公开(公告)号：US20130142594A1

公开(公告)日：2013-06-06

申请号：US13309283

申请日：2011-12-01

Applicant: Shao-Yen Ku ,  Ming-Jung Chen ,  Tsu-Yang Chung ,  Chi-Yun Tseng ,  Jui-Ping Chuang

Inventor： Shao-Yen Ku ,  Ming-Jung Chen ,  Tsu-Yang Chung ,  Chi-Yun Tseng ,  Jui-Ping Chuang

IPC: H01L21/677

CPC classification number: H01L21/67201

Abstract: An apparatus comprises a process chamber, and a loadlock connected to the process chamber. The loadlock is configured to have a wafer holder disposed therein. The wafer holder is configured to store a plurality of wafers, and is configured to transport the plurality of wafers away from the loadlock.

Abstract translation: 一种装置包括处理室和连接到处理室的负载锁。 负载锁被配置为具有设置在其中的晶片保持架。 晶片保持器被配置为存储多个晶片，并且被配置为将多个晶片远离装载锁传送。