公开(公告)号：US20090244696A1

公开(公告)日：2009-10-01

申请号：US12226038

申请日：2007-04-04

申请人： Roland Geyl ,  Vincent Patoz ,  Francois Riguet ,  Francois Dufresne De Virel

发明人： Roland Geyl ,  Vincent Patoz ,  Francois Riguet ,  Francois Dufresne De Virel

IPC分类号： G02B5/10

CPC分类号： G03F7/70175

摘要： Device for collecting a flux of electromagnetic radiation in the extreme ultraviolet (EUV) emitted by a source (S), comprising a main, first collector stage (E1), with a concave collector mirror (2) placed in front of the source (S) at a distance of greater than 250 mm and pierced by a central hole (3) and a convex mirror (4) placed behind the concave mirror level with the source and pierced by a central hole (5), and at least a second collector stage (E2) with a concave collector mirror (7) placed in front of the stage (E1) and pierced by a central hole (8) and a convex mirror (9) placed behind the concave mirror.

摘要翻译： 用于收集由源（S）发射的极紫外（EUV）中的电磁辐射通量的装置，包括主要的第一收集器台（E1）和放置在源极（S）前面的凹集电镜 ），大于250mm的距离并且被中心孔（3）刺穿并且被凸起的反射镜（4）设置在所述凹面镜面的后面与所述源并被中心孔（5）刺穿，并且至少第二收集器 平台（E2），其具有放置在台架（E1）的前面并被中心孔（8）刺穿的凹集电镜（7）和设置在凹面镜后面的凸面镜（9）。

公开(公告)号：US08023182B2

公开(公告)日：2011-09-20

申请号：US12226038

申请日：2007-04-04

申请人： Roland Geyl ,  Vincent Patoz ,  François Riguet ,  François Dufresne De Virel

发明人： Roland Geyl ,  Vincent Patoz ,  François Riguet ,  François Dufresne De Virel

IPC分类号： G02B5/08

CPC分类号： G03F7/70175

摘要： Device for collecting a flux of electromagnetic radiation in the extreme ultraviolet (EUV) emitted by a source, including a main, first collector stage, with a concave collector mirror placed in front of the source at a distance of greater than 250 mm and pierced by a central hole, and a convex mirror placed behind the concave mirror level with the source and pierced by a central hole, and at least a second collector stage with a concave collector mirror placed in front of the stage and pierced by a central hole and a convex mirror placed behind the concave mirror.

摘要翻译： 用于收集由源（包括主要的第一收集器台）发射的极紫外（EUV）中的电磁辐射通量的装置，其具有以大于250mm的距离放置在源的前方的凹集电镜，并被 一个中心孔和一个凸起的镜子，放置在凹面镜面的后面，与源头一起被中心孔刺穿，并且至少一个第二收集器台带有一个凹形收集器镜子，放置在舞台的前面，并被中心孔和 凸镜放置在凹面镜后面。