公开(公告)号：US20060280615A1

公开(公告)日：2006-12-14

申请号：US10553457

申请日：2004-04-08

申请人： Thomas Bohm ,  Ulrich Dobbler ,  Ralf Hirche ,  Werner Grosse Bley

发明人： Thomas Bohm ,  Ulrich Dobbler ,  Ralf Hirche ,  Werner Grosse Bley

IPC分类号： F04B49/00

CPC分类号： G01M3/202

摘要： A leak detector operating according to the counterflow principle comprises a first high vacuum pump that operates in series with a primary pump. A second high vacuum pump is branched at a connecting point and an entry side thereof is connected to a mass spectrometer. A light test gas in the form of helium flows through the second high vacuum pump in a direction opposite to a transport direction. A conduit connecting an inlet to the entry side of the first high vacuum pump is devoid of restricted flow zones and valves in such a way that the pumping capacity of the leak detector is high for helium, thereby reducing the response time thereof. A valve for blocking the conduit leading via the first high vacuum pump is arranged between the exit side thereof and the entry side of the primary pump.

摘要翻译： 根据逆流原理操作的泄漏检测器包括与初级泵串联操作的第一高真空泵。 第二高真空泵在连接点处分支，其入口侧连接到质谱仪。 氦形式的轻质试验气体沿着与输送方向相反的方向流过第二高真空泵。 将入口连接到第一高真空泵的进入侧的导管没有限制的流动区域和阀，使得泄漏检测器的泵送能力对于氦是高的，从而减少其响应时间。 用于阻塞通过第一高真空泵引导的导管的阀布置在其出口侧和主泵的入口侧之间。