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公开(公告)号：US10319559B2
公开(公告)日：2019-06-11
申请号：US15257667
申请日：2016-09-06
Applicant: Tim Dahmen , Niels de Jonge
Inventor： Tim Dahmen , Niels de Jonge
Abstract: The disclosed subject matter relates to testing a sample by means of a particle beam microscope in which the sample is scanned in a point-wise manner by a focused beam of charged particles thereby generating imaging signals. The particle beam dose applied per scanning point is changed during scanning.
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