公开(公告)号：US07632762B2

公开(公告)日：2009-12-15

申请号：US11638571

申请日：2006-12-14

申请人： Thomas Tiano ,  John Gannon ,  Charles Carey ,  Brian Farrell ,  Richard Czerw

发明人： Thomas Tiano ,  John Gannon ,  Charles Carey ,  Brian Farrell ,  Richard Czerw

IPC分类号： H01L51/30

CPC分类号： H01L51/0048 ,  B82Y10/00 ,  H01L51/0052 ,  H01L51/0595 ,  H01L51/102 ,  Y10S977/888

摘要： Carbon nanotube-based devices made by electrolytic deposition and applications thereof are provided. In a preferred embodiment, the present invention provides a device comprising at least one array of active carbon nanotube junctions deposited on at least one microelectronic substrate. In another preferred embodiment, the present invention provides a device comprising a substrate, at least one pair of electrodes disposed on the substrate, wherein one or more pairs of electrodes are connected to a power source, and a bundle of carbon nanotubes disposed between the at least one pair of electrodes wherein the bundle of carbon nanotubes consist essentially of semiconductive carbon nanotubes. In another preferred embodiment, a semiconducting device formed by electrodeposition of carbon nanotubes between two electrodes is provided. The invention also provides preferred methods of forming a semiconductive device by applying a bias voltage to a carbon nanotube rope. The plurality of metallic single-wall carbon nanotubes are removed (e.g., by application of bias voltage) in an amount sufficient to form the semiconducting device. The devices of the invention include, but not limited to, chemical or biological sensors, carbon nanotube field-effect transistors (CNFETs), tunnel junctions, Schottky junctions, and multi-dimensional nanotube arrays.

摘要翻译： 提供了通过电沉积制造的基于碳纳米管的器件及其应用。 在优选的实施方案中，本发明提供了一种包含沉积在至少一个微电子衬底上的至少一个活性碳纳米管结阵列的器件。 在另一个优选实施例中，本发明提供了一种装置，其包括基板，设置在基板上的至少一对电极，其中一对或多对电极连接到电源，并且一束碳纳米管设置在该 至少一对电极，其中碳纳米管束基本上由半导体碳纳米管组成。 在另一优选实施例中，提供了通过在两个电极之间电沉积碳纳米管而形成的半导体器件。 本发明还提供了通过向碳纳米管绳施加偏置电压来形成半导体器件的优选方法。 多个金属单壁碳纳米管以足以形成半导体器件的量被去除（例如通过施加偏置电压）。 本发明的装置包括但不限于化学或生物传感器，碳纳米管场效应晶体管（CNFET），隧道结，肖特基结和多维纳米管阵列。

公开(公告)号：US20070224804A1

公开(公告)日：2007-09-27

申请号：US11638571

申请日：2006-12-14

申请人： Thomas Tiano ,  John Gannon ,  Charles Carey ,  Brian Farrell ,  Richard Czerw

发明人： Thomas Tiano ,  John Gannon ,  Charles Carey ,  Brian Farrell ,  Richard Czerw

IPC分类号： H01L21/4763

CPC分类号： H01L51/0048 ,  B82Y10/00 ,  H01L51/0052 ,  H01L51/0595 ,  H01L51/102 ,  Y10S977/888

摘要： Carbon nanotube-based devices made by electrolytic deposition and applications thereof are provided. In a preferred embodiment, the present invention provides a device comprising at least one array of active carbon nanotube junctions deposited on at least one microelectronic substrate. In another preferred embodiment, the present invention provides a device comprising a substrate, at least one pair of electrodes disposed on the substrate, wherein one or more pairs of electrodes are connected to a power source, and a bundle of carbon nanotubes disposed between the at least one pair of electrodes wherein the bundle of carbon nanotubes consist essentially of semiconductive carbon nanotubes. In another preferred embodiment, a semiconducting device formed by electrodeposition of carbon nanotubes between two electrodes is provided. The invention also provides preferred methods of forming a semiconductive device by applying a bias voltage to a carbon nanotube rope. The plurality of metallic single-wall carbon nanotubes are removed (e.g., by application of bias voltage) in an amount sufficient to form the semiconducting device. The devices of the invention include, but not limited to, chemical or biological sensors, carbon nanotube field-effect transistors (CNFETs), tunnel junctions, Schottky junctions, and multi-dimensional nanotube arrays.

摘要翻译： 提供了通过电沉积制造的基于碳纳米管的器件及其应用。 在优选的实施方案中，本发明提供了一种包含沉积在至少一个微电子衬底上的至少一个活性碳纳米管结阵列的器件。 在另一个优选实施例中，本发明提供了一种装置，其包括基板，设置在基板上的至少一对电极，其中一对或多对电极连接到电源，并且一束碳纳米管设置在该 至少一对电极，其中碳纳米管束基本上由半导体碳纳米管组成。 在另一优选实施例中，提供了通过在两个电极之间电沉积碳纳米管而形成的半导体器件。 本发明还提供了通过向碳纳米管绳施加偏置电压来形成半导体器件的优选方法。 多个金属单壁碳纳米管以足以形成半导体器件的量被去除（例如通过施加偏置电压）。 本发明的装置包括但不限于化学或生物传感器，碳纳米管场效应晶体管（CNFET），隧道结，肖特基结和多维纳米管阵列。

公开(公告)号：US20060065887A1

公开(公告)日：2006-03-30

申请号：US11090193

申请日：2005-03-28

申请人： Thomas Tiano ,  John Gannon ,  Charles Carey ,  Brian Farrell ,  Richard Czerw

发明人： Thomas Tiano ,  John Gannon ,  Charles Carey ,  Brian Farrell ,  Richard Czerw

IPC分类号： H01L29/06

CPC分类号： H01L51/0048 ,  B82Y10/00 ,  H01L51/0052 ,  H01L51/0595 ,  H01L51/102 ,  Y10S977/888

摘要： Carbon nanotube-based devices made by electrolytic deposition and applications thereof are provided. In a preferred embodiment, the present invention provides a device comprising at least one array of active carbon nanotube junctions deposited on at least one microelectronic substrate. In another preferred embodiment, the present invention provides a device comprising a substrate, at least one pair of electrodes disposed on the substrate, wherein one or more pairs of electrodes are connected to a power source, and a bundle of carbon nanotubes disposed between the at least one pair of electrodes wherein the bundle of carbon nanotubes consist essentially of semiconductive carbon nanotubes. In another preferred embodiment, a semiconducting device formed by electrodeposition of carbon nanotubes between two electrodes is provided. The invention also provides preferred methods of forming a semiconductive device by applying a bias voltage to a carbon nanotube rope. The plurality of metallic single-wall carbon nanotubes are removed (e.g., by application of bias voltage) in an amount sufficient to form the semiconducting device. The devices of the invention include, but not limited to, chemical or biological sensors, carbon nanotube field-effect transistors (CNFETs), tunnel junctions, Schottky junctions, and multi-dimensional nanotube arrays.