公开(公告)号：US4645993A

公开(公告)日：1987-02-24

申请号：US710269

申请日：1985-03-11

申请人： Akira Naito ,  Tetsuji Kodama ,  Hideki Tsuruse ,  Hironobu Tsutsumi

发明人： Akira Naito ,  Tetsuji Kodama ,  Hideki Tsuruse ,  Hironobu Tsutsumi

IPC分类号： G05D3/12 ,  G01B11/00 ,  G01B21/00 ,  G05B19/402 ,  G05B19/42

CPC分类号： G05B19/402 ,  G05B2219/37572 ,  G05B2219/49113

摘要： A position control method for aligning a workpiece in a machining apparatus. An alignment pattern, such as a diamond, is provided on the surface of the workpiece. The alignment pattern and the surrounding region are sensed by an image pickup television camera, the output of which is converted to binary form. From the binary data, the central point of the pattern is calculated. The difference between this central point and a reference point is then determined, and the result used to control the position of the workpiece via a positioning mechanism.

摘要翻译： 一种用于在加工装置中对准工件的位置控制方法。 在工件的表面上设置有诸如金刚石的对准图案。 对准图案和周围区域由图像拾取电视摄像机感测，其输出被转换为二进制形式。 从二进制数据中，计算图案的中心点。 然后确定该中心点和参考点之间的差异，并且用于经由定位机构控制工件的位置的结果。

公开(公告)号：US5811805A

公开(公告)日：1998-09-22

申请号：US702183

申请日：1996-08-23

申请人： Nobuyuki Osakabe ,  Junji Endo ,  Tetsuji Kodama ,  Tsuneyuki Urakami ,  Hiroshi Tsuchiya ,  Shinji Ohsuka

发明人： Nobuyuki Osakabe ,  Junji Endo ,  Tetsuji Kodama ,  Tsuneyuki Urakami ,  Hiroshi Tsuchiya ,  Shinji Ohsuka

IPC分类号： H01J37/22 ,  H01J37/244 ,  H01J37/26

CPC分类号： H01J37/22 ,  H01J37/244

摘要： An electron-microscope image viewing apparatus capable of measuring of a moving speed or a vibration frequency of an atomic structure, a magnetic structure, an electric structure or the like of a specimen even when the structure changes at a high rate. The apparatus includes a charged particle source for emitting charged particles, an illuminating electron lens system for illuminating a specimen with a beam of the charged particles, an image magnifying/projecting lens system for magnifying an image of the specimen formed by charged particles scattered upon transmission through the specimen and projecting the magnified image onto an image forming plane, at least one charged particle extracting means provided on the image forming plane of the image magnifying/projecting lens system for taking out the charged particles from a predetermined portion of the charged particle beam projected onto the image forming plane, at least one charged particle detector for detecting the charged particles taken out through the charged particle extracting means, and a signal processing means for processing a signal outputted from the charged particle detector.

摘要翻译： 即使当结构以高速率变化时，也可以测量试样的原子结构，磁性结构，电结构等的移动速度或振动频率的电子显微镜图像观察装置。 该装置包括用于发射带电粒子的带电粒子源，用于用带电粒子束照射样本的照明电子透镜系统，用于放大由透射时散射的带电粒子形成的样本的图像的图像放大/投影透镜系统 通过样本并将放大图像投影到图像形成平面上，至少一个带电粒子提取装置，设置在图像放大/投影透镜系统的图像形成平面上，用于从带电粒子束的预定部分中取出带电粒子 投影到图像形成平面上的至少一个带电粒子检测器，用于检测通过带电粒子提取装置取出的带电粒子;以及信号处理装置，用于处理从带电粒子检测器输出的信号。