端彼此固定。 扭转梁还可以在与第二端基本相反的方向上延伸并且附接到第二电容电极。