公开(公告)号：US5434425A

公开(公告)日：1995-07-18

申请号：US75394

申请日：1993-06-11

申请人： Toshiro Ishiyama

发明人： Toshiro Ishiyama

IPC分类号： G01B11/00 ,  G01B11/26 ,  G03F9/00 ,  G01N21/86

CPC分类号： G03F9/70

摘要： An optical position detecting apparatus detects a position level and inclination of a surface of an object to be detected without the need to increase the working distance of an objective optical system. The apparatus includes an objective optical system having a lens arranged to face the surface, an illuminating optical system for supplying a position detecting light beam from the periphery of the objective optical system, a photodetector for generating an electric output corresponding to a light beam received, a condenser optical system for converging a reflected light beam from the surface illumunated with the incident light beam from the illuminating optical system onto a photosensing surface of the photodetector, and a beam directing optical element for directing at least one of the incident light beam and the reflected light beam into an optical path passing through the lens.

摘要翻译： 光学位置检测装置检测待检测物体的表面的位置水平和倾斜度，而不需要增加物镜光学系统的工作距离。 该装置包括具有布置成面向表面的透镜的物镜光学系统，用于从物镜光学系统的周边提供位置检测光束的照明光学系统，用于产生对应于所接收的光束的电输出的光电检测器， 聚光器光学系统，用于将来自未知的入射光束的表面的反射光束会聚到来自照明光学系统的光敏检测器的感光表面上;以及光束引导光学元件，用于引导入射光束和 反射光束进入通过透镜的光路中。

公开(公告)号：US5668673A

公开(公告)日：1997-09-16

申请号：US456624

申请日：1995-06-01

申请人： Yutaka Suenaga ,  Toshiro Ishiyama ,  Yoshiyuki Shimizu ,  Kiyoshi Hayashi

发明人： Yutaka Suenaga ,  Toshiro Ishiyama ,  Yoshiyuki Shimizu ,  Kiyoshi Hayashi

IPC分类号： G02B17/08 ,  G03F7/20 ,  G02B17/00 ,  G02B21/00

CPC分类号： G02B17/0828 ,  G02B17/0892 ,  G03F7/70225

摘要： A first partial optical system including a first group of lenses having a positive refractive power, a first concave reflection mirror and a second group of lenses having a positive refractive power, for forming a primary reduced image of an object, a second partial optical system including a second concave reelection mirror and a third group of lenses having a positive refractive power, for further reducing the primary reduced image and refocusing it, and a reflection mirror arranged between the first partial optical system and the second partial optical system, for deflecting a light path are arranged in a sequence as viewed from the object. A good image-forming ability as a projection optical system for fabricating a semiconductor device is attained with a simple construction.

摘要翻译： 第一部分光学系统，包括具有正屈光力的第一组透镜，第一凹面反射镜和具有正折光力的第二组透镜，用于形成物体的初级缩小图像;第二部分光学系统，包括 具有正折射力的第二凹面重选镜和第三组透镜，用于进一步减小初级缩小图像并重新聚焦;以及反射镜，布置在第一部分光学系统和第二部分光学系统之间，用于偏转光 路径按照从对象观察的顺序排列。 作为用于制造半导体器件的投影光学系统，具有良好的成像能力，结构简单。

公开(公告)号：US5592329A

公开(公告)日：1997-01-07

申请号：US187484

申请日：1994-01-28

申请人： Toshiro Ishiyama ,  Yutaka Suenaga

发明人： Toshiro Ishiyama ,  Yutaka Suenaga

IPC分类号： G02B17/08 ,  G03F7/20 ,  G02B17/00 ,  G02B5/30 ,  G02B5/10 ,  G02B3/00

CPC分类号： G02B17/0844 ,  G02B17/0812 ,  G02B17/0828 ,  G02B17/0892 ,  G03F7/70225

摘要： A catadioptric optical system includes, in succession from the object side, a first partial optical system having positive refractive power and for forming the primary image of an object, and a second partial optical system having positive refractive power and for forming a secondary image by light from the primary image, and at least one aperture stop may be provided in the optical path of the first partial optical system and at least one aperture stop may be provided in the optical path of the second partial optical system.

摘要翻译： 反射折射光学系统从物体侧连续地包括具有正折光力并用于形成物体的主图像的第一部分光学系统和具有正屈光力的第二部分光学系统，并且用于通过光形成二次图像 并且可以在第一部分光学系统的光路中设置至少一个孔径光阑，并且可以在第二部分光学系统的光路中设置至少一个孔径光阑。

公开(公告)号：US5321553A

公开(公告)日：1994-06-14

申请号：US26593

申请日：1993-03-05

申请人： Toshiro Ishiyama ,  Kenzaburo Suzuki

发明人： Toshiro Ishiyama ,  Kenzaburo Suzuki

IPC分类号： G02B13/18 ,  G02B15/177 ,  G02B15/14

CPC分类号： G02B13/18 ,  G02B15/177

摘要： In a zoom lens having a lens unit of negative refractive power most adjacent to the object side, distortion can be corrected better and an excellent imaging performance is maintained. In a zoom lens having a lens unit of negative refractive power most adjacent to the object side, a negative lens whose image side surface in contact with air is formed by a concave surface is provided in the lens unit of negative refractive power, and the shape of the concave surface of the negative lens is made into an aspherical surface which satisfies the condition that -5

摘要翻译： 在具有与物体侧最相邻的负折光力的透镜单元的变焦透镜中，可以更好地校正失真，并且保持优异的成像性能。 在具有与物体侧最相邻的负折射力的透镜单元的变焦透镜中，在负屈光力的透镜单元中设置有与空气接触的图像侧表面由凹面形成的负透镜， 将负透镜的凹面制成为非球面，其满足关于锥形常数κ的-5 <κ<0.75的条件，并且其曲率随着光轴的单调减小。

公开(公告)号：US07154585B2

公开(公告)日：2006-12-26

申请号：US10611966

申请日：2003-07-03

申请人： Koji Shigematsu ,  Youhei Fujishima ,  Yasuhiro Omura ,  Toshiro Ishiyama

发明人： Koji Shigematsu ,  Youhei Fujishima ,  Yasuhiro Omura ,  Toshiro Ishiyama

IPC分类号： G03B27/54 ,  G02B9/00

CPC分类号： G03F7/703 ,  G02B13/146 ,  G03F7/70241

摘要： Provided is a projection optical system for forming an image of a pattern of a first object (R) on a second object (W). The projection optical system is made of an optical material having a refractive index of not more than 1.6 and is substantially telecentric both on the first object side and on the second object side. The projection optical system satisfies the condition of (λ×L)/(NA×Y02)

摘要翻译： 提供了一种用于在第二物体（W）上形成第一物体（R）的图案的图像的投影光学系统。 投影光学系统由折射率不大于1.6的光学材料制成，并且在第一物体侧和第二物体侧均基本上是远心的。 投影光学系统满足条件（lambdaxL）/（NAxY＆lt; 0＆lt; 2＆gt; 2＆lt; 2＆lt; 2＆lt; 2＆lt; 2＆lt; 2＆lt; 2＆lt; 光，L是第一物体和第二物体之间的距离，MA是第二物体侧上的数值孔径，Y 0是第二物体上的最大像高。

公开(公告)号：US5771125A

公开(公告)日：1998-06-23

申请号：US874920

申请日：1997-06-13

申请人： Toshiro Ishiyama

发明人： Toshiro Ishiyama

IPC分类号： G02B17/08 ,  G03F7/20 ,  H01L21/027

CPC分类号： G02B17/0892 ,  G02B17/08 ,  G03F7/70225 ,  G03F7/7025 ,  G03F7/70566

摘要： Catadioptric systems are disclosed for projecting images of an object such as a mask onto a substrate. The catadioptric systems have high numerical apertures and large working distances. The catadioptric systems are useful with short-wavelength illumination and permit the object and substrate to be in parallel planes. Conditional expressions are provided for the catadioptric systems.

摘要翻译： 公开了反射折射系统，用于将诸如掩模的物体的图像投影到基底上。 反射折射系统具有高数值孔径和大的工作距离。 反射折射系统对于短波长照明是有用的，并且允许物体和衬底处于平行平面。 为反射折射系统提供条件表达式。

公开(公告)号：US5694241A

公开(公告)日：1997-12-02

申请号：US577280

申请日：1995-12-22

申请人： Toshiro Ishiyama ,  Yutaka Suenaga

发明人： Toshiro Ishiyama ,  Yutaka Suenaga

IPC分类号： G02B17/08 ,  G03F7/20 ,  H01L21/027 ,  G02B17/00 ,  G02B21/00

CPC分类号： G02B17/0892 ,  G02B17/08 ,  G03F7/70225 ,  G03F7/70275

摘要： A catadioptric reduction projection optical system having a structure capable of increasing a numerical aperture without increasing the size of a beam splitter and achieves excellent performance of a semiconductor manufacturing apparatus. The catadioptric reduction projection optical system comprises a first partial optical system having a first lens group, the beam splitter, a lens element, and a concave reflecting mirror to form an intermediate image of a first object, a second partial optical system for forming a reduced image of the intermediate image on a second object, the second partial optical system having a second lens group of a positive refracting power and arranged in an optical path between a second object surface and a surface on which the intermediate image is formed, and a third lens group arranged in an optical path between the beam splitter and the third lens group. The first lens group is arranged in an optical path between the first object and the beam splitter. Light from the first object guided to the concave reflecting mirror through the first lens group, the beam splitter, and the second lens group in the order named. Light reflected by the concave reflecting mirror passes through the second lens group and the beam splitter in the order named and is guided to the surface on which the intermediate image is formed. At least a part of the fourth lens group is arranged in an optical path between the beam splitter and the surface.

摘要翻译： 一种反折射减小投影光学系统，其具有能够增加数值孔径而不增加分束器的尺寸并且实现半导体制造装置的优异性能的结构。 折反射折射投影光学系统包括具有第一透镜组，分束器，透镜元件和凹面反射镜的第一部分光学系统，以形成第一物体的中间图像;第二部分光学系统，用于形成缩小的 中间图像在第二物体上的图像，第二部分光学系统具有正折射率的第二透镜组，并且布置在第二物体表面和形成有中间图像的表面之间的光路中，并且第三透镜组 透镜组布置在分束器和第三透镜组之间的光路中。 第一透镜组布置在第一物体和分束器之间的光路中。 来自第一物体的光通过第一透镜组，分束器和第二透镜组以指定的顺序被引导到凹面反射镜。 由凹面反射镜反射的光以指定的顺序通过第二透镜组和分束器，并被引导到其上形成中间图像的表面。 第四透镜组的至少一部分被布置在分束器和表面之间的光路中。

公开(公告)号：US5477388A

公开(公告)日：1995-12-19

申请号：US200459

申请日：1994-02-23

申请人： Toshiro Ishiyama ,  Yutaka Suenaga ,  Yoshiyuki Shimizu

发明人： Toshiro Ishiyama ,  Yutaka Suenaga ,  Yoshiyuki Shimizu

IPC分类号： G02B15/16 ,  G02B13/04

CPC分类号： G02B15/161

摘要： An inverse telescopic wide angle lens comprises a diaphragm; a front lens group of an integral positive or negative refractive power, positioned in the object side in front of the diaphragm and having a first lens group of a negative refractive power including a negative lens of which an image-side air-contacting surface is formed as an aspherical surface concave to the image side, and a second lens group of a positive refractive power positioned between the first lens group and the diaphragm; and a rear lens group of an integral positive refractive power, positioned behind the diaphragm and having plural lenses. The negative lens in the first lens group is so constructed that the absolute value of the refractive power of the concave surface on the optical axis is larger than that of the refractive power of the surface at the object side on the optical axis, that the curvature of the concave surface decreases monotonously with the distance from the optical axis, and that the form of the concave surface of the negative lens at the image side satisfies a particular condition. The effective diameter of the lens closest to the object in the first lens group is so constructed as to satisfy a particular condition.

摘要翻译： 反伸缩广角镜头包括隔膜; 位于隔膜前方的物体侧的具有整体的正或负折射光焦度的前透镜组，并且具有包括形成有图像侧空气接触表面的负透镜的负折射光焦度的第一透镜组 作为朝向像侧凹入的非球面，以及位于第一透镜组和隔膜之间的正折光力的第二透镜组; 以及位于隔膜后面并具有多个透镜的整体正屈光力的后透镜组。 第一透镜组中的负透镜被构造成使得光轴上的凹面的折射力的绝对值大于在光轴上的物体侧的表面的屈光力的绝对值，曲率 凹面的距离与光轴的距离单调减小，负透镜在像侧的凹面的形状满足特定条件。 第一透镜组中最靠近物体的透镜的有效直径被构造成满足特定条件。

公开(公告)号：US5321554A

公开(公告)日：1994-06-14

申请号：US118666

申请日：1993-09-10

申请人： Toshiro Ishiyama ,  Yoshiyuki Shimizu

发明人： Toshiro Ishiyama ,  Yoshiyuki Shimizu

IPC分类号： G02B15/16 ,  G02B15/177 ,  G02B13/04 ,  G02B15/14

CPC分类号： G02B15/161 ,  G02B15/177

摘要： An inverse telescopic wide angle lens comprising:a diaphragm;a front lens group of an integral positive or negative refractive power, positioned in the object side in front of the diaphragm and having a first lens group of a negative refractive power including a negative lens of which an image-side air-contacting surface is formed as an aspherical surface concave to the image side, and a second lens group of a positive refractive power positioned between the first lens group and the diaphragm; anda rear lens group of an integral positive refractive power, positioned behind the diaphragm and having plural lenses;wherein the rear lens group includes a movable lens group consisting of plural lenses which are integrally moved for focusing, wherein the front lens group is fixed, and the focusing is conducted by the movement of the movable lens group alone in such a manner as to vary the rear focal length between the movable lens group and the image plane.

摘要翻译： 一种逆伸缩广角镜头，包括：隔膜; 位于隔膜前方的物体侧的具有整体的正或负折射光焦度的前透镜组，并且具有包括形成有图像侧空气接触表面的负透镜的负折射光焦度的第一透镜组 作为朝向像侧凹入的非球面，以及位于第一透镜组和隔膜之间的正折光力的第二透镜组; 以及位于隔膜后面并具有多个透镜的整体正屈光力的后透镜组; 其中，所述后透镜组包括由多个透镜组成的可移动透镜组，所述多个透镜被一体地移动用于聚焦，其中所述前透镜组被固定，并且所述聚焦通过所述可移动透镜组的移动以改变的方式进行 可移动透镜组与图像平面之间的后焦距。