Semiconductor pressure sensor
    2.
    发明授权
    Semiconductor pressure sensor 失效
    半导体压力传感器

    公开(公告)号:US4771639A

    公开(公告)日:1988-09-20

    申请号:US92151

    申请日:1987-09-02

    IPC分类号: G01L9/00 G01L7/08 G01L9/06

    摘要: A pressure sensor which uses a tapered shearing piezoresistance type gage to obtain high output. The components are fabricated to produce a surface of the gage which is protected by an oxide film which is turned into phosphorated silicate glass; a sensor surface which has an MOS structure with a silicon substrate; oxide film and polycrystalline silicon film; with the polycrystalline silicon film being fixed at a potential higher than maximum potential generated by the shearing gate, and the surface of the piezoresistance element are where P-type impurity is diffused to a low density being inverted. Thus, the shearing gage is operated substantially in a bulk, and influence due to impurity ion from an external source is removed. Furthermore, the pressure sensor buffers stress arising within the sensor by use of the polycrystalline silicon film, prevents occurrence of local stress by keeping the passivation film from dropping in surface level, thereby minimizing zero offset of the output and drift.

    摘要翻译: 压力传感器采用锥形剪切式压阻式量规获得高输出。 制造这些部件以产生由氧化膜保护的测量表面,该氧化膜被转化成磷酸化的硅酸盐玻璃; 具有硅结构的传感器表面; 氧化膜和多晶硅膜; 其中多晶硅膜被固定在高于由剪切栅极产生的最大电位的电位,并且压阻元件的表面是P型杂质扩散到低密度被倒置的位置。 因此,剪切应力基本上以体积运行,并且由于来自外部源的杂质离子的影响被去除。 此外,压力传感器通过使用多晶硅膜来缓冲在传感器内产生的应力,通过保持钝化膜在表面水平下降而防止局部应力的发生,从而最小化输出和漂移的零偏移。

    Flow metering apparatus
    3.
    发明授权
    Flow metering apparatus 失效
    流量计量装置

    公开(公告)号:US4248098A

    公开(公告)日:1981-02-03

    申请号:US910638

    申请日:1978-05-30

    IPC分类号: G01F1/32

    CPC分类号: G01F1/3263

    摘要: A flow metering apparatus is disclosed which includes a dust in which a fluid to be measured flows, a pillar-shaped vortex generator inserted into the duct, and a force detector fixed firmly to the vortex generator substantially in an integrated manner, and capable of directly detecting an alternating force applied to the vortex generator due to Karman's vortex generated by the vortex generator, and converting the alternating force into an electric output signal.

    摘要翻译: 公开了一种流量计量装置,其包括待测流体流过的灰尘,插入导管中的柱状涡流发生器,以及基本上以一体化方式牢固地固定在涡流发生器上的力检测器,并能够直接 检测由涡旋发生器产生的卡曼涡流施加到涡流发生器的交替力,并将交变力转换成电输出信号。

    Flow velocity measuring device
    4.
    发明授权
    Flow velocity measuring device 失效
    流速测量装置

    公开(公告)号:US3948097A

    公开(公告)日:1976-04-06

    申请号:US500451

    申请日:1974-08-26

    IPC分类号: G01F1/32 G01P5/01

    CPC分类号: G01P5/01 G01F1/3218

    摘要: A flow metering apparatus of the type having a vortex generating element with a generally elongate cylindrical shape placed in a stream of flowing fluid so as to produce Karman's vortices at a rate proportional to the velocity of the flowing fluid, with means for detecting the rate of production of vortices to give a linearly related measure of fluid velocity. To improve the correspondence of vortex production rate with flow velocity over wide conditions of flow, the element is formed with a rectangular cross-section in which the depth d along the direction of flow and the height h across the direction of flow are arranged in a ratio d/h of between about 0.5 and 0.9 and preferably in a ratio of 2/3. In the vortex generating element, passageway means extend between openings in the two opposed rectangle sides which are aligned with the direction of flow. The passageway means communicate fluid fluctuations past a flow detector to measure the frequency of vortex production and thereby determine the velocity of the fluid stream. Further improvement of the correspondence of vortex production rate with flow velocity is attained by dimensioning the area A of the passageway opening in relation to the area Ao of the rectangle side containing the opening so that 0.3.ltoreq.A/Ao

    摘要翻译: 该类型的流量计量装置具有放置在流动流体流中的大致细长的圆柱形形状的涡流产生元件,以便以与流动流体的速度成比例的速率产生卡曼涡流,以及用于检测流速 产生涡流以给出流体速度的线性相关度量。 为了提高涡流生成速度与宽流动条件下流速的对应关系,元件形成为矩形横截面,其中沿着流动方向的深度d和跨流动方向的高度h排列成 比率d / h为约0.5至0.9,优选为2/3。 在涡流产生元件中,通道装置在与流动方向对准的两个相对的矩形侧面的开口之间延伸。 通道意味着通过流量检测器传送流体波动,以测量涡流产生的频率,从而确定流体流的速度。 通过将通道开口的面积A相对于包含开口的矩形侧的面积Ao的尺寸确定为使得0.3≤A/ Ao <1,可以进一步提高涡流生成速度与流速的对应关系。 通道开口在涡流发生元件的轴向方向上的长度l与放置元件的管子的内径D有关,使得0.5 <1 / D <1。 最后,矩形高度h与管的内径D有关,使得0.2

    Vortex flow meter
    5.
    发明授权
    Vortex flow meter 失效
    涡街流量计

    公开(公告)号:US4201084A

    公开(公告)日:1980-05-06

    申请号:US959323

    申请日:1978-11-09

    IPC分类号: G01F1/32 G01P5/01

    CPC分类号: G01F1/3263 G01F1/329 G01P5/01

    摘要: A vortex flow meter produces Karman's vortices in a fluid to be measured and a piezoelectric sensor develops a vortex signal therefrom which is proportional to the flow velocity of the fluid. The output signal of the sensor is applied to a charge amplifier and a low pass filter coupled thereto which functions to a predetermined signal amplitude for limiting low and high frequency noise and stabilizing the gain of the system within the vortex frequency measuring range. The output signal is converted by a logic circuit to a pulse signal of vortex frequency and then converted to a DC signal for transmission to an indicator or a receiver.

    摘要翻译: 涡流流量计在待测量的流体中产生卡曼的涡流,压电传感器产生与流体的流速成比例的涡流信号。 传感器的输出信号被施加到电荷放大器和耦合到其上的低通滤波器,其功能于预定的信号幅度,以限制低频和高频噪声并且稳定系统在涡流频率测量范围内的增益。 输出信号由逻辑电路转换为涡流频率的脉冲信号,然后转换为直流信号,以传输到指示器或接收器。