Surface-emission cathodes having cantilevered electrodes
    2.
    发明申请
    Surface-emission cathodes having cantilevered electrodes 失效
    具有悬臂电极的表面发射阴极

    公开(公告)号:US20070090476A1

    公开(公告)日:2007-04-26

    申请号:US11237637

    申请日:2005-09-28

    IPC分类号: H01L29/84

    CPC分类号: H01J1/304 H01J1/32

    摘要: A surface-emission cathode formed on an insulating surface having cantilevered, i.e. “undercut,” electrodes. Suitable insulating surfaces include negative electron affinity (NEA) insulators such as glass or diamond. The cathode can operate in a comprised vacuum (e.g., 10−7 Torr) with no bias on the electrodes and low vacuum electric fields (e.g., at least 10 V cm−1). Embodiments of the present invention are inexpensive to fabricate, requiring lithographic resolution of approximately 10 micrometers. These cathodes can be formed over large areas for use in lighting and displays and are suitable for satellite applications, such as cathodes for tethers, thrusters and space-charging neutralizers.

    摘要翻译: 形成在具有悬臂的绝缘表面上的表面发射阴极,即“底切”电极。 合适的绝缘表面包括负电子亲和力(NEA)绝缘体,如玻璃或金刚石。 阴极可以在电极和低真空电场(例如,至少10V cm -1 -1以上)没有偏压的情况下在包含的真空(例如,10 -7托)中操作 >)。 本发明的实施例制造成本低廉,需要约10微米的光刻分辨率。 这些阴极可以形成在用于照明和显示器的大面积上,并且适用于卫星应用,例如系绳阴极,推进器和空间充电中和剂。