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公开(公告)号：US20110210116A1
公开(公告)日：2011-09-01
申请号：US13032677
申请日：2011-02-23
IPC分类号： H05B1/02
CPC分类号： H01L21/67748 , H01L21/67109 , H01L21/67248
摘要： Disclosed is a heat treatment apparatus for performing a heat treatment on an object to-be-processed by a heater, which can inhibit variation in thermal histories among the objects to-be-processed. The heat treatment apparatus includes, among others, a correction part to correct a power control signal output from an adjusting unit so that a conduction rate of an AC voltage applied to a heater is decreased. Specifically, the correction is performed based on a value obtained by multiplying a first correction value with a second correction value, where the first correction value is generated according to a ratio of the voltage detection value of AC power source to a predetermined reference voltage, and the second correction value is generated according to a ratio of the resistance value of the heater to a predetermined reference resistance value.
摘要翻译： 公开了一种用于对能够抑制待处理对象的热历史变化的加热器进行热处理的热处理装置。 所述热处理装置具有校正部，其对从调整部输出的功率控制信号进行校正，使得施加于加热器的交流电压的导通率降低。 具体地，基于通过将第一校正值与第二校正值相乘而获得的值进行校正，其中根据AC电源的电压检测值与预定参考电压的比率来生成第一校正值，以及 根据加热器的电阻值与预定的参考电阻值的比率产生第二校正值。
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公开(公告)号：US08378272B2
公开(公告)日：2013-02-19
申请号：US13032677
申请日：2011-02-23
IPC分类号： H05B1/02
CPC分类号： H01L21/67748 , H01L21/67109 , H01L21/67248
摘要： Disclosed is a heat treatment apparatus for performing a heat treatment on an object to-be-processed by a heater, which can inhibit variation in thermal histories among the objects to-be-processed. The heat treatment apparatus includes, among others, a correction part to correct a power control signal output from an adjusting unit so that a conduction rate of an AC voltage applied to a heater is decreased. Specifically, the correction is performed based on a value obtained by multiplying a first correction value with a second correction value, where the first correction value is generated according to a ratio of the voltage detection value of AC power source to a predetermined reference voltage, and the second correction value is generated according to a ratio of the resistance value of the heater to a predetermined reference resistance value.
摘要翻译： 公开了一种用于对能够抑制待处理对象的热历史变化的加热器进行热处理的热处理装置。 所述热处理装置具有校正部，其对从调整部输出的功率控制信号进行校正，使得施加于加热器的交流电压的导通率降低。 具体地，基于通过将第一校正值与第二校正值相乘而获得的值进行校正，其中根据AC电源的电压检测值与预定参考电压的比率来生成第一校正值，以及 根据加热器的电阻值与预定的参考电阻值的比率产生第二校正值。
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