公开(公告)号：US4358657A

公开(公告)日：1982-11-09

申请号：US196396

申请日：1980-10-14

申请人： Karl-Heinz Steigerwald ,  Peter Anderl ,  Erwin Kappelsberger ,  Clauspeter Monch ,  Dieter Konig ,  Wilheim Scheffels

发明人： Karl-Heinz Steigerwald ,  Peter Anderl ,  Erwin Kappelsberger ,  Clauspeter Monch ,  Dieter Konig ,  Wilheim Scheffels

IPC分类号： H01J37/18 ,  B23K15/00

CPC分类号： H01J37/18

摘要： A system for sealing the working vacuum chamber of a charged particle beam machine which is movable with respect to a workpiece is disclosed. The system includes a housing with a central compartment having wire-shaped elements urged against the workpiece to provide a seal therebetween, and lateral compartments, each having a packing of sealing material which is biased against the workpiece surface of a spring arrangement. Rollers and a flexible lip seal arrangement having a flexible sheath of synthetic rubber are also disclosed.

摘要翻译： 公开了一种用于密封相对于工件可移动的带电粒子束机的工作真空室的系统。 该系统包括具有中央隔室的壳体，其具有被压靠在工件上的线形元件以在其间提供密封，以及横向隔室，每个隔室具有偏压弹簧装置的工件表面的密封材料的填料。 还公开了具有合成橡胶的柔性护套的辊和柔性唇密封装置。