公开(公告)号：US20100142582A1

公开(公告)日：2010-06-10

申请号：US12603486

申请日：2009-10-21

申请人： Richard L. Sandstrom ,  William N. Partlo ,  Daniel J. W. Brown ,  Bryan G. Moosman ,  Tae H. Chung ,  Thomas P. Duffey ,  James J. Ferrell ,  Terance Hilsabeck

发明人： Richard L. Sandstrom ,  William N. Partlo ,  Daniel J. W. Brown ,  Bryan G. Moosman ,  Tae H. Chung ,  Thomas P. Duffey ,  James J. Ferrell ,  Terance Hilsabeck

IPC分类号： H01S3/038 ,  H01S3/03

CPC分类号： H01S3/036

摘要： One aspect of the disclosed subject matter describes a gas discharge laser chamber. The gas discharge laser chamber includes a discharge region formed between a first electrode and a second electrode, a tangential fan for circulating gas through the discharge region, wherein the fan is proximate to an input side of the discharge region, an input side acoustic baffle proximate to the input side of the discharge region. The input side acoustic baffle includes a vanishing point leading edge, a vanishing point trailing edge, a gas flow smoothing offset surface aligning a gas flow from a surface of the input side acoustic baffle to an input side of a cathode support in the discharge region, a plurality of ridges separated by a plurality of trenches, wherein the plurality of ridges and the plurality of trenches are aligned with a direction of gas flow through the discharge region and wherein the plurality of ridges have a random pitch between about 0.3 and about 0.7 inch.

摘要翻译： 所公开的主题的一个方面描述了气体放电激光室。 气体放电激光室包括形成在第一电极和第二电极之间的放电区域，用于使气体循环通过放电区域的切向风扇，其中风扇靠近放电区域的输入侧，输入侧隔音板接近 到放电区域的输入侧。 输入侧声挡板包括消失点前缘，消失点后缘，气流平滑偏移表面，使来自输入侧声挡板的表面的气流与放电区域中的阴极支撑体的输入侧对准， 由多个沟槽分开的多个脊，其中所述多个脊和所述多个沟槽与通过所述放电区域的气体流动方向对齐，并且其中所述多个脊具有约0.3和约0.7英寸之间的随机间距 。

公开(公告)号：US07995637B2

公开(公告)日：2011-08-09

申请号：US12603486

申请日：2009-10-21

申请人： Richard L. Sandstrom ,  William N. Partlo ,  Daniel J. W. Brown ,  Bryan G. Moosman ,  Tae H. Chung ,  Thomas P. Duffey ,  James J. Ferrell ,  Terance Hilsabeck

发明人： Richard L. Sandstrom ,  William N. Partlo ,  Daniel J. W. Brown ,  Bryan G. Moosman ,  Tae H. Chung ,  Thomas P. Duffey ,  James J. Ferrell ,  Terance Hilsabeck

IPC分类号： H01S3/22

CPC分类号： H01S3/036

摘要： One aspect of the disclosed subject matter describes a gas discharge laser chamber. The gas discharge laser chamber includes a discharge region formed between a first electrode and a second electrode, a tangential fan for circulating gas through the discharge region, wherein the fan is proximate to an input side of the discharge region, an input side acoustic baffle proximate to the input side of the discharge region. The input side acoustic baffle includes a vanishing point leading edge, a vanishing point trailing edge, a gas flow smoothing offset surface aligning a gas flow from a surface of the input side acoustic baffle to an input side of a cathode support in the discharge region, a plurality of ridges separated by a plurality of trenches, wherein the plurality of ridges and the plurality of trenches are aligned with a direction of gas flow through the discharge region and wherein the plurality of ridges have a random pitch between about 0.3 and about 0.7 inch.

摘要翻译： 所公开的主题的一个方面描述了气体放电激光室。 气体放电激光室包括形成在第一电极和第二电极之间的放电区域，用于使气体循环通过放电区域的切向风扇，其中风扇靠近放电区域的输入侧，输入侧隔音板接近 到放电区域的输入侧。 输入侧声挡板包括消失点前缘，消失点后缘，气流平滑偏移表面，使来自输入侧声挡板的表面的气流与放电区域中的阴极支撑体的输入侧对准， 由多个沟槽分离的多个脊，其中所述多个脊和所述多个沟槽与通过所述放电区域的气体流动的方向对齐，并且其中所述多个脊具有约0.3和约0.7英寸之间的随机间距 。